Monitoring system and method

Patent metadata

Field	Value
Publication number	US-10845229-B2
Application number	US-201816032746-A
Country	US
Kind code	B2
Filing date	Jul 11, 2018
Priority date	Jul 11, 2018
Publication date	Nov 24, 2020
Grant date	Nov 24, 2020

Abstract

The present disclosure relates to an abatement apparatus monitoring system. The abatement apparatus monitoring system includes a processor; and at least one load cell for outputting a load cell signal to the processor. The at least one load cell is configured to support a waste tank of an abatement apparatus. The processor is configured to monitor a level of a liquid in the waste tank in dependence on the load cell signal. The present disclosure also relates to an abatement system comprising an abatement apparatus monitoring system; and a method of monitoring operation of an abatement system.

First claim

The invention claimed is:

1. An abatement apparatus monitoring system comprising:
a processor;
a first sensor disposed in the waste tank and providing a first sensor signal to the processor;
at least one load cell for outputting a load cell signal to the processor, the at least one load cell being configured to support a waste tank of an abatement apparatus;
wherein the processor is configured to:
operate in a calibration mode during which the processor controls a level of liquid in the waste tank based on the first sensor signal, and stores values of the first sensor signal and the load cell signal; and
operate in a control mode during which the processor controls a level of liquid in the waste tank based on the load cell signal and the stored values of the first sensor signal and the load cell signal.

2. The abatement apparatus monitoring system as claimed in claim 1 , wherein the first sensor comprises a low liquid level sensor, wherein the stored values of the first sensor signal and the load cell signal are used in the control mode to determine when values of the load cell signal indicate a low liquid level in the waste tank.

3. The abatement apparatus monitoring system as claimed in claim 1 , further comprising a second sensor disposed in the waste tank and providing a second sensor signal wherein when operating in the calibration mode the processor uses the second sensor signal when controlling the level of the liquid in the waste tank and stores values of the second sensor signal and when operating in the control mode, the processor controls the level of liquid in the waste tank based on the load cell signal and the stored values of the first sensor signal, the second sensor signal and the load cell signal.

4. The abatement apparatus monitoring system as claimed in claim 3 , wherein the second sensor comprises a high liquid level sensor, wherein the stored values of the second sensor signal and the load cell signal are used in the control mode to determine when values of the load cell signal indicate a high liquid level in the waste tank.

5. The abatement apparatus monitoring system as claimed in claim 1 , wherein the processor is configured to output a fill control signal to initiate a fill cycle when the load cell signal and the stored values of the first sensor signal and the load cell signal indicate a liquid level in the waste tank which is less than or equal to a lower threshold.

6. The abatement apparatus monitoring system as claimed in claim 3 , wherein the processor is configured to output a drain control signal to initiate a drain cycle when the load cell signal and the stored values of the second sensor signal and the load cell signal indicate a liquid level in the waste tank which is greater than or equal to an upper threshold.

7. The abatement apparatus monitoring system as claimed in claim 1 , wherein the support means comprises a load plate for supporting the waste tank.

8. The abatement apparatus monitoring system as claimed in claim 1 , wherein the load plate is carried by the at least one load cell.

9. The abatement apparatus monitoring system as claimed in claim 7 , wherein the load plate is movably mounted on first and second guide members.

10. The abatement apparatus monitoring system as claimed in claim 9 , wherein the first and second guide members are carried by the at least one load cell.

11. The abatement apparatus monitoring system as claimed in claim 1 comprising a plurality of said load cells.

12. An abatement system comprising:
an abatement apparatus; and
the abatement apparatus monitoring system as claimed in claim 1 .

13. A method of monitoring operation of an abatement system comprising a waste tank, the method comprising:
operating in a calibration mode during which a level sensor signal generated by a level sensor in the waste tank is used to control a liquid level in the waste tank and during which values for the level sensor signal and values for a load cell signal generated by a load cell are stored to produce stored values; and
operating in a control mode during which the load cell signal and the stored values are used to control the liquid level in the waste tank.

14. A non-transitory computer-readable medium having a set of instructions stored therein which, when executed, cause a processor to perform the method claimed in claim 13 .

Assignees

• Edwards Vacuum Llc

Inventors

• Cox Calvin Michael
• Dupre David Wren
• Romeo Mark Kollin

Classifications

• G01F25/22

  Checking proper indicating of discrete level by floats · CPC title

• G01F25/20

  of apparatus for measuring liquid level · CPC title

• F23G7/06 Primary

  of waste gases or noxious gases, e.g. exhaust gases (exhaust apparatus for engines with means for rendering the exhaust innocuous, e.g. by thermal or catalytic conversion, F01N3/08; combustion of uncombusted material from primary combustion within apparatus for combustion of solid or fluent fuel F23B {, of non combusted material from primary combustion of solid fuels; of gases produced by primary combustion of solid fuels F23B90/04}, F23C) · CPC title

• B01D47/02

  by passing the gas or air or vapour over or through a liquid bath · CPC title

• G01F23/20 Primary

  by measurement of weight, e.g. to determine the level of stored liquefied gas · CPC title