Optical scanning device

Patent metadata

Field	Value
Publication number	US-10838197-B2
Application number	US-201816202698-A
Country	US
Kind code	B2
Filing date	Nov 28, 2018
Priority date	Dec 21, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

An optical scanning device includes a mirror including a light reflection surface, a mirror support structure that supports the mirror, a pair of first driving beams connected to the mirror support structure and disposed on the corresponding sides of the mirror support structure, first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through the center of the light reflection surface, and a fixed frame that supports the first driving beams. The center of gravity of the mirror and the mirror support structure is located on the first axis.

First claim

What is claimed is:

1. An optical scanning device, comprising:
a mirror including a light reflection surface;
a mirror support structure that supports the mirror;
a pair of first driving beams connected to the mirror support structure and disposed on corresponding sides of the mirror support structure;
first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through a center of the light reflection surface; and
a fixed frame that supports the first driving beams, wherein
each of the first driving beams includes multiple first beams extending in a direction that is orthogonal to the first axis;
ends of adjacent first beams are connected to each other such that each of the first driving beams forms a zig-zag shape as a whole;
a center of gravity of the mirror and the mirror support structure is located on the first axis; and
the mirror support structure includes
a mirror support that supports the mirror,
a pair of second driving beams connected to the mirror support and disposed on corresponding sides of the mirror support,
a movable frame to which the first driving beams and the second driving beams are connected, and
second driving sources disposed on the second driving beams and configured to cause the mirror to rotate around a second axis that is substantially orthogonal to the first axis and passes through the center of the light reflection surface.

2. The optical scanning device as claimed in claim 1 , wherein
the movable frame is connected to the first driving beams via a pair of mirror support structure connectors that are disposed on a second side that is opposite a first side with respect to the first axis; and
the movable frame is configured such that a portion of the movable frame on the first side is heavier than a portion of the movable frame on the second side.

3. The optical scanning device as claimed in claim 2 , wherein the fixed frame is connected to the first driving beams via a pair of fixed frame connectors that are disposed on the second side.

4. The optical scanning device as claimed in claim 2 , wherein a width of the portion of the movable frame on the first side is greater than a width of the portion of the movable frame on the second side.

5. The optical scanning device as claimed in claim 2 , wherein a center of gravity of the mirror and the mirror support is located at an intersection between the first axis and the second axis.

6. The optical scanning device as claimed in claim 2 , wherein the second driving beams are connected to the mirror support via a torsion beam that enables the mirror to rotate around the second axis.

7. The optical scanning device as claimed in claim 2 , wherein
each of the second driving beams includes multiple second beams extending in a direction that is orthogonal to the second axis; and
ends of adjacent second beams are connected to each other such that each of the second driving beams forms a shape as a whole.

8. The optical scanning device as claimed in claim 7 , wherein
the mirror support is connected to the second driving beams via a pair of mirror support connectors that are disposed on a second predetermined side that is opposite a first predetermined side with respect to the second axis; and
the mirror support is configured such that a portion of the mirror support on the first predetermined side is heavier than a portion of mirror support on the second predetermined side.

9. The optical scanning device as claimed in claim 7 , wherein
the movable frame is connected to the second driving beams via a pair of movable frame connectors that are disposed on a second predetermined side that is opposite a first predetermined side with respect to the second axis; and
the mirror support is configured such that a portion of the mirror support on the first predetermined side is heavier than a portion of the mirror support on the second predetermined side.

10. The optical scanning device as claimed in claim 1 , wherein
the fixed frame is connected to the first driving beams via a pair of fixed frame connectors that are disposed on a second side that is opposite a first side with respect to the first axis; and
the movable frame is configured such that a portion of the movable frame on the first side is heavier than a portion of the movable frame on the second side.

11. The optical scanning device as claimed in claim 10 , wherein the mirror support structure is connected to the first driving beams via a pair of mirror support structure connectors that are disposed on the first side.

12. An optical scanning device, comprising:
a mirror including a light reflection surface;
a mirror support structure that supports the mirror;
a pair of first driving beams connected to the mirror support structure and disposed on corresponding sides of the mirror support structure;
first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through a center of the light reflection surface; and
a fixed frame that supports the first driving beams, wherein
a center of gravity of the mirror and the mirror support structure is located on the first axis;
the mirror support structure is connected to the first driving beams via a pair of mirror support structure connectors that are disposed on a second side that is opposite a first side with respect to the first axis; and
the mirror support structure is configured such that a portion of the mirror support structure on the first side is heavier than a portion of the mirror support structure on the second side.

13. The optical scanning device as claimed in claim 12 , wherein the fixed frame is connected to the first driving beams via a pair of fixed frame connectors that are disposed on the second side.

14. An optical scanning device, comprising:
a mirror including a light reflection surface;
a mirror support structure that supports the mirror;
a pair of first driving beams connected to the mirror support structure and disposed on corresponding sides of the mirror support structure;
first driving sources disposed on the first driving beams and configured to cause the mirror to rotate around a first axis that passes through a center of the light reflection surface; and
a fixed frame that supports the first driving beams, wherein
a center of gravity of the mirror and the mirror support structure is located on the first axis;
the fixed frame is connected to the first driving beams via a pair of fixed frame connectors that are disposed on a second side that is opposite a first side with respect to the first axis; and
the mirror support structure is configured such that a portion of the mirror support structure on the first side is heavier than a portion of the mirror support structure on the second side.

15. The optical scanning device as claimed in claim 14 , wherein the mirror support structure is connected to the first driving beams via a pair of mirror support structure connectors that are disposed on the first side.

Assignees

• Yamada Tsukasa
• Mitsumi Electric Co Ltd

Inventors

• Yamada Tsukasa

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title