Lubrication system and a method for lubricating a transmission system component

Patent metadata

Field	Value
Publication number	US-10837540-B2
Application number	US-201715709271-A
Country	US
Kind code	B2
Filing date	Sep 19, 2017
Priority date	Sep 19, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A method and a lubrication system for lubricating a transmission system component. The lubrication system may include a lubrication system reservoir for storing a lubrication liquid; and a distribution system. The distribution system may be configured to refill, with the lubrication liquid, a transmission system reservoir that is configured to lubricate the transmission system component. The refill occurs while the transmission system component and the lubrication system are positioned within a vacuum chamber.

First claim

We claim:

1. A system comprising:
a vacuum chamber that defines a vacuum space;
a transmission system including a bearing and a rail positioned within the vacuum space, the bearing being slidably coupled to the rail and including a first fluid reservoir fluidly coupled to the bearing and configured to store a first volume of lubricant
a lubrication system coupled to the bearing and disposed in the vacuum chamber, the lubrication system including a second reservoir configured to store a second volume of lubricant at least three times larger than the first volume; and
a lubricant distribution system operatively coupled between the first and second reservoirs to deliver lubricant from the second reservoir to the first reservoir to refill the first reservoir while bearing and the lubrication system are positioned within the vacuum chamber;
wherein the lubrication system comprises a housing that defines a recess at an upper surface of the lubrication system and further includes an electrical pump disposed within the recess and configured to provide a small volumetric flow of lubricant to the first reservoir in a stable, controllable and repeatable manner.

2. The system according to claim 1 wherein the rail includes first and second opposing sides that extend along a length of the rail and the lubrication system includes inner walls and sidewalls that combine to define an interior space of the first reservoir that partially surrounds the first and second sides of the rail.

3. The system according to claim 2 wherein the interior space has a generally u-shaped cross-section.

4. The system according to claim 1 wherein the distribution system comprises a valve.

5. The system according to claim 1 wherein the distribution system comprises a lubrication liquid flow control unit that is positioned below the lubrication system reservoir.

6. The system according to claim 1 wherein the lubrication system is configured to perform the refill at an average rate that is below 1 cubic centimeter per month.

7. The system according to claim 1 , wherein the distribution system comprises a lubrication liquid flow control unit that is attached to the housing.

8. The system according to claim 7 , wherein the lubrication liquid flow control unit is positioned within a space defined by the housing.

9. The system according to claim 8 , wherein the lubrication liquid flow control unit is positioned above the lubrication system reservoir.

10. A method for lubricating a transmission system that includes first and second components positioned within a vacuum space defined by a vacuum chamber, wherein the first component is a bearing slidably coupled to the second component, which is a rail, and the transmission system includes a first fluid reservoir fluidly coupled to the first component and configured to store a first volume of lubricant, the method system comprising:
storing a second volume of lubricant in a second reservoir of a lubrication system coupled to the first component of the transmission system and disposed in the vacuum chamber, wherein the second volume of lubricant is at least three times larger than the first volume;
refilling, while the first transmission system component and the lubrication system are positioned within the vacuum chamber, the first reservoir from the second reservoir with a lubrication system operatively coupled between the first and second reservoirs
wherein the lubrication system comprises a housing that defines a recess at an upper surface of the lubrication system and further includes an electrical pump disposed within the recess and configured to provide a small volumetric flow of lubricant to the first reservoir in a stable, controllable and repeatable manner.

Assignees

• Applied Materials Israel Ltd

Inventors

• Admoni Erez
• Vinnitsky Efim

Classifications

• F16C33/664 Primary

  Retaining the liquid in or near the bearing · CPC title

• F16C29/0635

  whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end · CPC title

• F16C2300/62

  low pressure, e.g. elements operating under vacuum conditions · CPC title

• F16C33/6659

  Details of supply of the liquid to the bearing, e.g. passages or nozzles · CPC title

• F16H57/045

  Lubricant storage reservoirs, e.g. reservoirs in addition to a gear sump for collecting lubricant in the upper part of a gear case · CPC title