Etchant composition, method of etching insulating film, method of manufacturing semiconductor device, and silane compound

Patent metadata

Field	Value
Publication number	US-10836962-B2
Application number	US-201916422098-A
Country	US
Kind code	B2
Filing date	May 24, 2019
Priority date	May 26, 2018
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

An etchant composition includes a silane compound represented by the following Chemical Formula 1:

wherein R 1 to R 6 are independently hydrogen, halogen, a substituted or unsubstituted C 1 -C 20 hydrocarbyl group, a phenyl group, a C 1 -C 20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri (C 1 -C 20 )alkylsilyl group, a phosphoryl group, or a cyano group, L is a direct bond or C 1 -C 3 hydrocarbylene, A is an n-valent radical, and n is an integer of 1 to 4.

First claim

What is claimed is:

1. An etchant composition comprising: phosphoric acid and a silane compound represented by the following Chemical Formula 1:

wherein
R 1 to R 6 are independently hydrogen, halogen, a substituted or unsubstituted C 1 -C 20 hydrocarbyl group, a C 1 -C 20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri (C 1 -C 20 )alkylsilyl group, a phosphoryl group, or a cyano group,
L is a direct bond or C 1 -C 3 hydrocarbylene,
A is an n-valent radical, and
n is an integer of 1 to 4.

2. The etchant composition of claim 1 , wherein the substituted or unsubstituted C 1 -C 20 hydrocarbyl group is a substituted or unsubstituted C 1 -C 20 alkyl group or a substituted or unsubstituted C 6 -C 20 aryl group.

3. The etchant composition of claim 2 , wherein the substituted C 1 -C 20 hydrocarbyl group is substituted by halogen.

4. The etchant composition of claim 1 , wherein A is hydrocarbyl, hydrocarbylene, a radical having N as a binding site, a radical having S as a binding site, or a radical having P as a binding site.

5. The etchant composition of claim 4 , wherein the hydrocarbyl is C 1 -C 20 alkyl, C 2 -C 20 alkenyl, or C 6 -C 20 aryl.

6. The etchant composition of claim 4 , wherein the radical having N as a binding site is *—NR 11 R 12 , *—NR 13 —*, *—NR 14 CONR 15 —*, *—NR 16 CSNR 17 —*, or

wherein R 11 and R 12 are independently hydrogen, C 1 -C 20 alkyl, C 1 -C 20 aminoalkyl, or CONH 2 ,
R 13 to R 17 are independently hydrogen or C 1 -C 20 alkyl, and
L 1 is C 1 -C 20 alkylene.

7. The etchant composition of claim 4 , wherein the radical having S as a binding site is *—S—*, *—S—S—*,

8. The etchant composition of claim 4 , wherein the radical having P as a binding site is

wherein R 18 and R 19 are independently hydrogen, C 1 -C 20 alkyl, C 6 -C 20 aryl, or (C 1 -C 20 )alkyl(C 1 -C 20 )alkoxy.

9. The etchant composition of claim 1 , wherein
n is 1,
L is the direct bond or C 1 -C 3 alkylene,
A is substituted or unsubstituted C 1 -C 20 alkyl, substituted or unsubstituted C 1 -C 20 alkenyl, *—NH 2 , *—NH—(CH 2 ) 1 —NH 2 , *—NH—CO—NH 2 , or *—(CH 2 ) m —C 6 H 5 , and 1 and m is independently an integer of 0 to 10.

10. The etchant composition of claim 1 , wherein
n is 2,
L is a direct bond or C 1 -C 3 alkylene,
A is C 1 -C 20 alkylene, *—NR 13 —*, *—NR 14 —CO—NR 15 —*, *—S—*,

*—S—S—*, and
R 13 to R 15 , R 18 , and R 19 are independently hydrogen, C 1 -C 20 alkyl, C 6 -C 20 aryl, or (C 1 -C 20 )alkyl(C 1 -C 20 )alkoxy.

11. The etchant composition of claim 1 , wherein
n is 3,
L is a direct bond or C 1 -C 3 alkylene, and
A is

12. The etchant composition of claim 1 , wherein
n is 4,
L is C 1 -C 3 alkylene, and
A is

wherein L 1 is C 1 -C 10 alkylene.

13. The etchant composition of claim 1 , wherein R 1 is hydrogen or substituted or unsubstituted hydrocarbyl, and R 2 to R 6 are hydrogen.

14. The etchant composition of claim 1 , wherein the silane compound is selected from the following structures:

15. The etchant composition of claim 1 , wherein the silane compound represented by Chemical Formula 1 is included in an amount of 0.001 to 1 wt %, based on a total weight of the etchant composition.

16. The etchant composition of claim 1 , further comprising a silane compound represented by the following Chemical Formula 2:

wherein R 51 to R 54 are independently hydrogen, hydrocarbyl, or heterohydrocarbyl, in which R 51 to R 54 exist respectively or two or more of R 51 to R 54 form a ring connected to each other by a heteroelement.

17. The etchant composition of claim 16 , further comprising an ammonium salt.

18. A method of etching an insulating film using the etchant composition of claim 1 .

Assignees

• Sk Innovation Co Ltd
• Sk Mat Co Ltd

Inventors

• Kim Cheol Woo
• Shim Yu Na
• Lee Kwang Kuk
• Kim Young Bom
• Jo Jin Kyung

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P50/642

  Chemical etching · CPC title

• C07F7/1804 Primary

  Compounds having Si-O-C linkages (Si-O-acyl linkages C07F7/1896) · CPC title

• C09K13/06 Primary

  with organic material · CPC title

• C07F7/025

  without C-silicon linkages · CPC title