Composite including a component and a glass material

Patent metadata

Field	Value
Publication number	US-10836140-B2
Application number	US-201816014627-A
Country	US
Kind code	B2
Filing date	Jun 21, 2018
Priority date	Jun 22, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A composite includes a component and a glass or glass ceramic material. The component has a first coefficient of expansion α 1 and the glass or the glass ceramic material has a second coefficient of expansion α 2 . The glass or the glass ceramic material has a surface with a thickness and thickness differences (TTV) within the surface, and thickness fluctuations (LTV). The composite has a residual stress in the glass or the glass ceramic material (WARP), and a geometric and material-physical degree of compatibility KG≥4.

First claim

What is claimed is:

1. A composite, comprising:
a component; and
a glass material which is a thin glass sheet having a thickness <300 μm , wherein
the component has a first coefficient of expansion α 1 , wherein
the glass material has a second coefficient of expansion α 2 , wherein
the glass material has a surface with a thickness and thickness differences (TTV) within the surface, thickness fluctuations (LTV), and a WARP, wherein
the composite including the component and the glass material has a residual stress in the glass material, and wherein
the composite has a geometric and material-physical degree of compatibility
KG= 10·(α 1 /α 2 )·((1−( LTV/ 1.5))+(1−( TTV/ 7))+(1−(WARP/200))), wherein KG≥ 4.

2. The composite according to claim 1 , wherein KG≥15.

3. The composite according to claim 1 , wherein KG≥30.

4. The composite according to claim 1 , wherein the component is an electronic component.

5. The composite according to claim 1 , wherein the component is a substrate.

6. The composite according to claim 5 , wherein the substrate is an electronic substrate.

7. The composite according to claim 1 , wherein the component is a wafer.

8. The composite according to claim 1 , wherein the first coefficient of expansion α 1 of the component is greater than or equal to the second coefficient of expansion α 2 of the glass material.

9. The composite according to claim 8 , wherein at a maximum, the first coefficient of expansion α 1 is triple that of the second coefficient of expansion α 2 of the glass material.

10. The composite according to claim 1 , wherein the difference in thickness (TTV) of the glass material within the surface is <10 μm.

11. The composite according to claim 1 , wherein the difference in thickness (TTV) of the glass material within the surface is <7 μm.

12. The composite according to claim 1 , wherein local fluctuations in thickness (LTV) of the glass material over a surface area of 25 mm 2 or less is <5 μm.

13. The composite according to claim 1 , wherein local fluctuations in thickness (LTV) of the glass material over a surface area of 25 mm 2 or less is <2 μm.

14. The composite according to claim 1 , wherein the WARP in the glass material is <300 μm for a composite component with a diameter of 6 inches.

15. The composite according to claim 1 , wherein the WARP in the glass material is <200 μm for a composite component with a diameter of 6 inches.

16. The composite according to claim 1 , wherein the component comprises one or more materials selected from the group of: silicon, lithium tantalate, lithium niobate, lithium tetraborate, glass, ceramic, silicon carbide, gallium nitrite, gallium arsenide, indium phosphide, sapphire and quartz.

17. The composite according to claim 1 , wherein the glass material is a soda-lime glass, a borosilicate glass, or an alkali free alumino borosilicate glass.

18. The composite according to claim 1 , wherein the glass sheet is a thin glass sheet having a thickness <200 μm.

19. The composite according to claim 1 , wherein the glass sheet is a thin glass sheet having a thickness <50 μm.

20. The composite according to claim 1 , wherein the composite comprises a bonding material for bonding of the glass material with the component.

21. The composite according to claim 20 , wherein the bonding material is an adhesive material.

22. The composite according to claim 21 , wherein the adhesive material can be cured with UV radiation.

23. A method to produce a composite including a component and a glass material, wherein the component has a first coefficient of expansion α 1 , wherein the glass has a second coefficient of expansion α 2 , wherein the glass material has a surface with a thickness and thickness differences (TTV) within the surface, thickness fluctuations (LTV), and a WARP, wherein the composite including the component and the glass material has a residual stress in the glass material, and wherein the composite has a geometric and material-physical degree of compatibility
KG=10·(α 1 /α 2 )·((1−(LTV/1.5))+(1−(TTV/7))+(1−(WARP/200))), wherein KG≥4, wherein the glass material is a thin glass sheet having a thickness <300 μm and wherein said method comprises:
providing the component having the first coefficient of expansion α 1 and the glass material having the second coefficient of expansion α 2 ;
stretching to smooth the glass material;
wetting at least one of the surface of the component and the glass material with a thin layer of a bonding material; and
pressing the component and the glass material to form the composite.

24. The method according to claim 23 , wherein the stretching to smooth the glass material includes using suction.

Assignees

• Schott Ag

Inventors

• Jotz Matthias
• Walther Marten
• Resch Florian
• Wiegel Thomas

Classifications

• C03C3/087

  containing calcium oxide, e.g. common sheet or container glass · CPC title

• C04B2237/30

  Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates · CPC title

• C04B2237/345

  Refractory metal oxides · CPC title

• C04B2237/36

  Non-oxidic · CPC title

• C04B2237/66

  Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage · CPC title