Gas-dissolved liquid producing apparatus

Patent metadata

Field	Value
Publication number	US-10835876-B2
Application number	US-201816225666-A
Country	US
Kind code	B2
Filing date	Dec 19, 2018
Priority date	Dec 25, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A gas-dissolved liquid producing apparatus 1 includes a gas supply unit 2, a first liquid supply unit 3, a gas-dissolved liquid generator 4, a second liquid generator 20, a second liquid supply unit 21, a flow rate measuring unit 14, and a controller 23. The controller 23 controls the supply amount of the first liquid to be supplied to the gas-dissolved liquid generator 4 according to the flow rate of circulated gas-dissolved liquid measured by the flow rate measuring unit 14. The gas-dissolved liquid generator 4 dissolves gas supplied from the gas supply unit 2 in first liquid supplied from the first liquid supply unit 3 and second liquid supplied from the second liquid supply unit 21 to generate gas-dissolved liquid.

First claim

What is claimed is:

1. A gas-dissolved liquid producing apparatus comprising:
a gas supply unit that supplies gas serving as a raw material of gas-dissolved liquid;
a first liquid supply unit that supplies a first liquid serving as a raw material of the gas-dissolved liquid;
a gas-dissolved liquid generator that dissolves the gas supplied from the gas supply unit in the first liquid supplied from the first liquid supply unit to generate the gas-dissolved liquid;
a second liquid generator to which the gas-dissolved liquid generated in the gas-dissolved liquid generator is circulated and supplied to generate a second liquid serving as a raw material of the gas-dissolved liquid from the circulated gas-dissolved liquid;
a second liquid supply unit that supplies the second liquid generated in the second liquid generator to the gas-dissolved liquid generator;
a flow rate measuring unit that measures a flow rate of the circulated gas-dissolved liquid supplied to the second liquid generator; and
a controller that controls the first liquid supply unit and the second liquid supply unit, wherein
the controller controls a supply amount of the first liquid to be supplied to the gas-dissolved liquid generator according to the flow rate of the circulated gas-dissolved liquid measured by the flow rate measuring unit, and
the gas-dissolved liquid generator dissolves the gas supplied from the gas supply unit in the first liquid supplied from the first liquid supply unit and the second liquid supplied from the second liquid supply unit to generate the gas-dissolved liquid.

2. The gas-dissolved liquid producing apparatus according to claim 1 , further comprising:
a gas-dissolved liquid reservoir that stores the circulated gas-dissolved liquid; and
a liquid level measuring unit that measures a height of a liquid level of the gas-dissolved liquid stored in the gas-dissolved liquid reservoir, wherein
the controller controls whether to actuate the second liquid supply unit based on the height of the liquid level of the gas-dissolved liquid measured by the liquid level measuring unit.

3. The gas-dissolved liquid producing apparatus according to claim 1 , wherein the second liquid generator subjects the circulated gas-dissolved liquid to a thermal decomposition treatment or a photolysis treatment to generate the second liquid from the gas-dissolved liquid.

4. The gas-dissolved liquid producing apparatus according to claim 1 , wherein the second liquid generator subjects the circulated gas-dissolved liquid to a degasification treatment to generate the second liquid from the gas-dissolved liquid.

5. The gas-dissolved liquid producing apparatus according to claim 1 , wherein the gas-dissolved liquid that has been generated in the gas-dissolved liquid generator and supplied to an outside of the gas-dissolved liquid producing apparatus is circulated outside the gas-dissolved liquid producing apparatus and then supplied to the second liquid generator.

6. The gas-dissolved liquid producing apparatus according to claim 1 , wherein the gas-dissolved liquid that has been generated in the gas-dissolved liquid generator and has not been supplied to an outside of the gas-dissolved liquid producing apparatus is circulated inside the gas-dissolved liquid producing apparatus and supplied to the second liquid generator.

7. A gas-dissolved liquid producing method implemented in a gas-dissolved liquid producing apparatus, the gas-dissolved liquid producing apparatus including
a gas supply unit that supplies gas serving as a raw material of gas-dissolved liquid;
a first liquid supply unit that supplies a first liquid serving as a raw material of the gas-dissolved liquid;
a gas-dissolved liquid generator that dissolves the gas supplied from the gas supply unit in the first liquid supplied from the first liquid supply unit to generate the gas-dissolved liquid;
a second liquid generator to which the gas-dissolved liquid generated in the gas-dissolved liquid generator is circulated and supplied to a generate second liquid serving as a raw material of the gas-dissolved liquid from the circulated gas-dissolved liquid;
a second liquid supply unit that supplies the second liquid generated in the second liquid generator to the gas-dissolved liquid generator;
a flow rate measuring unit that measures a flow rate of the circulated gas-dissolved liquid supplied to the second liquid generator; and
a controller that controls the first liquid supply unit and the second liquid supply unit, the producing method comprising:
controlling, by the controller, a supply amount of the first liquid to be supplied to the gas-dissolved liquid generator according to a flow rate of the circulated gas-dissolved liquid measured by the flow rate measuring unit; and
dissolving, by the gas-dissolved liquid generator, the gas supplied from the gas supply unit in the first liquid supplied from the first liquid supply unit and the second liquid supplied from the second liquid supply unit to generate the gas-dissolved liquid.

Assignees

• Ebara Corp

Inventors

• Nakagawa Yoichi
• Ozawa Suguru
• Watanabe Toshifumi
• Xu Tao

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• B01F35/21112

  Volumetric flow rate · CPC title

• B01F21/30 Primary

  Workflow diagrams or layout of plants, e.g. flow charts; Details of workflow diagrams or layout of plants, e.g. controlling means · CPC title

• B01F23/232

  using flow-mixing means for introducing the gases, e.g. baffles · CPC title

• B01F21/20

  using flow mixing · CPC title