Electromagnetic wave detection element, electromagnetic wave sensor, electronic apparatus, and structural body

Patent metadata

Field	Value
Publication number	US-10830640-B2
Application number	US-201716329909-A
Country	US
Kind code	B2
Filing date	Aug 22, 2017
Priority date	Sep 13, 2016
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

To provide an electromagnetic wave detection element capable of detecting an electromagnetic wave with an arbitrary wavelength and being miniaturized. An electromagnetic wave detection element according to the present technology includes an antenna unit and a detection unit. The antenna unit includes a first conductive layer, a first dielectric layer that is laminated on the first conductive layer and is constituted of a dielectric body, and a first graphene layer that is laminated on the first dielectric layer and is made of graphene. The detection unit includes a second conductive layer that is made of a conductive material and is separated from the first conductive layer, a second dielectric layer that is laminated on the second conductive layer and is constituted of a dielectric body, and a second graphene layer that is laminated on the second dielectric layer, is made of graphene, and is separated from the first graphene layer.

First claim

The invention claimed is:

1. An electromagnetic wave detection element, comprising:
an operational amplifier;
an antenna unit including:
a first conductive layer made of a first conductive material,
a first dielectric layer laminated on the first conductive layer and constituted of a first dielectric body, and
a first graphene layer laminated on the first dielectric layer, made of graphene, and connected to the operational amplifier; and

a detection unit including:
a second conductive layer made of a second conductive material and separated from the first conductive layer,
a second dielectric layer laminated on the second conductive layer and constituted of a second dielectric body, and
a second graphene layer laminated on the second dielectric layer, made of graphene, separated from the first graphene layer, and connected to the operational amplifier, wherein the operational amplifier outputs a potential difference between the first graphene layer and the second graphene layer.

2. The electromagnetic wave detection element according to claim 1 , wherein
the first graphene layer and the second graphene layer are each constituted of an atomic monolayer of graphene.

3. The electromagnetic wave detection element according to claim 1 , wherein
the first graphene layer and the second graphene layer each have a nanoribbon shape extending along a direction in which the first graphene layer and the second graphene layer are separated from each other.

4. The electromagnetic wave detection element according to claim 1 , wherein
a distance between the first graphene layer and the second graphene layer is equal to or less than 5 μm.

5. The electromagnetic wave detection element according to claim 1 , wherein
the first conductive layer is connected to a first gate power supply and the second conductive layer is connected to a second gate power supply supply.

6. An electromagnetic wave sensor, comprising:
an antenna unit including:
a first conductive layer made of a first conductive material,
a first dielectric layer laminated on the first conductive layer and constituted of a first dielectric body, and
a first graphene layer laminated on the first dielectric layer and made of graphene;

a detection unit including:
a second conductive layer made of a second conductive material and separated from the first conductive layer,
a second dielectric layer laminated on the second conductive layer and constituted of a second dielectric body, and
a second graphene layer laminated on the second dielectric layer, made of graphene, and facing the first graphene layer with a predetermined interval between the first graphene layer and the second graphene layer; and

a signal processing circuit that uses the first conductive layer as a first gate, the second conductive layer as a second gate, the first graphene layer as a source, and the second graphene layer as a drain, and outputs a potential difference between the first graphene layer and the second graphene layer.

7. An electronic apparatus, comprising:
an electromagnetic wave sensor including:
an antenna unit including:
a first conductive layer made of a first conductive material,
a first dielectric layer laminated on the first conductive layer and constituted of a first dielectric body, and
a first graphene layer laminated on the first dielectric layer and made of graphene,

a detection unit including:
a second conductive layer made of a second conductive material and separated from the first conductive layer,
a second dielectric layer laminated on the second conductive layer and constituted of a second dielectric body, and
a second graphene layer laminated on the second dielectric layer, made of graphene, and facing the first graphene layer with

a predetermined interval therebetween, and
a signal processing circuit that uses the first conductive layer as a first gate, the second conductive layer as a second gate, the first graphene layer as a source, and the second graphene layer as a drain, and outputs a potential difference between the first graphene layer and the second graphene layer.

8. A structural body, comprising:
an operational amplifier;
an antenna unit including:
a first conductive layer made of a first conductive material,
a first dielectric layer laminated on the first conductive layer and constituted of a first dielectric body, and
a first graphene layer laminated on the first dielectric layer, made of graphene, and connected to the operational amplifier; and

a detection unit including:
a second conductive layer made of a second conductive material and separated from the first conductive layer,
a second dielectric layer laminated on the second conductive layer and constituted of a second dielectric body, and
a second graphene layer laminated on the second dielectric layer, made of graphene, facing the first graphene layer with a predetermined interval between the first graphene layer and the second graphene layer, and connected to the operational amplifier, wherein the operational amplifier outputs a potential difference between the first graphene layer and the second graphene layer.

Assignees

• Sony Corp

Inventors

• Imaizumi Shinji
• Kadono Koji

Classifications

• H10F77/122

  comprising only Group IV materials · CPC title

• H10F39/107

  having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays · CPC title

• H10F30/22

  the devices having only one potential barrier, e.g. photodiodes · CPC title

• H10F30/00 Primary

  Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors · CPC title

• H01Q1/368

  using carbon or carbon composite · CPC title