Fluid control system

Patent metadata

Field	Value
Publication number	US-10830367-B2
Application number	US-201716312015-A
Country	US
Kind code	B2
Filing date	Jun 19, 2017
Priority date	Jun 21, 2016
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A fluid flow path of a joining block includes a vertical flow path and a horizontal flow path. The joining block is constrained on a rail member so as to be capable of moving in a longitudinal direction. A fluid control device is supported by the rail member via the joining block and includes a screw hole, and a tightening bolt that has passed through a body of the fluid control device is screwed into the screw hole. A gasket between the joining block and the body is compressed between the body and the joining block by a tightening force of the tightening bolt. The screw hole includes the tip portion closed above the horizontal flow path and at least partially overlaps the horizontal flow path in a planar view.

First claim

What is claimed is:

1. A fluid control system comprising:
a joining block defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface, defining a fluid flow path, and comprising an engaging part on the bottom surface;
a support member comprising a guide part that extends linearly in a longitudinal direction and is engageable with the engaging part of the joining block; and
a fluid device supported by the support member via the joining block, wherein:
the fluid flow path of the joining block comprises two first flow paths extending from the top surface toward the bottom surface and each of the two first flow paths is provided with a flow path port that opens at the top surface, and a second flow path extending through an interior of the joining block in the longitudinal direction and connected with the two first flow paths;
the guide part constrains the joining block on the support member while allowing the joining block to move in the longitudinal direction;
the fluid device comprises a body defining a fluid flow path and provided with at least two flow path ports that open on a bottom surface thereof;
the joining block comprises a screw hole that opens at the top surface, extends toward the bottom surface, and is for screwing a tightening bolt that has passed through the body;
the tightening bolt produces a tightening force that presses a sealing member between the body and the joining block, the sealing member being disposed around the flow path port of the joining block and one of the flow path ports of the body that face each other; and
the screw hole comprises a closed-end portion closed above the second flow path, and at least partially overlaps the second flow path in a planar view, wherein
each of the two first flow paths connected to the second flow path are formed in positions separated from each other in the longitudinal direction; and
the screw hole is positioned between the two flow path ports of the two first flow paths that open at the top surface, in the longitudinal direction.

2. The fluid control system according to claim 1 , wherein the second flow path is formed in a position biased toward the bottom surface between the top surface and the bottom surface of the joining block.

3. The fluid control system according to claim 1 , wherein each of the two first flow paths is formed vertically with respect to the top surface of the joining block.

4. The fluid control system according to claim 1 , wherein:
the joining block comprises four side surfaces orthogonal to the top surface, two of the four side surfaces that are adjacent to each other being mutually orthogonal; and
the second flow path comprises a hole formed on one of two of the four side surfaces that face each other in the longitudinal direction, and comprising an opening that is closed by a closing member.

5. The fluid control system according to claim 4 , wherein the support member comprises a single said guide part, and has a width dimension in a direction orthogonal to the longitudinal direction that matches a width of the joining block in a direction orthogonal to the longitudinal direction.

6. The fluid control system according to claim 1 , wherein the joining block is connected to the body by a single said tightening bolt.

7. The fluid control system according to claim 1 , wherein: the joining block further comprises another screw hole for connecting a body of another fluid device; said another screw hole is positioned between the two flow path ports of the two first flow paths that open at the top surface.

8. A semiconductor manufacturing method that uses the fluid control system as defined in claim 1 for controlling a fluid used in a semiconductor manufacturing process.

9. A flat panel display manufacturing method that uses the fluid control system as defined in claim 1 for controlling a fluid used in a flat panel display manufacturing process.

10. A solar panel manufacturing method that uses the fluid control system as defined in claim 1 for controlling a fluid used in a solar panel manufacturing process.

11. A joining block defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface, and defining a fluid flow path, the joining block comprising:
an engaging part engageable with another member on the bottom surface; and
two screw holes, each connectable with another member and formed from the top surface toward the bottom surface, wherein:
the fluid flow path of the joining block comprises two first flow paths, each extending from the top surface toward the bottom surface and provided with a flow path port that opens at the top surface, and a second flow path extending linearly through an interior of the joining block in the longitudinal direction and connected with the two first flow paths, in positions separated from each other in a longitudinal direction; and
the two screw holes are disposed between the two flow path ports in the longitudinal direction, the screw holes each comprising a closed-end portion closed above the second flow path and each at least partially overlapping the second flow path in a planar view.

12. A fluid device comprising at least one of a switch valve, a regulator, a pressure gauge, and a mass flow controller, the fluid device comprising:
a body defining a fluid flow path and provided with at least two flow path ports that open on a bottom surface thereof; and
a joining block defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface, and defining a fluid flow path, wherein:
the fluid flow path of the joining block comprises two first flow paths extending from the top surface toward the bottom surface and each of the two first flow paths is provided with a flow path port that opens at the top surface, and a second flow path extending through an interior of the joining block in the longitudinal direction and connected with the two first flow paths;
the joining block comprises an engaging part engageable with another member on the bottom surface, and a screw hole that opens on the top surface, extends toward the bottom surface, and is for screwing a tightening bolt that has passed through the body;
the tightening bolt produces a tightening force that compresses a sealing member between the body and the joining block, the sealing member being disposed around the flow path port of the joining block and one of the flow path ports of the body that face each other; and
the screw hole comprises a closed-end portion closed above the second flow path, and at least partially overlaps the second flow path in a planar view, wherein
each of the two first flow paths connected to the second flow path are formed in positions separated from each other in the longitudinal direction; and
the screw hole is positioned between the two flow path ports of the two first flow paths that open at the top surface, in the longitudinal direction.

13. A fluid control system comprising:
a first joining block and a second joining block, each defining a top surface and a bottom surface facing each other, and side surfaces extending from the top surface toward the bottom surface, defining a fluid flow path, and comprising an engaging part on the bottom surface;
a support member comprising a guide part that extends linearly in a longitudinal direction and is engageable with each of the engaging parts of the first and the second joining blocks; and
a fluid device supported by the support member via the first and the second jo

Assignees

• Fujikin Kk

Inventors

• Aikawa Kenji
• Shinohara Tsutomu
• Nakagawa Hajime
• Matsuda Takahiro
• Harada Akihiro

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F16K27/003 Primary

  Housing formed from a plurality of the same valve elements · CPC title

• F16L41/08

  Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of a wall or to the axis of another pipe (F16L41/02 takes precedence) · CPC title

• F16K27/00 Primary

  Construction of housing (methods for welding housings B23K); Use of materials therefor · CPC title

• G05D7/03

  with auxiliary non-electric power {(G05D7/005 takes precedence)} · CPC title