Rectangular glass substrate and method for preparing the same

Patent metadata

Field	Value
Publication number	US-10829411-B2
Application number	US-201715685520-A
Country	US
Kind code	B2
Filing date	Aug 24, 2017
Priority date	Aug 25, 2016
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A rectangular glass substrate has a front surface, a back surface, four side surfaces, and eight chamfered surfaces, and a thickness of at least 6 mm. A first curved surface along the edge line between the front surface and the chamfered surface disposed adjacent thereto has an average gradient of up to 25% in a range from the front surface to a position of 50 μm below the front surface when the substrate is rested horizontal with the front surface facing upward. A second curved surface along the edge line between at least one of four side surfaces and the chamfered surface disposed adjacent to the front surface has an average gradient of at least 30% in a range from the at least one side surface to a position of 50 μm below the at least one side surface when the substrate is rested horizontal with the at least one side surface facing upward.

First claim

The invention claimed is:

1. A rectangular glass substrate having a front surface, a back surface, four side surfaces, and eight chamfered surfaces defined between the front surface and each of the side surfaces and between the back surface and each of the side surfaces, wherein
the substrate includes a first curved surface along an edge line between the front surface and at least one of the chamfered surfaces disposed adjacent thereto, having an average gradient of up to 25% in a range from the front surface to a position of 50 μm below the front surface when the substrate is rested horizontal with the front surface facing upward, and a second curved surface along an edge line between at least one of the four side surfaces and one of the chamfered surfaces each disposed adjacent to the front surface, having an average gradient of at least 30% in a range from the at least one side surface to a position of 50 μm below the at least one side surface when the substrate is rested horizontal with the at least one side surface facing upward,
the substrate has a thickness of at least 6 mm, and
each of the side surfaces includes a plane which is perpendicular to a plane including the front surface and a plane including the back surface in the rectangular glass.

2. The rectangular glass substrate of claim 1 wherein the first curved surface has an arithmetic average roughness (Sa) of up to 2 nm.

3. The rectangular glass substrate of claim 1 wherein an arithmetic average roughness (Ra) of roughness curve between at least one of the side surfaces and at least one of the chamfered surfaces each disposed adjacent to the front-surface is up to 0.1 μm.

4. The rectangular glass substrate of claim 1 wherein the front surface of the substrate excluding a region extending 2 mm inside from its outer periphery has a flatness of up to 5 μm.

5. A method for preparing the rectangular glass substrate of claim 1 , comprising the steps of:
stacking a plurality of starting rectangular glass substrates each having a front surface, a back surface, four side surfaces and eight chamfered surfaces defined between the front surface and each of the side surfaces and between the back surface and each of the side surfaces, with spacing, such that the front surface of one substrate is opposed to the back surface of an adjacent substrate; and
polishing the side surfaces and the chamfered surfaces of the stacked starting substrates with a brush,
the brush comprising a cylindrical base and a multiplicity of bristles extending radially from the base, each bristle having a diameter of up to 0.2 mm and
the spacing between the starting substrates being 2 to 10 times the bristle diameter, wherein
each of the side surfaces includes a plane which is perpendicular to a plane including the front surface and a plane including the back surface in the starting rectangular glass, and
the substrate has a thickness of at least 6 mm.

6. The method of claim 5 , further comprising the step of polishing the side surfaces of the stacked starting substrates by abutting a platen having a polishing pad secured thereto against the side surfaces.

Assignees

• Shinetsu Chemical Co

Inventors

• Harada Daijitsu
• Takeuchi Masaki

Classifications

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10D62/10

  Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies · CPC title

• C03C19/00 Primary

  Surface treatment of glass, not in the form of fibres or filaments, by mechanical means (sand-blasting, grinding, or polishing glass B24) · CPC title

• C03C4/00

  Compositions for glass with special properties · CPC title

• B24B29/005

  using brushes · CPC title