Pipe joint, fluid control device, fluid control unit, semiconductor fabrication apparatus and method of forming pipe joint
US-10737345-B2 · Aug 11, 2020 · US
US10828712B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10828712-B2 |
| Application number | US-201816000430-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 5, 2018 |
| Priority date | Jun 5, 2018 |
| Publication date | Nov 10, 2020 |
| Grant date | Nov 10, 2020 |
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The method can include inserting a first portion of a backing device into a fluid aperture of a first conduit component, inserting a second portion of the backing device into a fluid aperture of a second conduit component, and bringing the second conduit component adjacent the first component over the backing device, fusion welding the first conduit component to the second conduit over the backing device, and removing the backing device by circulating a fluid inside the welded conduit components. The backing device can be made of a soluble material.
Opening claim text (preview).
The invention claimed is: 1. A method of making a heat exchanger, comprising: inserting a first portion of a backing device into a fluid aperture of a first conduit component; inserting a second portion of the backing device into a fluid aperture of a second conduit component, and bringing the second conduit component adjacent the first component over the backing device; fusion welding the first conduit component to the second conduit over the backing device; removing the backing device by circulating a solvent fluid inside the welded conduit components; wherein said fusion welding further comprises circulating an inert gas across the backing device to one or more outlet exposed to a fused metal; further comprising inserting an inert gas delivery tube into an inlet of the backing device prior to said circulating an inert gas, and removing the inert gas delivery tube before circulating the solvent fluid; and wherein removing the backing device by circulating the solvent fluid includes dissolving the backing device. 2. The method of claim 1 wherein circulating the solvent fluid includes circulating water. 3. The method of claim 1 wherein said backing device comprises a recessed channel, further comprising receiving a bulge of fused metal in the recessed channel during welding. 4. The method of claim 3 further comprising forming the backing device including machining said recessed channel. 5. The method of claim 1 further comprising forming the backing device including machining conduits of a gas delivery network within a preform of the backing device. 6. The method of claim 1 wherein the first conduit component and the second conduit component are made of aluminum. 7. The method of claim 1 , wherein dissolving the backing device includes dissolving the backing device made of sodium chloride with water. 8. The method of claim 7 , wherein fusion welding the first conduit component to the second conduit includes fusion welding the first conduit and the second conduit being made of aluminum. 9. The method of claim 1 , wherein circulating the inert gas across the backing device includes circulating the inert gas through a porous material of the backing device. 10. The method of claim 1 , wherein removing the backing device includes exposing a weld joint to an interior of a welded assembly of the first conduit component and the second conduit.
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