Magnetic sensor testing device

Patent metadata

Field	Value
Publication number	US-10823788-B2
Application number	US-201816043396-A
Country	US
Kind code	B2
Filing date	Jul 24, 2018
Priority date	Aug 4, 2017
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A magnetic sensor testing device includes electromagnets 50 and 60 that apply a magnetic field to a magnetic sensor, temperature regulators 30 and 40 that regulate a temperature of the magnetic sensor by locally applying heat to the magnetic sensor, and a controller that controls the electromagnets 50 and 60 and the temperature regulators 30 and 40, in which the controller tests the magnetic sensor in a state in which the magnetic field is applied to the magnetic sensor by the electromagnets 50 and 60 while the heat is applied to the magnetic sensor by the temperature regulators 30 and 40.

First claim

The invention claimed is:

1. A magnetic sensor testing device comprising:
an electromagnet that applies a magnetic field to a magnetic sensor;
a temperature regulator that regulates a temperature of the magnetic sensor by locally applying heat to the magnetic sensor; and
a controller that controls the electromagnet and the temperature regulator,
wherein the controller tests the magnetic sensor in a state in which the magnetic field is applied to the magnetic sensor by the electromagnet while the heat is applied to the magnetic sensor by the temperature regulator.

2. The magnetic sensor testing device according to claim 1 , wherein the controller tests the magnetic sensor in a state in which the heat and the magnetic field are changed.

3. The magnetic sensor testing device according to claim 1 ,
wherein the temperature regulator has a first flow path through which a first refrigerant flows and a second flow path through which a second refrigerant flows,
the second refrigerant has a different temperature from a temperature of the first refrigerant, and
the controller adjusts the temperature of the magnetic sensor by controlling a mixing ratio of the first refrigerant and the second refrigerant.

4. The magnetic sensor testing device according to claim 1 ,
wherein the temperature regulator applies heat to a main surface of the magnetic sensor, and
the electromagnet is provided around the main surface of the magnetic sensor.

5. The magnetic sensor testing device according to claim 1 , further comprising
a socket connected to the magnetic sensor,
wherein a plurality of the sockets has connection surfaces electrically connected to the magnetic sensor, respectively, and is disposed such that the respective connection surfaces are arranged on a plane, and
the temperature regulator applies heat toward the magnetic sensor from above or below the connection surfaces.

6. The magnetic sensor testing device according to claim 1 , wherein the temperature regulator is in contact with a main surface of the magnetic sensor.

7. The magnetic sensor testing device according to claim 1 , wherein the electromagnet has a core, a main coil wound around the core, and a correction coil for correcting the magnetic field.

8. The magnetic sensor testing device according to claim 7 , further comprising
a magnetic field measurement sensor that measures the magnetic field,
wherein the controller
controls an input current to the correction coil based on the magnetic field measured by the magnetic field measurement sensor.

9. The magnetic sensor testing device according to claim 7 , further comprising
a magnetic field measurement sensor that measures the magnetic field,
wherein the controller
controls an input current pulse to the correction coil according to the magnetic field measured by the magnetic field measurement sensor.

Assignees

• Advantest Corp

Inventors

• Endo Yuki
• Kikuchi Aritomo
• Nakamura Shigeo

Classifications

• H10W72/5522

  comprising gold [Au] · CPC title

• H10W72/59

  Bond pads specially adapted therefor · CPC title

• G01R35/00 Primary

  Testing or calibrating of apparatus covered by the other groups of this subclass · CPC title

• G01R33/007

  Environmental aspects, e.g. temperature variations, radiation, stray fields (G01R33/025 takes precedence) · CPC title

• G01R33/06

  using galvano-magnetic devices · CPC title