Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle

Patent metadata

Field	Value
Publication number	US-10823570-B2
Application number	US-201815927554-A
Country	US
Kind code	B2
Filing date	Mar 21, 2018
Priority date	Mar 28, 2017
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.

First claim

What is claimed is:

1. A physical quantity sensor comprising:
an insulating base substrate;
a fixed driving electrode disposed on the base substrate;
a fixed detection electrode disposed on the base substrate;
a driving member having a movable driving electrode therein at a first position, the driving member being movable relative to the base substrate, the driving member being spaced apart from the base substrate, the movable driving electrode facing the fixed driving electrode in a thickness direction of the base substrate;
a movable member having a movable detection electrode therein at a second position, the movable member being movable relative to the driving member, the movable detection electrode facing the fixed detection electrode in the thickness direction of the base substrate, the fixed detection electrode and the movable detection electrode being configured to detect displacement of the movable member;
a first wiring that is fixed to the base substrate at an edge portion of the base substrate, the first wiring being electrically connected to the fixed driving electrode;
a second wiring that is fixed to the base substrate at the edge portion of the base substrate, the second wiring being electrically connected to the fixed detection electrode, the second wiring being partially arranged in parallel to the first wiring; and
a reference electrode disposed on the base substrate and having a reference potential,
wherein the reference electrode is sandwiched between the base substrate and the first and second wirings along the thickness direction, and
wherein the first and second wirings partially overlap the reference electrode in the thickness direction.

2. The physical quantity sensor according to claim 1 , further comprising:
a third wiring that is fixed to the base substrate, the third wiring being electrically connected to the driving member,
wherein the third wiring has a constant potential and is located between the first and second wirings on the base substrate.

3. The physical quantity sensor according to claim 2 ,
wherein the reference electrode is electrically connected to the third wiring.

4. A physical quantity sensor comprising:
an insulating base substrate;
a fixed driving electrode disposed on the base substrate;
a fixed monitor electrode disposed on the base substrate;
a driving member having a movable driving electrode and a movable monitor electrode therein at first and second positions, respectively, the driving member being movable relative to the base substrate, the driving member being spaced apart from the base substrate, the movable driving electrode facing the fixed driving electrode in a thickness direction of the base substrate, the movable monitor electrode facing the fixed monitor electrode in the thickness direction, the fixed monitor electrode and the movable monitor electrode being configured to detect displacement of the driving member;
a first wiring that is fixed to the base substrate at an edge portion of the base substrate, the first wiring being electrically connected to the fixed driving electrode;
a second wiring that is fixed to the base substrate at the edge portion of the base substrate, the second wiring being electrically connected to the fixed monitor electrode, the second wiring being partially arranged in parallel to the first wiring; and
a reference electrode disposed on the base substrate and having a reference potential,
wherein the reference electrode is sandwiched between the base substrate and the first and second wirings along the thickness direction, and
wherein the first and second wirings partially overlap the reference electrode in the thickness direction.

5. A physical quantity sensor comprising:
an insulating base substrate;
a fixed driving electrode disposed on the base substrate;
a fixed detection electrode disposed on the base substrate;
a fixed monitor electrode disposed on the base substrate;
a driving member having a movable driving electrode and a movable monitor electrode therein at first and second positions, respectively, the driving member being movable relative to the base substrate, the driving member being spaced apart from the base substrate, the movable driving electrode facing the fixed driving electrode in a thickness direction of the base substrate, the movable monitor electrode facing the fixed monitor electrode in the thickness direction, the fixed monitor electrode and the movable monitor electrode being configured to detect displacement of the driving member;
a movable member having a movable detection electrode therein at a third position, the movable member being movable relative to the driving member, the movable detection electrode facing the fixed detection electrode in the thickness direction, the fixed detection electrode and the movable detection electrode being configured to detect displacement of the movable member;
a first wiring that is fixed to the base substrate at an edge portion of the base substrate, the first wiring being electrically connected to the fixed driving electrode;
a second wiring that is fixed to the base substrate at the edge portion of the base substrate, the second wiring having a monitor wiring portion and a detection wiring portion, the monitor wiring portion being electrically connected to the fixed monitor electrode, the detection wiring portion being electrically connected to the fixed detection electrode, the second wiring being partially arranged in parallel to the first wiring;
a third wiring that is fixed to the base substrate, the third wiring being electrically connected to the driving member; and
a reference electrode disposed on the base substrate and having a reference potential,
wherein the reference electrode is sandwiched between the base substrate and the first and second wirings along the thickness direction,
the first and second wirings partially overlap the reference electrode in the thickness direction,
wherein the third wiring has a constant potential and is located between the first and second wirings on the base substrate, and
wherein the monitor wiring portion is located between the third wiring and the detection wiring portion on the base substrate.

6. The physical quantity sensor according to claim 5 ,
wherein the reference electrode is electrically connected to the third wiring.

Assignees

• Seiko Epson Corp

Inventors

• Kanemoto Kei
• Furuhata Makoto

Classifications

• G01P2015/0814

  for translational movement of the mass, e.g. shuttle type · CPC title

• G01P15/125

  by capacitive pick-up · CPC title

• G01C19/5747 Primary

  each sensing mass being connected to a driving mass, e.g. driving frames · CPC title

• G01C19/5769

  Manufacturing; Mounting; Housings · CPC title