Composition for preparing silicon carbide ingot and method for preparing silicon carbide ingot using the same

US10822720B1 · US · B1

Patent metadata
FieldValue
Publication numberUS-10822720-B1
Application numberUS-202016887263-A
CountryUS
Kind codeB1
Filing dateMay 29, 2020
Priority dateJul 11, 2019
Publication dateNov 3, 2020
Grant dateNov 3, 2020

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A method for preparing a SiC ingot includes loading a composition of a raw material comprising a carbon source and a silicon source into a reactor; placing a plurality of seed crystal on one side of the reactor spaced apart from the composition; and sublimating the composition such that the SiC ingot grows from the plurality of seed crystal. A flow factor of the composition may be 5 to 35.

First claim

Opening claim text (preview).

What is claimed is: 1. A method for preparing a SiC ingot, comprising: loading a powder composition of a raw material comprising SiC particles into a reactor; placing a seed crystal on one side of the reactor spaced apart from the powder composition; and sublimating the powder composition such that the SiC ingot grows from the seed crystal, wherein a flow factor of the composition is 5 to 35, wherein when the powder composition is compressed by applying a pressure of 8 kPa, a ratio of a change in an internal friction angle after the compression to an internal friction angle before the compression is 5% to 18%, and wherein a number of a surface pit of the SiC ingot is 10 K/cm 2 or less. 2. The method of claim 1 , wherein a D 50 of the powder composition is 10 μm to 800 μm. 3. The method of claim 1 , wherein a caliber of the SiC ingot is 4 inches or more. 4. The method of claim 1 , wherein a caliber of the SiC ingot is 6 inches or more. 5. The method of claim 1 , wherein the SiC ingot comprises a 4H SiC single crystal. 6. The method of claim 1 , wherein the SiC ingot is convex or flat. 7. A powder composition of a raw material for preparing a SiC ingot with a surface pit of 10 K/cm 2 or less, wherein the composition generates a flow when a predetermined pressure is applied, wherein the powder composition comprises SiC particles, wherein the powder composition has a flow factor of 5 to 35, and wherein when the powder composition is compressed by applying a pressure of 8 kPa, a ratio of a change in an internal friction angle after the compression to an internal friction angle before the compression is 5% to 18%.

Assignees

Inventors

Classifications

  • Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement · CPC title

  • Carbides · CPC title

  • C30B29/36Primary

    Carbides · CPC title

  • C30B23/00Primary

    Single-crystal growth by condensing evaporated or sublimed materials · CPC title

  • Vacuum evaporation · CPC title

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What does patent US10822720B1 cover?
A method for preparing a SiC ingot includes loading a composition of a raw material comprising a carbon source and a silicon source into a reactor; placing a plurality of seed crystal on one side of the reactor spaced apart from the composition; and sublimating the composition such that the SiC ingot grows from the plurality of seed crystal. A flow factor of the composition may be 5 to 35.
Who is the assignee on this patent?
Skc Co Ltd
What technology area does this patent fall under?
Primary CPC classification C30B29/36. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Nov 03 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).