Systems and methods for tailored microstructures using templated grain nucleation

Patent metadata

Field	Value
Publication number	US-10822688-B2
Application number	US-201916521996-A
Country	US
Kind code	B2
Filing date	Jul 25, 2019
Priority date	Nov 11, 2014
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

Methods for controlled microstructure creation utilize seeding of amorphous layers prior to annealing. Seed crystals are formed on an amorphous layer or layers. The material, size, and spacing of the seed crystals may be varied, and multiple seed layers and/or amorphous layers may be utilized. Thereafter, the resulting assembly is annealed to generate a crystalline microstructure. Via use of these methods, devices having desirable microstructural properties are enabled.

First claim

What is claimed is:

1. A method for controlled microstructure creation, the method comprising:
depositing a first layer of amorphous TiAl material on a silicon substrate;
forming a series of seed crystals on the first layer of amorphous TiAl material; and
annealing the amorphous TiAl material and the seed crystals to form the microstructure, wherein the average grain size of the microstructure is less than 200 nm.

2. The method of claim 1 , further comprising, prior to the annealing, depositing a second layer of amorphous TiAl material to enclose the seed crystals between the first layer of amorphous TiAl material and the second layer of amorphous TiAl material.

3. The method of claim 1 , further comprising, prior to the annealing, repeating the depositing and forming to achieve a desired microstructure thickness.

4. The method of claim 1 , wherein the forming further comprises controlling the spacing between the seed crystals in order to control a characteristic of the microstructure resulting from the annealing.

5. The method of claim 1 , wherein the forming further comprises controlling the size of the seed crystals in order to control a characteristic of the microstructure resulting from the annealing.

6. The method of claim 1 , wherein the forming further comprises depositing a layer of crystalline seed material on the first layer of amorphous TiAl material, and wherein the layer of crystalline seed material has a thickness of less than 10 nm.

7. The method of claim 1 , wherein the forming further comprises depositing a thin layer of an alloy on the first layer of amorphous TiAl material while temporarily increasing the temperature of the silicon substrate.

8. The method of claim 1 , wherein the forming further comprises utilizing a mask with patterned holes to control placement of the seed crystals on the first layer of amorphous TiAl material.

9. The method of claim 1 , wherein the annealing is performed at a temperature between 573 Kelvin and 973 Kelvin.

10. The method of claim 1 , wherein the series of seed crystals comprises at least one of crystalline Ti or crystalline Al.

11. The method of claim 10 , wherein the series of seed crystals is configured with an average layer thickness of between 1.0 nm and 2.5 nm.

Assignees

• Rajagopalan Jagannathan
• Sarkar Rohit
• Univ Arizona State

Inventors

• Rajagopalan Jagannathan
• Sarkar Rohit

Classifications

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C23C10/04

  Diffusion into selected surface areas, e.g. using masks · CPC title

• C23C10/28 Primary

  using solids, e.g. powders, pastes · CPC title