Ion exchange resins, purification methods and methods of making ionic resins

Patent metadata

Field	Value
Publication number	US-10821433-B2
Application number	US-201816164175-A
Country	US
Kind code	B2
Filing date	Oct 18, 2018
Priority date	Oct 31, 2017
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

An ion exchange resin comprises a crosslinked resin and a salt covalently bonded to a carbon of the resin, wherein the salt comprises a first non-metallic cation and a first counteranion, wherein the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and wherein the ion exchange resin is essentially free of metals. The ion exchange resin finds particular use in the removal of impurities from solutions that are useful in the manufacture of semiconductor devices.

First claim

What is claimed is:

1. An ion exchange resin, comprising a crosslinked resin and a salt covalently bonded to a carbon of the resin, wherein the salt comprises a first non-metallic cation and a first counteranion, wherein the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and wherein the ion exchange resin is essentially free of metals.

2. The ion exchange resin of claim 1 , wherein the second non-metallic cation is an optionally substituted ammonium cation.

3. An ion exchange medium, comprising an ion exchange resin of claim 1 .

4. The ion exchange medium of claim 3 , wherein said medium is a bead, a membrane, a filter, an ion exchange column or a combination thereof.

5. A purification method, comprising contacting a composition comprising a solvent and an impurity with an ion exchange resin of claim 1 , thereby reducing the content of the impurity in the composition.

6. The purification method of claim 5 , wherein the impurity is hydrogen peroxide or an organic peroxide.

7. The purification method of claim 5 , wherein the impurity is a metal.

8. The purification method of claim 5 , wherein the solvent is an organic solvent.

9. The purification method of claim 8 , wherein the organic solvent is diisopropyl benzene, triisopropyl benzene, methanol, isopropyl alcohol, methyl isobutyl carbinol, propylene glycol, tripropylene glycol, methyl tertbutyl ether, isoamyl ether, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol dimethyl ether, tripropylene glycol monomethyl ether, tetrahydrofuran, acetone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, ethyl-3-ethoxy propionate, propylene glycol monomethyl ether acetate, gamma-butyrolactone, ethyl lactate, butyl cellosolve, or a combination thereof.

10. A method of making an ion exchange resin, comprising:
(a) providing an ionic resin comprising a crosslinked resin and a salt covalently bonded to a carbon of the crosslinked resin, wherein the salt comprises a first cation and a first counteranion; and
(b) contacting the ionic resin with a salt comprising a second cation and a second counteranion comprising a thiosulfate group, thereby exchanging the first counteranion and the second counteranion.

11. The ion exchange medium of claim 3 , wherein the second nonmetallic cation is an optionally substituted ammonium cation.

12. The ion exchange medium of claim 11 , wherein said medium is a bead, a membrane, a filter, an ion exchange column or a combination thereof.

13. The purification method of claim 5 , wherein the second nonmetallic cation is an optionally substituted ammonium cation.

14. The purification method of claim 13 , wherein the impurity is hydrogen peroxide or an organic peroxide.

15. The purification method of claim 13 , wherein the impurity is a metal.

16. The purification method of claim 13 , wherein the solvent is an organic solvent.

17. The purification method of claim 16 , wherein the organic solvent is diisopropyl benzene, triisopropyl benzene, methanol, isopropyl alcohol, methyl isobutyl carbinol, propylene glycol, tripropylene glycol, methyl tertbutyl ether, isoamyl ether, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol dimethyl ether, tripropylene glycol monomethyl ether, tetrahydrofuran, acetone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, ethyl-3-ethoxy propionate, propylene glycol monomethyl ether acetate, gamma-butyrolactone, ethyl lactate, butyl cellosolve, or a combination.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Rudenko Andrey
• Pohlers Gerhard

Classifications

• B01J47/016

  Modification or after-treatment of ion-exchangers · CPC title

• B01J43/00 Primary

  Amphoteric ion-exchange, i.e. using ion-exchangers having cationic and anionic groups; Use of material as amphoteric ion-exchangers; Treatment of material for improving their amphoteric ion-exchange properties (ion-exchange chromatography processes B01D15/36) · CPC title

• B01J47/12

  characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes (electrodialysis or electro-osmosis B01D61/42) · CPC title

• B01J41/05

  in the strongly basic form · CPC title

• C07C67/56

  by solid-liquid treatment; by chemisorption · CPC title