Solid-state imaging device, method of manufacturing a solid-state imaging device, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10818722-B2
Application number	US-201916510445-A
Country	US
Kind code	B2
Filing date	Jul 12, 2019
Priority date	Sep 25, 2013
Publication date	Oct 27, 2020
Grant date	Oct 27, 2020

Abstract

Disclosed is a solid-state imaging device including a plurality of pixels and a plurality of on-chip lenses. The plurality of pixels are arranged in a matrix pattern. Each of the pixels has a photoelectric conversion portion configured to photoelectrically convert light incident from a rear surface side of a semiconductor substrate. The plurality of on-chip lenses are arranged for every other pixel. The on-chip lenses are larger in size than the pixels. Each of color filters at the pixels where the on-chip lenses are present has a cross-sectional shape whose upper side close to the on-chip lens is the same in width as the on-chip lens and whose lower side close to the photoelectric conversion portion is shorter than the upper side.

First claim

What is claimed is:

1. An imaging device, comprising:
a plurality of photodiodes including a group of first photodiodes, a group of second photodiodes, and a group of third photodiodes,
wherein the first photodiodes are configured to receive light in a range of wavelengths corresponding to green light,
wherein the second photodiodes are configured to receive light in a range of wavelengths corresponding to red light,
wherein the third photodiodes are configured to receive light in a range of wavelengths corresponding to blue light,
wherein the group of first photodiodes includes a first photodiode and a second photodiode disposed diagonally,
wherein the group of second photodiodes includes a third photodiode and a fourth photodiode disposed in a horizontal direction,
wherein the group of third photodiodes includes a fifth photodiode and a sixth photodiode disposed in the horizontal direction,
wherein the first photodiode is disposed between the third photodiode and the fourth photodiode in a horizontal direction,
wherein the second photodiode is disposed between the fifth photodiode and the sixth photodiode in the horizontal direction,
wherein a size of the third photodiode is larger than a size of the first photodiode, and
wherein a size of the second photodiode is smaller than the size of the fifth photodiode.

2. The imaging device of claim 1 , wherein a shape of the first photodiode in a plan view is different than a shape of the third photodiode in the plan view.

3. The imaging device of claim 2 , wherein the shape of the first photodiode in the plan view is different than a shape of the fifth photodiode in the plan view.

4. The imaging device of claim 3 , wherein the shape of the third photodiode in the plan view is the same as the shape of the fifth photodiode in the plan view.

5. The imaging device of claim 1 , wherein a size of the third photodiode is equal to a size of the fifth photodiode.

6. An imaging device, comprising:
a plurality of color filters including a group of green color filters, a group of red color filters, and a group of blue color filters,
wherein the group of the green color filters includes a first color filter and a second color filter disposed diagonally,
wherein the group of the red color filters include a third color filter and a fourth color filter disposed in a horizontal direction,
wherein the group of the blue color filters include a fifth color filter and a sixth color filter disposed in the horizontal direction,
wherein the first color filter is disposed between the third color filter and the fourth color filter in a horizontal direction,
wherein the second color filter is disposed between the fifth color filter and the sixth color filter in the horizontal direction,
wherein a size of the third color filter is larger than a size of the first color filter in a plan view, and
wherein a size of the second color filter is smaller than the size of the fifth color filter in the plan view.

7. The imaging device of claim 6 , wherein a shape of the first color filter in a plan view is different than a shape of the third color filter in the plan view.

8. The imaging device of claim 7 , wherein the shape of the first color filter in the plan view is different than a shape of the fifth color filter in the plan view.

9. The imaging device of claim 8 , wherein the shape of the third color filter in the plan view is the same as a shape of the fifth color filter in the plan view.

10. The imaging device of claim 6 , wherein a size of the third color filter in the plan view is equal to a size of the fifth color filter in the plan view.

11. An imaging device, comprising:
a plurality of photodiodes including a group of first photodiodes, a group of second photodiodes, and a group of third photodiodes,
wherein the first photodiodes are configured to receive light in a range of wavelengths corresponding to green light,
wherein the second photodiodes are configured to receive a range of wavelength corresponding to red light,
wherein the third photodiodes are configured to receive a range of wavelength corresponding to blue light,
wherein the group of first photodiodes includes a first photodiode and a second photodiode disposed diagonally,
wherein the group of second photodiodes includes a third photodiode and a fourth photodiode disposed in a horizontal direction,
wherein the group of third photodiodes includes a fifth photodiode and a sixth photodiode disposed in the horizontal direction,
wherein the first photodiode is disposed between the third photodiode and the fourth photodiode in a horizontal direction,
wherein the second photodiode is disposed between the fifth photodiode and the sixth photodiode in the horizontal direction,
wherein a size of the fifth photodiode is larger than a size of the second photodiode, and
wherein a size of the first photodiode is smaller than the size of the third photodiode.

12. The imaging device of claim 11 , wherein a shape of the first photodiode in a plan view is different than a shape of the third photodiode in the plan view.

13. The imaging device of claim 12 , wherein the shape of the first photodiode in the plan view is different than a shape of the fifth photodiode in the plan view.

14. The imaging device of claim 13 , wherein the shape of the third photodiode in the plan view is the same as the shape of the fifth photodiode in the plan view.

15. The imaging device of claim 11 , wherein a size of the third photodiode is equal to a size of the fifth photodiode.

16. An imaging device, comprising:
a plurality of color filters including a group of green color filters, a group of red color filters, and a group of blue color filters,
wherein the group of first color filters includes a first color filter and a second color filter disposed diagonally,
wherein the group of second color filters includes a third color filter and a fourth color filter disposed in a horizontal direction,
wherein the group of third color filters includes a fifth color filter and a sixth color filter disposed in the horizontal direction,
wherein the first color filter is disposed between the third color filter and the fourth color filter in a horizontal direction,
wherein the second color filter is disposed between the fifth color filter and the sixth color filter in the horizontal direction,
wherein a size of the fifth color filter is larger than a size of the second color filter in a plan view, and
wherein a size of the first color filter is smaller than the size of the third color filter in the plan view.

17. The imaging device of claim 16 , wherein a shape of the first color filter in a plan view is different than a shape of the third color filter in the plan view.

18. The imaging device of claim 17 , wherein the shape of the first color filter in the plan view is different than a shape of the fifth color filter in the plan view.

19. The imaging device of claim 18 , wherein the shape of the third color filter in the plan view is the same as a shape of the fifth color filter in the plan view.

20. The imaging device of claim 16 , wherein a size of the third color filter in the plan view is equal to a size of the fifth color filter in the plan view.

Assignees

• Sony Corp

Inventors

• Suzuki Rena
• Tojinbara Hiroki
• Yoshita Ryoto
• Ueda Yoichi

Classifications

• H04N25/133

  including elements passing panchromatic light, e.g. filters passing white light · CPC title

• H04N25/135

  based on four or more different wavelength filter elements · CPC title

• H04N25/76

  Addressed sensors, e.g. MOS or CMOS sensors · CPC title

• H10F39/8063

  Microlenses · CPC title

• H10F39/8057

  Optical shielding · CPC title