Turning mirror optical couplers

Patent metadata

Field	Value
Publication number	US-10816738-B2
Application number	US-201415521539-A
Country	US
Kind code	B2
Filing date	Oct 24, 2014
Priority date	Oct 24, 2014
Publication date	Oct 27, 2020
Grant date	Oct 27, 2020

Abstract

One example includes an optical coupler. The optical coupler includes a waveguide formed in a first layer of a layered structure that is to propagate an optical signal. The waveguide includes an end portion. The optical coupler also includes a turning mirror that includes a bulk structure and a reflective material deposited on an angular face of the bulk structure to form a surface of the turning mirror. The bulk structure can have a greater cross-sectional size than a cross-sectional size of the waveguide, such that the angular face extends above the first layer of the layered structure and extends into a second layer of the layered structure below the first layer. The surface of the turning mirror can be arranged to reflect the optical signal that is provided from the end portion of the waveguide.

First claim

What is claimed is:

1. An optical coupler comprising:
a waveguide formed by etching within a first layer of a layered structure that is to propagate an optical signal, the waveguide comprising an end portion; and
a turning mirror comprising a bulk structure and a reflective material deposited on an angular face of the bulk structure to form a surface of the turning mirror, the bulk structure having a greater cross-sectional size than a cross-sectional size of the waveguide, such that the angular face extends above and below the first layer of the layered structure and extends into a second layer of the layered structure below the first layer, the surface of the turning mirror being arranged to reflect the optical signal that is provided from the end portion of the waveguide wherein the bulk structure is deposited onto and in contact with at least a portion of the second layer.

2. The optical coupler of claim 1 , wherein the layered structure is a silicon-on-insulator (SOI) structure, such that the first layer is a first silicon layer of the SOI structure and the second layer is an insulator layer below the first silicon layer.

3. The optical coupler of claim 1 , wherein the end portion is fabricated to provide anti-reflection of the optical signal with respect to the waveguide.

4. The optical coupler of claim 3 , wherein the end portion comprises one of a sub-wavelength pattern and an adiabatic tapered structure with respect to a cross-section of the waveguide to provide the anti-reflection of the optical signal.

5. The optical coupler of claim 1 , wherein the surface of the turning mirror is non-planar to at least one of split, focus, and collimate the reflected optical signal.

6. The optical coupler of claim 1 , wherein the bulk structure comprises one or more of poly-silicon, silicon dioxide, silicon nitride, or SU-8.

7. The optical coupler of claim 1 , wherein the angular face of the bulk structure is shaped from a process involving one or more of lithography, dry etching, wet etching, or laser-ablation.

8. The optical coupler of claim 1 , wherein the reflective material comprises one or more of titanium, platinum, or gold.

9. The optical coupler of claim 5 , wherein the surface of turning mirror is further configured to provide mode matching of the optical signal to an optical fiber or waveguide into which the optical signal is launched.

Assignees

• Hewlett Packard Entpr Dev Lp

Inventors

• Mathai Sagi
• Tan Michael Renne Ty

Classifications

• G02B6/24

  Coupling light guides · CPC title

• G02B6/4214 Primary

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title