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US-2016322515-A1 · Nov 3, 2016 · US
Passivation mixture and systems and methods for selectively passivating substrate materials including germanium or type III-IV materials using the passivation mixture
US10815573B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10815573-B2 |
| Application number | US-201715608416-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 30, 2017 |
| Priority date | May 30, 2017 |
| Publication date | Oct 27, 2020 |
| Grant date | Oct 27, 2020 |
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Abstract
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A liquid passivation mixture for passivating an outer layer of a substrate comprises a first material selected from group consisting of sulfur or selenium and a base selected from a group consisting of quaternary ammonium compound, sodium hydroxide (NaOH), potassium hydroxide (KOH), and amine.
First claim
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What is claimed is: 1. A liquid passivation mixture for passivating an outer layer of a substrate, the liquid passivation mixture consisting of: a base, wherein the base is an amine selected from a group consisting of ethylenediamine, alkanolamine, diethylenetriamine, N-methylpyrrolidone, acetamide, tertiary amine, secondary amine, and primary amine; and a first material dissolved into the base, wherein the first material is selected from a group consisting of sulfur and selenium. 2. The liquid passivation mixture of claim 1 , further comprising water to dilute the liquid passivation mixture from 10 to 1000 times. 3. The liquid passivation mixture of claim 1 , wherein a concentration of sulfide ions is in a range between 0.0001 to 10 molar (M). 4. The liquid passivation mixture of claim 1 , wherein a concentration of sulfide ions is in a range between 1 and 10 M. 5. The liquid passivation mixture of claim 1 , wherein the liquid passivation mixture has a pH greater than 6. 6. The liquid passivation mixture of claim 1 , further comprising water to dilute the liquid passivation mixture from 10 to 1000 times. 7. The liquid passivation mixture of claim 1 , wherein a concentration of sulfide ions is in a range between 0.0001 to 10 molar (M). 8. The liquid passivation mixture of claim 1 , wherein a concentration of sulfide ions is in a range between 1 and 10 M. 9. The liquid passivation mixture of claim 1 , wherein the liquid passivation mixture has a pH greater than 6. 10. A liquid passivation mixture for passivating an outer layer of a substrate, the liquid passivation mixture consisting of: a base, wherein the base is a quaternary ammonium compound that includes tetra-alkyl ammonium hydroxide; and a first material dissolved into the base, wherein the first material is selected from a group consisting of sulfur and selenium. 11. A liquid passivation mixture for passivating an outer layer of a substrate, the liquid passivation mixture consisting of: a base, wherein the base is an amine selected from a group consisting of tetra-alkyl ammonium hydroxide, ethylenediamine, alkanolamine, diethylenetriamine, N-methylpyrrolidone, acetamide, tertiary amine, secondary amine, and primary amine; and a first material dissolved into the base, wherein the first material is selected from a group consisting of sulfur and selenium.
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- What does patent US10815573B2 cover?
- A liquid passivation mixture for passivating an outer layer of a substrate comprises a first material selected from group consisting of sulfur or selenium and a base selected from a group consisting of quaternary ammonium compound, sodium hydroxide (NaOH), potassium hydroxide (KOH), and amine.
- Who is the assignee on this patent?
- Lam Res Ag
- What technology area does this patent fall under?
- Primary CPC classification C23C22/73. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Oct 27 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).