Electro-optical inspection apparatus using electron beam
US-9390886-B2 · Jul 12, 2016 · US
US10811652B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10811652-B2 |
| Application number | US-201715825264-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2017 |
| Priority date | Nov 30, 2016 |
| Publication date | Oct 20, 2020 |
| Grant date | Oct 20, 2020 |
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To carry out accurate defect inspection over a wide area, a defect inspection device (1) includes: a radiation source section (2) configured to emit an electromagnetic wave (4) to a separator roll (10); and a sensor section (3) configured to detect the electromagnetic wave (4) that the radiation source section (2) has emitted to the separator roll (10), the sensor section (3) being configured to detect the electromagnetic wave (4) before and after the separator roll is moved relative to the radiation source section (2).
Opening claim text (preview).
What is claimed: 1. A defect inspection device, comprising: a holding mechanism configured to hold a separator roll including (i) a core in a cylindrical shape and (ii) a separator for use in a battery which separator is wound around the core; a radiation source section configured to emit an electromagnetic wave to the separator roll; and a sensor section configured to detect the electromagnetic wave that the radiation source section has emitted to the separator roll, the separator roll being movable relative to the radiation source section, the sensor section being configured to detect the electromagnetic wave before and after the separator roll is moved relative to the radiation source section. 2. The defect inspection device according to claim 1 , wherein the separator roll is moved relative to the radiation source section in such a manner that the defect inspection device obtains an image of a surface of the separator, wound around the core, which surface is close to the radiation source section. 3. The defect inspection device according to claim 1 , wherein the separator roll is rotated relative to the radiation source section in such a manner that the separator roll has a center corresponding to a rotation center. 4. The detect inspection device according to claim 1 , wherein D 2 /D 1 is more than 1 and not more than 40, where D 1 is a distance from an emitting surface of the radiation source section to a second side surface of the separator roll which second side surface is one of opposite side surfaces of the separator roll and which second side surface is on a side on which the sensor section is present, and D 2 is a distance from the emitting surface of the radiation source section to a detecting surface of the sensor section. 5. The defect inspection device according to claim 1 , further comprising: a captured-image generating section configured to generate a captured image based on the electromagnetic wave detected by the sensor section, wherein the captured-image generating section is configured to combine a first captured image with a second captured image in such a manner that the first captured image and the second captured image partially overlap with each other, the first captured image being the captured image having been generated before the separator roll is moved relative to the radiation source section, the second captured image being the captured image having been generated after the separator roll is moved relative to the radiation source section. 6. The defect inspection device according to claim 5 , wherein at least a portion of the captured image shows a portion of the core or a portion of an outer peripheral surface of the separator. 7. The defect inspection device according to claim 1 , wherein the electromagnetic wave is an X ray. 8. The defect inspection device according to claim 5 , wherein a detect to be detected on a basis of the captured image is a metal foreign object.
and forming images of the material · CPC title
Moulding; Embossing; Cutting · CPC title
impurities, foreign matter, trace amounts · CPC title
Wound package of webs · CPC title
X-ray · CPC title
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