Multimodal biosensor

Patent metadata

Field	Value
Publication number	US-10802018-B2
Application number	US-201514932373-A
Country	US
Kind code	B2
Filing date	Nov 4, 2015
Priority date	Nov 4, 2014
Publication date	Oct 13, 2020
Grant date	Oct 13, 2020

Abstract

Multimodal biosensor devices are disclosed. A device may include at least two sensors selected from: (i) a nanomechanical resonator; (ii) plasmonic nanodisk antennae; and (iii) a field effect transistor. The biosensor device is capable of transducing the adsorption of biomolecules onto the biosensor device into optical, electrical and/or mechanical signals.

First claim

What is claimed is:

1. A multimodal biosensor device, comprising:
a sample analysis region that presents at least a first sensor and a second sensor for exposure to a sample,
the first sensor being of a first sensor type selected from the list consisting of the following three sensor types and the second sensor being of a second sensor type selected from the list consisting of the following three sensor types, the second sensor type being different from the first sensor type:

(i) a nanomechanical resonator;
(ii) plasmonic nanodisk antennae; and
(iii) a field effect transistor,
and
wherein the biosensor device is capable of simultaneously transducing adsorption of biomolecules onto the biosensor device into optical, electrical and mechanical signals.

2. The multimodal biosensor device of claim 1 , wherein one of the first sensor and the second sensor comprises a nanomechanical resonator.

3. The multimodal biosensor device of claim 2 , wherein the nanomechanical resonator comprises a silicon nitride membrane coupled to a silicon frame.

4. The multimodal biosensor device of claim 3 , comprising a metal layer disposed on a surface of the silicon nitride membrane.

5. The multimodal biosensor device of claim 4 , wherein the metal layer has a thickness of about 100 nm.

6. The multimodal biosensor device of claim 4 , wherein the metal layer comprises silver.

7. The multimodal biosensor device of claim 1 , wherein one of the first sensor and the second sensor comprises plasmonic nanodisk antennae, wherein the plasmonic nanodisk antennae comprise gold nanodisk antennae.

8. The multimodal biosensor device of claim 1 , wherein one of the first sensor and the second sensor comprises a field effect transistor, wherein the field effect transistor is graphene-based.

9. The multimodal biosensor device of claim 8 , wherein the field effect transistor comprises a graphene monolayer.

10. A multimodal biosensor device, comprising:
a sample analysis region that presents at least a first sensor and a second sensor for exposure to a sample,
wherein (i) the first sensor comprises a nanomechanical resonator;
(ii) the second sensor comprises plasmonic nanodisk antennae, wherein the plasmonic nanodisk antennae are disposed on a surface of the nanomechanical resonator substrate; and
(iii) the multimodal biosensor device further comprises a field effect transistor, wherein the field effect transistor is disposed on a surface of the nanomechanical resonator substrate.

11. A method of using a multimodal biosensor device, the method comprising: adsorbing biomolecules onto the multimodal biosensor device,
the multimodal biosensor device comprising a sample analysis region that presents at least a first sensor and a second sensor for exposure to a sample,
the first sensor being of a first sensor type selected from the list consisting of the following three sensor types and the second sensor being of a second sensor type selected from the list consisting of the following three sensor types, the second sensor type being different from the first sensor type:

(i) a nanomechanical resonator;
(ii) plasmonic nanodisk antennae; and
(iii) a field effect transistor,
wherein the biosensor device is capable of simultaneously transducing the adsorption of biomolecules onto the biosensor device into optical, electrical, and mechanical signals, and
wherein the multimodal biosensor device transduces the adsorption of the biomolecules into an optical signal from plasmonic nanodisk antennae, an electrical signal from a field effect transistor, and a mechanical signal from a nanomechanical resonator; and

detecting and differentiating a plurality of different biomolecules adsorbed onto the multimodal biosensor device.

12. The method according to claim 11 , wherein the biomolecules are proteins.

13. A method of making a multimodal biosensor device that includes a sample analysis region that presents at least a first sensor and a second sensor for exposure to a sample, the first sensor being of a first sensor type selected from the list consisting of the following three sensor types and the second sensor being of a second sensor type selected from the list consisting of the following three sensor types, the second sensor type being different from the first sensor type: (i) a nanomechanical resonator;
(ii) plasmonic nanodisk antennae; and (iii) a field effect transistor, and wherein the biosensor device is capable of simultaneously transducing adsorption of biomolecules onto the biosensor device into optical, electrical and mechanical signals, the method comprising:

depositing plasmonic nanodisk antennae and a field effect transistor on a top surface of a nanomechanical resonator.

14. The method of claim 13 , wherein the nanomechanical resonator is a silicon nitride membrane.

15. The method of claim 13 , wherein the plasmonic nanodisk antennae comprise gold nanodisk antennae.

16. The method of claim 13 , wherein the field effect transistor is graphene.

17. The method of claim 13 further comprising depositing silver onto a surface of the nanomechanical resonator.

18. The method of claim 13 , wherein the nanomechanical resonator is a silicon nitride membrane deposited on a silicon frame, the plasmonic nanodisk antennae comprise gold nanodisk antennae, and the field effect transistor is graphene, the method comprising:
providing the silicon nitride membrane deposited on the silicon frame;
depositing the gold nanodisk antennae, surface source electrodes, and drain electrodes on the silicon nitride membrane by spin-coating a polymethyl methacrylate (PMMA) 495/950 resist bilayer followed by electron beam lithography;
depositing Ti/Au on the silicon nitride membrane using an electron beam evaporator;
depositing silver (Ag) on an underside of the silicon nitride membrane to form a gate electrode;
spin-coating and baking graphene on copper foils with polymethyl methacrylate (PMMA); and
transferring the graphene on copper foils with PMMA onto a field effect transistor channel region of the silicon nitride membrane.

Assignees

• Univ Pennsylvania

Inventors

• Cubukcu Ertugrul
• Zhu Alexander Yutong
• Yi Fei

Classifications

• H10D62/882

  Graphene · CPC title

• H10D30/6741

  Group IV materials, e.g. germanium or silicon carbide (TFTs having oxide semiconductors H10D30/6755) · CPC title

• G01N21/554

  detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance · CPC title

• G01N29/036

  by measuring frequency or resonance of acoustic waves · CPC title

• G01N2291/0256

  Adsorption, desorption, surface mass change, e.g. on biosensors · CPC title