Radiation analyzing apparatus and radiation analyzing method

Patent metadata

Field	Value
Publication number	US-10801977-B2
Application number	US-201715465910-A
Country	US
Kind code	B2
Filing date	Mar 22, 2017
Priority date	Mar 24, 2016
Publication date	Oct 13, 2020
Grant date	Oct 13, 2020

Abstract

A radiation analyzing apparatus includes a radiation irradiation unit configured to irradiate an object with a first radiation, a radiation detection unit configured to detect a second radiation generated from the object irradiated with the first radiation, a radiation converging unit configured to disposed between the object and the radiation detection unit and to converge the second radiation on the radiation detection unit, a position changing unit configured to vary a relative positional relationship between the radiation converging unit and the radiation detection unit, and a driving unit configured to change the positional relationship.

First claim

What is claimed is:

1. A radiation analyzing apparatus comprising:
a radiation irradiation unit configured to irradiate an object with a first radiation;
a radiation detection unit configured to detect a second radiation generated from the object which is irradiated with the first radiation;
a radiation converging unit configured to be disposed between the object and the radiation detection unit, the radiation converging unit configured to converge the second radiation on the radiation detection unit;
a position changing unit configured to vary a relative positional relationship between the radiation converging unit and the radiation detection unit;
a driving unit configured to drive the position changing unit to change the positional relationship;
a counting rate calculation unit configured to calculate a counting rate of the second radiation detected by the radiation detection unit;
a position calculation unit configured to calculate a maximum value of a regression curve based on the counting rate calculated by the counting rate calculation unit, and to calculate a position of the radiation converging unit with respect to the radiation detection unit based on the calculated maximum value; and
a driving control unit configured to control the driving unit based on the position calculated by the position calculation unit.

2. The radiation analyzing apparatus according to claim 1 , further comprising:
another driving control unit configured to control the driving unit based on an operation received from a user.

3. The radiation analyzing apparatus according to claim 1 ,
wherein the radiation irradiation unit performs irradiation with an electron beam as the first radiation, and
wherein the radiation detection unit is a superconductive transition edge sensor detecting, as the second radiation, X-rays which is generated from the object by being irradiated with the electron beam.

4. A radiation analyzing method comprising:
irradiating an object with a first radiation by a radiation irradiation unit;
detecting a second radiation, which is generated from the object irradiated with the first radiation, by a radiation detection unit;
converging the second radiation on the radiation detection unit by a radiation converging unit disposed between the object and the radiation detection unit;
causing a driving unit to drive a position changing unit to change a relative positional relationship between the radiation converging unit and the radiation detection unit, the position changing unit configured to vary the positional relationship;
calculating a counting rate of the second radiation detected by the radiation detection unit;
calculating a maximum value of a regression curve based on the calculated counting rate;
calculating a position of the radiation converging unit with respect to the radiation detection unit based on the calculated maximum value; and
controlling the driving unit based on the calculated position.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Nagata Atsushi
• Nakayama Satoshi
• Tanaka Keiichi
• Chinone Kazuo

Classifications

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N2223/33

  scanning, i.e. relative motion for measurement of successive object-parts · CPC title