Spectroscopic focal plane array and method of making same

Patent metadata

Field	Value
Publication number	US-10801895-B2
Application number	US-201715697934-A
Country	US
Kind code	B2
Filing date	Sep 7, 2017
Priority date	Sep 7, 2017
Publication date	Oct 13, 2020
Grant date	Oct 13, 2020

Abstract

A semiconductor material emitting device is positioned such that its output flux impinges on a substrate at a non-perpendicular angle, so as to grow a first epilayer which is linearly graded in the direction perpendicular to the growth direction. The linear grading can be arranged such that, for example, each row of pixels has a different cutoff wavelength, thereby making it possible to provide a spectroscopic FPA without the use of filters. The non-perpendicular angle and/or the flux intensity can be adjusted to achieve a desired compositional grading. A spectral ellipsometer may be used to monitor the composition of the epilayer during the fabrication process, and to control the intensity of the flux.

First claim

I claim:

1. A method of providing a linearly graded epilayer on a semiconductor substrate, comprising:
providing a semiconductor substrate;
providing a semiconductor material emitting device which outputs a flux having a predetermined composition and which creates epitaxial growth when directed at a substrate, wherein said semiconductor substrate is not rotated during said epitaxial growth; and
positioning said semiconductor material emitting device such that said flux impinges on said semiconductor substrate at a non-perpendicular angle to grow a first epilayer on said substrate which is linearly graded in the direction perpendicular to the growth direction and parallel to said semiconductor substrate;
wherein said first epilayer is adapted for a row and column array of pixels, such that the array's cutoff wavelength is made to vary linearly across the array in the direction perpendicular to the growth direction.

2. The method of claim 1 , wherein said semiconductor material emitting device is a molecular beam epitaxy (MBE) machine, said flux emitted from at least one output of said MBE machine.

3. The method of claim 1 , wherein said semiconductor substrate comprises CdZnTe and said flux comprises CdTe.

4. The method of claim 3 , wherein said MBE machine outputs said CdTe flux from a first gun and an Hg flux from a second gun, such that said first epilayer has a composition of:
Hg1-xCdxTe, with the value of ‘x’ varying with said linear grading.

5. The method of claim 1 , wherein said non-perpendicular angle is adjusted to achieve a desired compositional grading across said first epilayer in the direction perpendicular to the growth direction and parallel to said semiconductor substrate.

6. The method of claim 1 , wherein the intensity of said flux is adjusted to achieve a desired compositional grading across said first epilayer in the direction perpendicular to the growth direction and parallel to said semiconductor substrate.

7. The method of claim 1 , further comprising using a spectral ellipsometer to monitor the composition of said first epilayer.

8. The method of claim 7 , further comprising using said spectral ellipsometer to control the intensity of said flux.

9. The method of claim 1 , wherein each of said pixels has an associated cutoff wavelength which varies with said linear grading.

10. The method of claim 9 , said linear grading arranged such that each row of pixels has a different cutoff wavelength.

11. The method of claim 9 , further comprising processing said first epilayer to form semiconductor junctions required for said array of pixels.

12. The method of claim 11 , wherein said processing comprises ion implantation.

13. The method of claim 1 , further comprising positioning and using said semiconductor material emitting device to grow a second linearly graded epilayer above said first linearly graded epilayer, said first linearly graded epilayer being a base layer and said second linearly graded epilayer being a filter layer.

14. The method of claim 13 , wherein said base and filter layers are adapted for a row and column array of pixels, the compositional grading of said base and filter layers differing such that the wavelength range to which each pixel is sensitive varies with said difference and with said pixel's position in said array.

Assignees

• Teledyne Scient & Imaging Llc

Inventors

• Zandian Majid

Classifications

• H10P14/3432

  Tellurides · CPC title

• H10P14/3254

  Graded layers · CPC title

• H10P14/3248

  consisting of two layers · CPC title

• H10P14/2917

  Tellurides · CPC title

• H10P14/22

  using physical deposition, e.g. vacuum deposition or sputtering · CPC title