Process for the generation of thin inorganic films

Patent metadata

Field	Value
Publication number	US-10801105-B2
Application number	US-201615775856-A
Country	US
Kind code	B2
Filing date	Nov 18, 2016
Priority date	Nov 24, 2015
Publication date	Oct 13, 2020
Grant date	Oct 13, 2020

Abstract

The present invention is in the field of processes for the generation of thin inorganic films on substrates, in particular atomic layer deposition processes. The present invention relates to a process comprising bringing a compound of general formula (I) into the gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R 1 , R 2 , R 3 , and R 4 are independent of each other an alkyl group, an aryl group or a trialkylsilyl group, M is Mn, Ni or Co, X is a ligand which coordinates M, wherein at least one X is a neutrally charged ligand, m is 1, 2 or 3 and n is at least 1 wherein the molecular weight of the compound of general formula (I) is up to 1000 g/mol.

First claim

The invention claimed is:

1. A process, comprising:
bringing a compound of formula (I) into a gaseous or aerosol state:

 and
depositing the compound of formula (I) from the gaseous or aerosol state onto a solid substrate,
wherein R 1 , R 2 , R 3 , and R 4 are each independently an alkyl group, an aryl group or a trialkylsilyl group,
M is Mn, Ni or Co,
each X is independently a neutrally charged ligand which coordinates M,
m is 1, 2 or 3 and
n is at least 1, and
wherein a molecular weight of the compound of formula (I) is up to 1000 g/mol.

2. The process according to claim 1 ,
wherein n is at least 2.

3. The process according to claim 1 ,
wherein X and n are selected to adjust the number of valence electrons of M to an even number.

4. The process according to claim 1 ,
wherein R 1 , R 2 , R 3 , and R 4 are each independently methyl or ethyl.

5. The process according to claim 1 ,
wherein at least one X is a trialkylphosphine.

6. The process according to claim 1 ,
wherein at least one X is CO.

7. The process according to claim 1 ,
wherein M is Co and at least one X is NO.

8. The process according to claim 1 ,
wherein at least one X is a neutrally charged ligand which coordinates M via at least two neutral nitrogen atoms.

9. The process according to claim 1 ,
wherein at least one X is a neutrally charged ligand which coordinates M via a phosphor atom.

10. The process according to claim 1 ,
wherein the compound of formula (I) is chemisorbed on a surface of the solid substrate.

11. The process according to claim 1 ,
wherein a deposited compound of formula (I) is decomposed by removal of all ligands L and X.

12. The process according to claim 11 ,
wherein the deposited compound of formula (I) is exposed to a reducing agent.

13. The process according to claim 11 ,
wherein a sequence of depositing the compound of formula (I) onto the solid substrate and decomposing the deposited compound of formula (I) is performed at least twice.

14. A process for forming a film, comprising:
forming the film with a compound of formula (I):

on a solid substrate,
wherein R 1 , R 2 , R 3 , and R 4 are each independently an alkyl group, an aryl group or a trialkylsilyl group,
M is Mn, Ni or Co,
each X is independently a neutrally charged ligand which coordinates M,
m is 1, 2 or 3 and
n is at least 1, and
wherein a molecular weight of the compound of formula (I) is up to 1000 g/mol.

Assignees

• Basf Se

Inventors

• Adermann Torben
• Loeffler Daniel
• Limburg Carolin
• Abels Falko
• Wilmer Hagen
• Gill Monica
• Griffiths Matthew
• Barry Sean

Classifications

• C23C16/45553 Primary

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/22

  characterised by the deposition of inorganic material, other than metallic material · CPC title

• C23C16/18 Primary

  from metallo-organic compounds · CPC title

• C07F15/06

  Cobalt compounds · CPC title