Laser apparatus

Patent metadata

Field	Value
Publication number	US-10797465-B2
Application number	US-201916266357-A
Country	US
Kind code	B2
Filing date	Feb 4, 2019
Priority date	Sep 30, 2016
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

A laser apparatus includes first and second wavelength dispersion elements, an optical element, first and second actuators, and a control unit. The first wavelength dispersion element generates wavelength dispersion in a direction orthogonal to an electric discharge direction between a pair of electric discharge electrodes. The second wavelength dispersion element generates wavelength dispersion in a direction parallel to the electric discharge direction. The optical element corrects wavelength dispersion generated by the second wavelength dispersion element. The first actuator drives the first wavelength dispersion element. The second actuator drives the optical element. The control unit controls the first actuator so that the center wavelength of the laser light approaches to a target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.

First claim

What is claimed is:

1. A laser apparatus that receives a signal representing a target wavelength from an external device and controls a center wavelength of laser light to be outputted, the laser apparatus comprising:
a laser chamber that includes a pair of electric discharge electrodes and an optical axis, the pair of electric discharge electrodes having an electric discharge direction;
a first wavelength dispersion element that generates wavelength dispersion in a direction that is substantially orthogonal to the electric discharge direction, the first wavelength dispersion element being positioned along an optical axis offset in an electric discharge direction from the optical axis of the laser chamber;
a second wavelength dispersion element that generates wavelength dispersion in a direction that is substantially parallel to the electric discharge direction between the electric discharge electrodes;
an optical element that corrects wavelength dispersion generated by the second wavelength dispersion element;
a first actuator that drives the first wavelength dispersion element;
a second actuator that drives the optical element; and
a control unit that controls the first actuator so that the center wavelength of the laser light approaches to the target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.

2. The laser apparatus according to claim 1 , wherein the optical element is a mirror.

3. The laser apparatus according to claim 1 , wherein the optical element is a prism.

4. The laser apparatus according to claim 1 , wherein the optical element is a grating.

5. The laser apparatus according to claim 1 , wherein the control unit performs the control of the first actuator after the control of the second actuator.

6. The laser apparatus according to claim 1 , further comprising:
a pointing monitor that detects pointing of outputted laser light and inputs a result of the detection into the control unit.

7. The laser apparatus according to claim 6 , wherein the control unit performs the control of the first actuator in parallel with the control of the second actuator.

8. A laser apparatus that receives a signal representing a target wavelength from an external device and controls a center wavelength of laser light to be outputted, the laser apparatus comprising:
a laser chamber that includes a pair of electric discharge electrodes and an optical axis, the pair of electric discharge electrodes having an electric discharge direction;
a first wavelength dispersion element that generates wavelength dispersion in a direction that is substantially orthogonal to the electric discharge direction, the first wavelength dispersion element being positioned along an optical axis offset in an electric discharge direction from the optical axis of the laser chamber;
a second wavelength dispersion element that generates wavelength dispersion in a direction that is substantially parallel to the electric discharge direction between the electric discharge electrodes;
a first actuator that drives the first wavelength dispersion element;
a second actuator that drives the second wavelength dispersion element; and
a control unit that controls the first actuator so that the center wavelength of the laser light approaches to the target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.

9. The laser apparatus according to claim 8 , wherein the control unit performs the control of the first actuator after the control of the second actuator.

10. The laser apparatus according to claim 8 , further comprising:
a pointing monitor that detects pointing of outputted laser light and inputs a result of the detection into the control unit.

11. The laser apparatus according to claim 10 , wherein the control unit performs the control of the first actuator in parallel with the control of the second actuator.

12. A laser apparatus that receives a signal representing a target wavelength from an external device and controls a center wavelength of laser light to be outputted, the laser apparatus comprising:
a laser chamber that includes a pair of electric discharge electrodes;
a first wavelength dispersion element that generates wavelength dispersion in a direction orthogonal to an electric discharge direction between the electric discharge electrodes;
a beam expander that includes a plurality of lenses, the plurality of lenses enlarging a beam diameter of laser light in a direction parallel to the electric discharge direction between the electric discharge electrodes, the laser light being emitted from the laser chamber and traveling in a direction away from the laser chamber;
a first actuator that drives the first wavelength dispersion element;
a second actuator that changes a distance among the lenses; and
a control unit that controls the first actuator so that the center wavelength of the laser light approaches to the target wavelength and controls the second actuator so as to correct wavelength dispersion generated by the beam expander.

13. The laser apparatus according to claim 12 , wherein the control unit performs the control of the first actuator after the control of the second actuator.

14. The laser apparatus according to claim 12 , wherein
the beam expander includes a spherical concave lens and a spherical convex lens, and
the second actuator changes a distance between the spherical concave lens and the spherical convex lens.

15. The laser apparatus according to claim 12 , wherein the lenses are made of calcium fluoride crystal.

16. The laser apparatus according to claim 12 , wherein light passing surfaces of the plurality of lenses are coated with a reflection reducing film.

17. The laser apparatus according to claim 12 , further comprising:
a pointing monitor that detects pointing of outputted laser light and inputs a result of the detection into the control unit.

18. The laser apparatus according to claim 17 , wherein the control unit performs the control of the first actuator in parallel with the control of the second actuator.

Assignees

• Gigaphoton Inc

Inventors

• Miyamoto Hirotaka
• Wakabayashi Osamu

Classifications

• H01S3/0812

  using a diffraction grating · CPC title

• H01S3/2256

  KrF, i.e. krypton fluoride is comprised for lasing around 248 nm · CPC title

• H01S3/2251

  ArF, i.e. argon fluoride is comprised for lasing around 193 nm · CPC title

• H01S3/137 Primary

  for stabilising of frequency · CPC title

• G01J3/0229

  using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters · CPC title