Micromirror device having a mechanical stop

Patent metadata

Field	Value
Publication number	US-10795149-B2
Application number	US-201815986973-A
Country	US
Kind code	B2
Filing date	May 23, 2018
Priority date	May 24, 2017
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

A micromirror device having a cap, a function layer, and a window layer, which are disposed on top of one another and parallel to a main extension plane, the function layer being situated between the cap and the window layer, and a micromirror is patterned out of the function layer. The micromirror device has a stop, which is designed to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane.

First claim

What is claimed is:

1. A micromirror device, comprising:
a cap;
a function layer; and
a window layer,
wherein the cap, the function layer and the window layer are situated on top of one another and parallel to a main extension plane, the function layer situated between the cap and the window layer, and a micromirror patterned out of the function layer;
wherein the micromirror device has a stop, which is configured to restrict a deflection of the micromirror in a direction perpendicular to the main extension plane,
wherein a window frame patterned into the window layer is situated above the stop, wherein the stop is configured to strike the window frame,
wherein the window layer includes a window which has a recess for creating a clearance between the window frame and the stop,
wherein the stop is developed in such a way that the window frame and the stop are disposed in an overlapping manner in the direction perpendicular to the main extension plane.

2. The micromirror device as recited in claim 1 , wherein the stop is situated on the cap and between the micromirror and the cap.

3. The micromirror device as recited in claim 2 , wherein the stop is disposed on the cap such that a mirror-pivot axis of the micromirror and the stop are situated in an overlapping manner in the direction perpendicular to the main extension plane.

4. The micromirror device as recited in claim 2 , wherein a recess is disposed in the micromirror on a rear side of the micromirror that lies opposite from the stop, in such a way that a stop edge of the stop is able to dip into the recess when the micromirror is rotated about the mirror-pivot axis.

5. The micromirror device as recited in claim 1 , wherein the stop is formed in the function layer and connects the micromirror to a suspension spring.

Assignees

• Bosch Gmbh Robert

Inventors

• Grutzeck Helmut
• Sudy Peter
• Finn Andreas
• Maier Daniel

Classifications

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B2203/0163

  Spring holders · CPC title

• B81B3/0051

  For defining the movement, i.e. structures that guide or limit the movement of an element (mechanical arrangements for preventing or damping vibration or shock H01H3/60) · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• G02B27/0006

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title