Acoustic wave sensors and methods of sensing a gas-phase analyte

Patent metadata

Field	Value
Publication number	US-10794866-B2
Application number	US-201916242395-A
Country	US
Kind code	B2
Filing date	Jan 8, 2019
Priority date	Jan 15, 2018
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

Acoustic wave sensors comprise: a piezoelectric layer, first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises: (a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polyamides; polypyrazoles; or novolacs; or a cured product thereof; (b) a polymer chosen from substituted or unsubstituted: polyamic acids; or polyamic acid-polyimide copolymers; (c) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or (d) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbomenes; or a cured product thereof. The acoustic wave sensors and methods of using such sensors find particular applicability in the sensing of gas-phase analytes.

First claim

What is claimed is:

1. An acoustic wave sensor, comprising:
a piezoelectric layer;
first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and
a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises:
(a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polypyrazoles; or novolacs; or a cured product thereof;
(b) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or
(c) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

2. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group, or a cured product thereof.

3. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted: polypyrazoles; or novolacs; or a cured product thereof.

4. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof.

5. The acoustic wave sensor of claim 1 , wherein the polymeric sensing layer comprises a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

6. The acoustic wave sensor of claim 1 , wherein the acoustic wave sensor is a quartz crystal microbalance sensor, a film bulk acoustic resonator, or a surface acoustic wave sensor.

7. A method of sensing a gas-phase analyte, comprising:
(a) providing an acoustic wave sensor according to any of claims 1 ;
(b) exposing the polymeric sensing layer to an atmosphere comprising a gas-phase analyte; and
(c) monitoring resonant frequency of the acoustic wave sensor in response to the presence of the gas-phase analyte on the polymeric sensing layer.

8. The method of claim 7 , further comprising, in sequence:
(d) exposing the sensor to a second atmosphere effective to reduce the content of the gas-phase analyte in the sensor;
(e) allowing the resonant frequency of the acoustic wave sensor to recover to a baseline frequency; and
(f) exposing the sensor to a third atmosphere comprising a gas-phase analyte;
wherein the step (d), (e), and (f) sequence is performed one or more times.

9. The method of claim 7 , wherein the gas-phase analyte is an organic material.

10. The method of claim 7 , wherein the gas-phase analyte is chosen from one or more of toluene, ethanol, formaldehyde, acetaldehyde, acetone, acetic acid, or a trialkylamine.

11. The method of claim 7 , wherein the gas-phase analyte is chosen from an alkyl thiol or hydrogen sulfide.

12. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group, or a cured product thereof.

13. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted: polypyrazoles; or novolacs;
or a cured product thereof.

14. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof.

15. The method of claim 7 , wherein the polymeric sensing layer comprises a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbornenes; or a cured product thereof.

16. The method of claim 7 , wherein the acoustic wave sensor is a quartz crystal microbalance sensor, a film bulk acoustic resonator, or a surface acoustic wave sensor.

Assignees

• Rohm & Haas Elect Mat
• Rohm & Haas Elect Materials Korea Ltd

Inventors

• Gilmore Christopher
• Rachford Aaron A
• Yoon Hee Jae
• Murphy Jaclyn
• Trefonas Iii Peter
• Wang Deyan

Classifications

• G01N33/0036

  specially adapted to detect a particular component (physical analysis of gaseous biological material G01N33/497) · CPC title

• C08L101/02

  characterised by the presence of specified groups {, e.g. terminal or pendant functional groups} · CPC title

• G01N29/036 Primary

  by measuring frequency or resonance of acoustic waves · CPC title

• C08L79/08

  Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors · CPC title

• C08L65/00

  Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain (C08L7/00 - C08L57/00, C08L61/00 take precedence); Compositions of derivatives of such polymers · CPC title