Pre-treated functionalized multi-walled carbon nanotube based methane sensor

Patent metadata

Field	Value
Publication number	US-10793964-B2
Application number	US-201615146718-A
Country	US
Kind code	B2
Filing date	May 4, 2016
Priority date	May 4, 2016
Publication date	Oct 6, 2020
Grant date	Oct 6, 2020

Abstract

A method of manufacturing a functionalized pre-treated carbon nanotube. Atomic Layer deposition is utilized to functionalize a pre-treated carbon nanotube. The functionalized pre-treated carbon nanotube may be used in a chemiresistor, including for methane detection.

First claim

What is claimed is:

1. A process for manufacturing a chemresistor comprising:
fabricating electrodes on a substrate;
depositing carbon nanotubes on the fabricated electrodes;
pre-treating the carbon nanotubes for 1-20 minutes with ozone and UV to induce surface defects; and
depositing by atomic layer deposition, a plurality of nanoparticles consisting of a metal oxide functionalizing agent on the surface defects.

2. The process of claim 1 , wherein depositing the carbon nanotubes comprises dissolving the carbon nanotubes in a solvent, depositing the solution on the fabricated electrodes, and removing the solvent.

3. The process of claim 1 , wherein atomic layer deposition is at a temperature between 175° C. and 220° C.

4. The process of claim 3 , wherein the temperature is 200° C. to 220° C.

5. The process of claim 4 , wherein the atomic layer deposition includes the step of exposing the carbon nanotubes to a first precursor comprising diethylzinc and a second precursor comprising water.

6. The process of claim 1 , wherein the deposited carbon nanotubes are multi-walled carbon nanotubes (MWCNT).

7. The process of claim 6 , wherein depositing the MWCNT further comprises drop depositing a solution of MWCNT and baking until the solvent is evaporated.

8. The process of claim 1 , further comprising selective functionalization.

9. The process for manufacturing a chemresistor of claim 1 , wherein the deposited metal is deposited to a thickness of 1-4 nm.

Assignees

• Uchicago Argonne Llc
• Univ California

Inventors

• Divan Ralu
• Humayun M Tanim
• Paprotny Igor
• Gundel Lara A

Classifications

• G01N33/0047 Primary

  Organic compounds · CPC title

• C01B2202/06

  Multi-walled nanotubes · CPC title

• G01N27/127

  comprising nanoparticles · CPC title

• C01B32/168

  After-treatment · CPC title

• C25D9/08 Primary

  by cathodic processes · CPC title