Piezoelectric thin film-stacked body, piezoelectric thin film substrate, piezoelectric thin film device, piezoelectric actuator, piezoelectric sensor, head assembly, head stack assembly, hard disk drive, printer head, and ink-jet printer device

Patent metadata

Field	Value
Publication number	US-10790434-B2
Application number	US-201715831630-A
Country	US
Kind code	B2
Filing date	Dec 5, 2017
Priority date	Dec 7, 2016
Publication date	Sep 29, 2020
Grant date	Sep 29, 2020

Abstract

A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first oxide layer stacked on the first electrode layer, a second oxide layer stacked on the first oxide layer, and a piezoelectric thin film stacked on the second oxide layer, the electrical resistivity of the first oxide layer is higher than the electrical resistivity of the second oxide layer, the first oxide layer includes K, Na, and Nb, and the piezoelectric thin film includes (K,Na)NbO 3 .

First claim

What is claimed is:

1. A piezoelectric thin film-stacked body, comprising:
a first electrode layer;
a first oxide layer stacked on the first electrode layer;
a second oxide layer stacked on the first oxide layer; and
a piezoelectric thin film stacked on the second oxide layer,
wherein an electrical resistivity of the first oxide layer is higher than an electrical resistivity of the second oxide layer,
the first oxide layer includes K, Na and Nb, and
the piezoelectric thin film includes (K,Na)NbO 3 .

2. The piezoelectric thin film-stacked body according to claim 1 ,
wherein an electrical resistivity of the piezoelectric thin film-stacked body is 1.0×10 11 to 1.0×10 14 Ωcm.

3. The piezoelectric thin film-stacked body according to claim 1 ,
wherein a ratio T 1 /T P of a thickness T 1 of the first oxide layer to a thickness T P of the piezoelectric thin film is 0.0010 to 0.0150.

4. A piezoelectric thin film substrate, including:
the piezoelectric thin film-stacked body according to claims 1 ; and
a substrate,
wherein the first electrode layer is located between the substrate and the first oxide layer.

5. A piezoelectric thin film device, including:
the piezoelectric thin film-stacked body according to claims 1 ; and
a second electrode layer,
wherein the first oxide layer, the second oxide layer, and the piezoelectric thin film are located between the first electrode layer and the second electrode layer.

6. A piezoelectric actuator, comprising:
the piezoelectric thin film device according to claim 5 .

7. A piezoelectric sensor, comprising:
the piezoelectric thin film device according to claim 5 .

8. A head assembly, comprising:
the piezoelectric actuator according to claim 6 .

9. A head stack assembly, comprising:
the head assembly according to claim 8 .

10. A hard disk drive, comprising:
the head stack assembly according to claim 9 .

11. A printer head, comprising:
the piezoelectric actuator according to claim 6 .

12. An ink-jet printer device, comprising:
the printer head according to claim 11 .

Assignees

• Tdk Corp

Inventors

• Sakuma Hitoshi
• Azuma Tomohisa
• Ishii Kenta

Classifications

• G11B21/10

  Track finding or aligning by moving the head {; Provisions for maintaining alignment of the head relative to the track during transducing operation, i.e. track following (characterised by the track access method G11B21/08)} · CPC title

• B41J2202/03

  Specific materials used · CPC title

• B41J2/14233 Primary

  of film type, deformed by bending and disposed on a diaphragm · CPC title

• G11B5/483

  Piezoelectric devices between head and arm, e.g. for fine adjustment · CPC title

• B41J2/14201

  Structure of print heads with piezoelectric elements · CPC title