Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2024234132-A1 · Jul 11, 2024 · US
US10787591B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10787591-B2 |
| Application number | US-201313833686-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2013 |
| Priority date | Apr 30, 2012 |
| Publication date | Sep 29, 2020 |
| Grant date | Sep 29, 2020 |
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Composites comprising at least one silicon-oxy-carbide (SOC) layer deposited onto a polymeric matrix substrate to enhance their thermo-oxidative stability are provided. The SOC layer is formed onto the polymeric matrix substrate by atmospheric plasma deposition to produce an thermo-oxidative barrier coating or an adhesion-promoting layer to enable the deposition of a variety of known (or future developed) metallic and/or ceramic materials as oxygen and/or thermal barriers.
Opening claim text (preview).
That which is claimed: 1. A composite, comprising: a substrate comprising a fiber reinforced polymeric matrix, and a barrier coating comprising a silicon-oxy-carbide (SOC) layer having a thickness from about 10 to about 400 nm, the SOC layer attached directly to at least one surface of the substrate, wherein the fibers comprise carbon or graphite fibers, and the polymeric matrix is selected from a polyimide, an epoxy, bismaleimide, and a cyanate ester. 2. The composite of claim 1 , wherein the SOC layer is formed by atmospheric plasma deposition. 3. The composite of claim 2 , wherein the SOC layer includes a carbon content ranging from about 3 weight % to about 50 weight percent, based on the total weight of the SOC layer. 4. The composite of claim 2 , wherein the SOC layer includes a silicon content ranging from about 3 weight % to about 50 weight percent, based on the total weight of the SOC layer. 5. The composite of claim 2 , wherein the SOC layer includes an oxygen content ranging from about 3 weight % to about 50 weight percent, based on the total weight of the SOC layer. 6. The composite of claim 2 , wherein the SOC layer reduces oxygen diffusion into the substrate. 7. The composite of claim 6 , wherein said composite comprises a thermo-oxidative stability (TOS) of less than about 5.0% weight loss relative to a composite comprising an identical substrate and being devoid of the SOC layer. 8. The composite of claim 6 , wherein said composite comprises a thermo-oxidative stability (TOS) of less than about 2.0% weight loss relative to a composite comprising an identical and being devoid of the SOC layer. 9. The composite of claim 2 , wherein the polymeric matrix comprises a polyimide matrix. 10. The composite of claim 1 , wherein the fibers comprise carbon fibers. 11. A method of forming the composite of claim 1 , comprising: depositing the barrier coating comprising the silicon-oxy-carbide (SOC) layer having a thickness from about 10 to about 900 nm onto the at least one surface of the substrate. 12. The method of claim 11 , wherein the depositing step comprises the deposition of the SOC layer via atmospheric plasma deposition (APDP). 13. The method of claim 12 , wherein the APDP comprises the use of a chemical precursor of the SOC layer comprising a silane, organosilane, or combination thereof. 14. The method of claim 12 , wherein the APDP comprises the use of a chemical precursor of the SOC layer comprising tetramethylcyclotetrasiloxane, octamethylcyclotetrasiloxane, or a combination thereof. 15. The method of claim 12 , wherein the SOC layer inhibits the diffusion of oxygen into the substrate. 16. The method of claim 15 , wherein said composite comprises a thermo-oxidative stability (TOS) of less than about 2.0% weight loss relative to a composite comprising the same substrate and being devoid of the SOC layer.
Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides · CPC title
using plasma jets · CPC title
passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD (C23C16/513 takes precedence; for flame or plasma spraying of coating material in the molten state C23C4/00) · CPC title
1 mil or less · CPC title
Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors · CPC title
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