Laser bars having trenches

Patent metadata

Field	Value
Publication number	US-10784653-B2
Application number	US-201716079678-A
Country	US
Kind code	B2
Filing date	Feb 23, 2017
Priority date	Feb 25, 2016
Publication date	Sep 22, 2020
Grant date	Sep 22, 2020

Abstract

A laser bar includes a semiconductor layer including a plurality of layers and includes an active zone, wherein the active zone is arranged in an x-y-plane, laser diodes each form a mode space in an x-direction between two end faces, the mode spaces of the laser diodes are arranged alongside one another in a y-direction, a trench is provided in the semiconductor layer between two mode spaces, the trenches extend in the x-direction, and the trenches extend from a top side of the semiconductor layer in a z-direction to a predefined depth in the direction of the active zone.

First claim

The invention claimed is:

1. A laser bar comprising a semiconductor layer comprising a plurality of layers and comprising an active zone, wherein the active zone is arranged in an x-y-plane, laser diodes each form a mode space in an x-direction between a first end face and a second end face, the mode spaces of the laser diodes are arranged alongside one another in a y-direction, a trench is provided in the semiconductor layer between two mode spaces, the trenches extend in the x-direction from the first end face to the second end face, the trenches extend from a top side of the semiconductor layer in a z-direction to a predefined depth in the direction of the active zone, a second laser diode is arranged between two of the trenches, a second mode space of the second laser diode extends in the x-direction between the first end face and the second end face, a second trench is provided between the two laser diodes arranged between the two trenches, the second trench extends along the x-direction from the first end face to the second end face, and the second trench comprises a smaller width in the y direction than the trench,
wherein the plurality of layers and the active zone of the first laser diode and the plurality of layers and the active zone of the second laser diode are identical.

2. The laser bar according to claim 1 , wherein the semiconductor layer is arranged on a substrate, wherein the trenches extend from a top side of the semiconductor layer in the z-direction right into the active zone, wherein the trenches stop within the semiconductor layer with a distance from the substrate.

3. The laser bar according to claim 1 , wherein the second trench comprises a smaller depth in the z-direction than the first trench.

4. The laser bar according to claim 1 , wherein the semiconductor layer is arranged on a substrate, wherein the second trench extends in the z-direction right into the active zone of the laser diodes, wherein the second trench stops within the semiconductor layer with a distance from the substrate.

5. The laser bar according to claim 1 , wherein absorbing material is arranged in at least one second trench, and the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode.

6. The laser bar according to claim 1 , wherein the semiconductor layer is arranged on a substrate, and the trenches and/or the second trench extend into the substrate.

7. The laser bar according to claim 1 , wherein the laser bar is mounted on a carrier, and the carrier is formed as a heat sink.

8. The laser bar according to claim 1 , wherein the laser bar is mounted on a carrier, wherein the carrier is formed as a heat sink, and the laser bar is mounted onto the carrier by the side in which the trenches are introduced.

9. The laser bar according to claim 1 , wherein the trenches comprise a width in the y-direction of 1 to 100 μm.

10. The laser bar according to claim 1 , wherein the second trench comprises a width in the y-direction of 1 to 100 μm.

11. The laser bar according to claim 1 , wherein absorbing material is arranged in the second trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, and the absorbing material is filled into the second trench.

12. The laser bar according to claim 1 , wherein absorbing material is arranged in the second trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, and the absorbing material has better thermal conductivity than the material of the semiconductor layer.

13. The laser bar according to claim 1 , wherein absorbing material is arranged in the second trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, and the absorbing material comprises a metal or consists of a metal.

14. The laser bar according to claim 1 , wherein absorbing material is arranged in the second trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, an insulation layer is formed between the absorbing material and the semiconductor layer at least in a section of the second trench, and/or an insulation layer is formed between the absorbing material and the semiconductor layer at least in a section of the trench.

15. The laser bar according to claim 1 , wherein absorbing material is arranged in the second trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, an insulation layer is formed between the absorbing material and the semiconductor layer at least in a section of the second trench, the second trench, the absorbing material and the insulation layer are led right under the active zone, the absorbing material is electrically conductive, the absorbing material of the second trench is connected to an electrical line, and the absorbing material constitutes an electrical through contact for the semiconductor layer under the active zone.

16. The laser bar according to claim 1 , wherein absorbing material is arranged in a trench, the absorbing material is configured to at least partly absorb an electromagnetic radiation generated by a laser diode, an insulation layer is formed between the absorbing material and the semiconductor layer at least in a section of the trench, the trench, the absorbing material and the insulating layer are led right under the active zone, the absorbing material of the trench is electrically conductive, the absorbing material of the trench is connected to an electrical line, and the absorbing material constitutes an electrical through contact for the semiconductor layer under the active zone.

17. A method of producing the laser bar according to claim 1 , the laser bar comprising a semiconductor layer comprising a plurality of layers and comprising an active zone, wherein the active zone is arranged in an x-y-plane, laser diodes each form a mode space in an x-direction between a first end face and a second end face two end faces, the mode spaces of the laser diodes are arranged alongside one another in a y-direction, a trench is provided in the semiconductor layer between two mode spaces, the trenches extend in the x-direction from the first end face to the second end face, the trenches extend from a top side of the semiconductor layer in a z-direction to a predefined depth in the direction of the active zone, a second laser diode is arranged between two of the trenches, a second mode space of the second laser diode extends in the x-direction between the first end face and the second end face, a second trench is provided between the two laser diodes arranged between the two trenches, the second trench extends along the x-direction from the first end face to the second end face, and the second trench comprises a smaller width in the y direction than the trench,
wherein the plurality of layers and the active zone of the first laser diode and the plurality of layers and the active zone of the second laser diode are identical, wherein first the semiconductor layer is deposited on the substrate, and then the trenches and the second trench are formed in the semiconductor layer.

Assignees

• Osram Oled Gmbh

Inventors

• Loeffler Andreas
• Vierheilig Clemens
• Gerhard Sven

Classifications

• H10W90/00

  Package configurations · CPC title

• H10H20/825

  containing nitrogen, e.g. GaN · CPC title

• H10H20/821

  of the light-emitting regions, e.g. non-planar junctions · CPC title

• H10H20/0137

  the light-emitting regions comprising nitride materials · CPC title

• H10H20/82

  Roughened surfaces, e.g. at the interface between epitaxial layers · CPC title