Trenches for increasing a quantity of reliable chips produced from a wafer

Patent metadata

Field	Value
Publication number	US-10784354-B2
Application number	US-201815923801-A
Country	US
Kind code	B2
Filing date	Mar 16, 2018
Priority date	Mar 16, 2018
Publication date	Sep 22, 2020
Grant date	Sep 22, 2020

Abstract

A light-emitting device may comprise a set of layers comprising a substrate layer, and a set of epitaxial layers deposited on the substrate layer. The set of epitaxial layers may include a strained layer. The strained layer may include a set of active zones to be used to generate optical gain. The light-emitting device may comprise a set of trenches etched into a subset of the set of layers of the light-emitting device. The set of trenches may prevent a set of defects or dislocations in a wafer from which the light-emitting device was formed from propagating into the set of active zones.

First claim

What is claimed is:

1. A wafer, comprising:
a substrate layer;
a set of epitaxial layers deposited on the substrate layer,
the set of epitaxial layers including a strained layer,
the strained layer including one or more active zones; and

one or more trenches between one or more defects or dislocations in the wafer and the one or more active zones,
wherein the one or more trenches extend through at least the strained layer and have a depth between one micron and six microns,
wherein at least one of the one or more trenches does not extend through the one or more active zones, and
wherein the one or more trenches are to prevent propagation of the one or more defects or dislocations into the one or more active zones.

2. The wafer of claim 1 , wherein the one or more trenches are etched into one or more layers on which the strained layer is deposited.

3. The wafer of claim 1 , wherein the one or more trenches are etched into the substrate layer.

4. The wafer of claim 1 , wherein the one or more trenches surround the one or more active zones.

5. The wafer of claim 1 , wherein the one or more trenches are not closed shapes.

6. The wafer of claim 1 , wherein a subset of the one or more trenches are contained on a die associated with the wafer, or are surrounding the die associated with the wafer.

7. The wafer of claim 1 , wherein a subset of the one or more trenches are not contained on a die associated with the wafer or do not surround the die associated with the wafer.

8. The wafer of claim 1 , wherein the one or more trenches isolate the one or more defects or dislocations to one or more portions of the wafer.

9. The wafer of claim 1 , wherein the one or more trenches extend in one or more directions that are different than one or more crystallographic directions of the wafer.

10. A method, comprising:
providing a wafer,
wherein the wafer comprises:
a substrate layer, and
a set of epitaxial layers deposited on the substrate layer,
wherein the set of epitaxial layers includes a strained layer,
wherein the strained layer includes a set of active zones to be used to generate optical gain;

identifying a presence or a location of a set of defects or dislocations in the wafer; and
etching a set of trenches through at least the strained layer,
wherein at least one trench of the set of trenches does not extend through the set of active zones,
wherein the set of trenches have a depth between one micron and six microns, and
wherein the set of trenches is etched between the set of defects or dislocations and the set of active zones based on the presence or the location of the set of defects or dislocations.

11. The method of claim 10 , further comprising:
identifying a set of locations at which to etch the set of trenches,
wherein the set of locations is a threshold distance from the set of defects or dislocations; and

wherein etching the set of trenches comprises:
etching the set of trenches after identifying the set of locations at which to etch the set of trenches.

12. The method of claim 10 , further comprising:
determining to etch the set of trenches around the set of active zones based on the presence or the location of the set of defects or dislocations; and
wherein etching the set of trenches comprises:
etching the set of trenches after determining to etch the set of trenches around the set of active zones.

13. The method of claim 10 , further comprising:
determining to etch the set of trenches to isolate the set of defects or dislocations based on the presence or the location of the set of defects or dislocations; and
wherein etching the set of trenches comprises:
etching the set of trenches after determining to etch the set of trenches to isolate the set of defects or dislocations.

14. The method of claim 10 , wherein etching the set of trenches comprises:
etching the set of trenches in a direction that is different than a crystallographic direction of the wafer.

15. The method of claim 10 , wherein etching the set of trenches comprises:
etching the set of trenches into the substrate layer.

16. A light-emitting device, comprising:
a set of layers comprising:
a substrate layer, and
a set of epitaxial layers deposited on the substrate layer,
wherein the set of epitaxial layers includes a strained layer;
wherein the strained layer includes a set of active zones to be used to generate optical gain; and

a set of trenches etched into a subset of the set of layers of the light-emitting device,
wherein at least one trench of the set of trenches does not extend through the set of active zones,
wherein the set of trenches have a depth between one micron and six microns, and
wherein the set of trenches is to prevent a set of defects or dislocations in a wafer from which the light-emitting device was formed from propagating into the set of active zones.

17. The light-emitting device of claim 16 , wherein the set of trenches extends in a set of directions that does not follow crystallographic directions of the light-emitting device.

18. The light-emitting device of claim 16 , wherein a subset of trenches extends around a subset of active zones.

19. The light-emitting device of claim 16 , wherein a subset of trenches isolates the set of defects or dislocations.

20. The light-emitting device of claim 16 , wherein a subset of trenches extends through the strained layer, or into the substrate layer.

Assignees

• Lumentum Operations Llc

Inventors

• Fily Arnaud
• Rossin Victor
• Venables David
• Wang Jingcong

Classifications

• H10P74/235

  comprising optical enhancement of defects or not-directly-visible states · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10W10/011

  of isolation regions comprising dielectric materials · CPC title

• H10W10/10

  Isolation regions comprising dielectric materials · CPC title