Substrate processing method and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10784126-B2
Application number	US-201816048437-A
Country	US
Kind code	B2
Filing date	Jul 30, 2018
Priority date	Aug 31, 2017
Publication date	Sep 22, 2020
Grant date	Sep 22, 2020

Abstract

A substrate processing method includes a substrate holding step of holding a substrate horizontally, a hydrophobic agent supplying step of supplying to an upper surface of the substrate a hydrophobic agent which is a liquid for hydrophobizing the upper surface of the substrate, a low surface-tension liquid supplying step of supplying the low surface-tension liquid to the upper surface of the substrate in order to replace the hydrophobic agent on the substrate by a low surface-tension liquid lower in surface tension than water, and a humidity adjusting step of adjusting humidity of the atmosphere in contact with a liquid film on the substrate such that the humidity of the atmosphere in contact with a liquid film on the substrate in the hydrophobic agent supplying step reaches a first humidity and the humidity of the atmosphere in contact with a liquid film on the substrate in the low surface-tension liquid supplying step reaches a second humidity which is humidity lower than the first humidity.

First claim

What is claimed is:

1. A substrate processing method comprising:
a substrate holding step of holding a substrate horizontally;
a hydrophobic agent supplying step of supplying to an upper surface of the substrate a hydrophobic agent which is a liquid for hydrophobizing the upper surface of the substrate;
a low surface-tension liquid supplying step of supplying a low surface-tension liquid lower in surface tension than water to the upper surface of the substrate in order to replace the hydrophobic agent on the substrate by the low surface-tension liquid;
a humidity adjusting step of adjusting humidity of the atmosphere in contact with a liquid film on the substrate such that the humidity of the atmosphere in contact with the liquid film on the substrate in the hydrophobic agent supplying step reaches a first humidity and the humidity of the atmosphere in contact with the liquid film on the substrate in the low surface-tension liquid supplying step reaches a second humidity which is a humidity lower than the first humidity; and
an organic solvent supplying step of supplying an organic solvent which is miscible with water and the hydrophobic agent to the upper surface of the substrate before the hydrophobic agent supplying step,
wherein the humidity adjusting step includes a step of adjusting the humidity of the atmosphere in contact with the liquid film on the substrate such that the humidity of the atmosphere in contact with the liquid film on the substrate in the organic solvent supplying step reaches a third humidity which is humidity lower than the first humidity.

2. The substrate processing method according to claim 1 , further comprising: a gas supplying step of supplying a gas toward a space between a facing surface, which faces the upper surface of the substrate, of a facing member and the upper surface of the substrate;
wherein the humidity adjusting step includes a step of adjusting humidity inside the space such that the humidity of the space in the hydrophobic agent supplying step reaches the first humidity and the humidity of the space in the low surface-tension liquid supplying step reaches the second humidity during execution of the gas supplying step.

3. The substrate processing method according to claim 1 , further comprising: an evacuating step of evacuating the atmosphere that is in contact with the liquid film on the substrate;
wherein the humidity adjusting step includes a step in which an evacuation flow rate of the atmosphere which is evacuated in the evacuating step is adjusted, thereby adjusting the humidity of the atmosphere in contact with the liquid film on the substrate.

4. The substrate processing method according to claim 1 , further comprising:
a substrate rotating step of rotating the substrate around a vertical rotation axis which passes through a central portion of the substrate, and
a substrate drying step in which the substrate is rotated to remove the low surface-tension liquid on the substrate, thereby drying the substrate.

5. The substrate processing method according to claim 1 , wherein the third humidity is the same as the second humidity.

6. The substrate processing method according to claim 2 , wherein the humidity adjusting step includes a step in which a distance between the facing surface and the upper surface of the substrate is changed from a first distance which is a distance between the facing surface and the upper surface of the substrate in the hydrophobic agent supplying step to a second distance which is smaller than the first distance, thereby changing the humidity inside the space from the first humidity to the second humidity.

7. The substrate processing method according to claim 2 , wherein the humidity adjusting step includes a step in which, while a distance between the facing surface and the upper surface of the substrate is kept constant, a supply flow rate of the gas is adjusted, thereby adjusting the humidity inside the space.

8. The substrate processing method according to claim 6 , wherein the step in which the humidity inside the space is changed from the first humidity to the second humidity includes a step in which, during execution of the low surface-tension liquid supplying step, a distance between the facing surface and the upper surface of the substrate is changed from the first distance to the second distance.

9. The substrate processing method according to claim 6 , wherein the humidity adjusting step includes a step in which a supply flow rate of the gas is adjusted, thereby adjusting the humidity inside the space.

10. A substrate processing method comprising:
a substrate holding step of holding a substrate horizontally;
a hydrophobic agent supplying step of supplying to an upper surface of the substrate a hydrophobic agent which is a liquid for hydrophobizing the upper surface of the substrate;
a low surface-tension liquid supplying step of supplying a low surface-tension liquid lower in surface tension than water to the upper surface of the substrate in order to replace the hydrophobic agent on the substrate by the low surface-tension liquid;
a humidity adjusting step of adjusting humidity of the atmosphere in contact with a liquid film on the substrate such that the humidity of the atmosphere in contact with the liquid film on the substrate in the hydrophobic agent supplying step reaches a first humidity and the humidity of the atmosphere in contact with the liquid film on the substrate in the low surface-tension liquid supplying step reaches a second humidity which is humidity lower than the first humidity; and
a gas supplying step of supplying a gas toward a space between a facing surface, which faces the upper surface of the substrate, of a facing member and the upper surface of the substrate,
wherein the humidity adjusting step includes a step of adjusting humidity inside the space such that the humidity of the space in the hydrophobic agent supplying step reaches the first humidity and the humidity of the space in the low surface-tension liquid supplying step reaches the second humidity during execution of the gas supplying step, and
the humidity adjusting step includes a step in which a distance between the facing surface and the upper surface of the substrate is changed from a first distance which is a distance between the facing surface and the upper surface of the substrate in the hydrophobic agent supplying step to a second distance which is smaller than the first distance, thereby changing the humidity inside the space from the first humidity to the second humidity.

11. A substrate processing method comprising:
a substrate holding step of holding a substrate horizontally;
a hydrophobic agent supplying step of supplying to an upper surface of the substrate a hydrophobic agent which is a liquid for hydrophobizing the upper surface of the substrate;
a low surface-tension liquid supplying step of supplying a low surface-tension liquid lower in surface tension than water to the upper surface of the substrate in order to replace the hydrophobic agent on the substrate by the low surface-tension liquid;
a humidity adjusting step of adjusting humidity of the atmosphere in contact with a liquid film on the substrate such that the humidity of the atmosphere in contact with the liquid film on the substrate in the hydrophobic agent supplying step reaches a first humidity and the humidity of the atmosphere in contact with the liquid film on the substrate in the low surface-tension liquid supplying step reaches a second humidity which is humidity lower than the first humidity; and
a gas supplying step of supplying a gas toward a space between a facing surface, which faces the upper surface of the substrate, of a

Assignees

• Screen Holdings Co Ltd

Inventors

• Hinode Taiki
• Fujii Sadamu

Classifications

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10P70/20 Primary

  Cleaning during device manufacture · CPC title

• H10P72/0408 Primary

  for drying · CPC title