System and tool for cleaning a glass surface of an accelerator column

Patent metadata

Field	Value
Publication number	US-10780459-B2
Application number	US-201715489133-A
Country	US
Kind code	B2
Filing date	Apr 17, 2017
Priority date	Apr 17, 2017
Publication date	Sep 22, 2020
Grant date	Sep 22, 2020

Abstract

A cleaning tool for cleaning a glass surface of an accelerator column is disclosed. The cleaning tool includes a shaft including a first end and a second end; a foam body located at the first end of the shaft; and a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body. An outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column.

First claim

What is claimed is:

1. A cleaning tool for cleaning a glass surface of an accelerator column, the cleaning tool comprising:
a shaft including a first end and a second end;
a foam body located at the first end of the shaft; and
a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body;
wherein an outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column;
wherein the textured cleaning surface includes a plurality of curved serrations extending along a curvature of the textured cleaning surface for contacting a plurality of grooves formed in the glass surface, the serrations having a length measured along the curvature of the textured cleaning surface and a width measured in a direction parallel to the shaft, wherein the length is greater than the width.

2. The cleaning tool of claim 1 , wherein the foam body includes a body portion having first and second segments, the second segment interconnecting the textured cleaning surface to the first segment, the second segment being angled with respect to the first segment.

3. The cleaning tool of claim 2 , wherein the body portion has a shape mimicking a space between adjacent electrodes in the accelerator column.

4. The cleaning tool of claim 1 , wherein the foam body is made from a polyethylene foam and the textured cleaning surface is made from a polyurethane foam, the textured cleaning surface being adhered to the foam body via an adhesive.

5. The cleaning tool of claim 1 , wherein the mounting bracket includes a first bracket and a mounting plate for coupling the foam body therebetween.

6. The cleaning tool of claim 5 , wherein the first bracket includes a first leg and a second leg, the second leg being positioned approximately perpendicular to the first leg, the second leg be coupled to the first end of the shaft.

7. The cleaning tool of claim 6 , wherein each of the first leg of the first bracket, the mounting plate, and the foam body include a plurality of holes for receiving one or more fasteners for coupling the foam body to the mounting bracket.

8. A system comprising:
an accelerator column including:
a glass surface;
a plurality of electrodes extending from the glass surface; and
a plurality of electrode inserts, wherein one of the electrode inserts of the plurality of electrode inserts is electrically and mechanically coupled to one of the electrodes of the plurality of electrodes, respectively, the plurality of electrode inserts being reversibly attachable to the plurality of electrodes, respectively; and
a cleaning tool for cleaning the glass surface of the accelerator column when the electrode inserts are removed from the accelerator column, the cleaning tool including:
a shaft including a first end and a second end;
a foam body located at the first end of the shaft; and
a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body;
wherein an outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column;
wherein the textured cleaning surface includes a plurality of curved serrations extending along a curvature of the textured cleaning surface for contacting a plurality of grooves formed in the glass surface.

9. The system of claim 8 , wherein the foam body of the cleaning tool includes a body portion having first and second segments, the second segment interconnecting the textured cleaning surface to the first segment, the second segment being angled with respect to the first segment.

10. The system of claim 8 , wherein the mounting bracket of the cleaning tool includes a first bracket and a mounting plate for coupling the foam body therebetween, the first bracket includes a first leg and a second leg, the second leg being positioned approximately perpendicular to the first leg, the second leg being coupled to the first end of the shaft.

11. The system of claim 10 , wherein each of the first leg of the first bracket, the mounting plate, and the foam body include a plurality of holes for receiving one or more fasteners for coupling the foam body to the mounting bracket.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Blanchard Michael J
• Clay Nevin H
• Conahan Joshua R
• Lupoli Christopher

Classifications

• H01J37/3171 Primary

  for ion implantation · CPC title

• B08B1/165

  Scrapers · CPC title

• B08B1/32

  using rotary cleaning members · CPC title

• H01J2237/022

  Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube · CPC title

• B08B5/04

  Cleaning by suction, with or without auxiliary action · CPC title