Mounting system that maintains stability of optics as temperature changes

Patent metadata

Field	Value
Publication number	US-10779914-B2
Application number	US-201816052481-A
Country	US
Kind code	B2
Filing date	Aug 1, 2018
Priority date	Jun 26, 2014
Publication date	Sep 22, 2020
Grant date	Sep 22, 2020

Abstract

An optical system comprises a detector to determine one or more intensities of light impinging on one or more locations of the detector and an optical element to direct light towards the detector along a detection axis. The detector and optical element are coupled together by three or more substantially flat flexures respectively defining three or more flexure planes parallel to the detection axis. The three or more substantially flat flexures maintain an alignment of the optical element to the detector with changes in temperature.

First claim

What is claimed is:

1. A scanner comprising:
a base;
a detector mounted to the base;
an optical element to redirect light reflected off of a target towards the detector along a detection axis in a first direction; and
three or more flexures that couple the optical element to the base, wherein thermal expansion or contraction of the optical element with respect to at least one of the detector or the base bends each flexure of the three or more flexures in a respective second direction without bending the flexure in a respective third direction approximately perpendicular to the first direction and the respective second direction, wherein the three or more flexures maintain an alignment of the optical element to the detector with changes in temperature.

2. The scanner of claim 1 , wherein the optical element is a beam splitter.

3. The scanner of claim 1 , further comprising:
a light source to generate the light.

4. The scanner of claim 3 , further comprising:
a microlens array to split the light into an array of light beams;
wherein the optical element is to transmit the array of light beams towards the target and redirect a reflected array of light beams from the target towards the detector along the detection axis in the first direction; and
wherein the detector comprises one or more sensors, wherein each sensor of the one or more sensors is to determine an intensity of light impinging on the sensor.

5. The scanner of claim 4 , wherein the three or more flexures further maintain an alignment of the microlens array to the detector with changes in temperature.

6. The scanner of claim 1 , wherein the optical element has a first coefficient of thermal expansion that is different from a second coefficient of thermal expansion of at least one of the detector or the base.

7. The scanner of claim 1 , wherein each flexure has a height in the first direction, a thickness in the respective second direction, and a width in the respective third direction, wherein the thickness is less than one-tenth the height and the width.

8. The scanner of claim 1 , wherein the three or more flexures maintain an alignment of the optical element to the detector to a sub-micron level of accuracy and stability.

9. The scanner of claim 1 , wherein the base comprises a printed circuit board (PCB) having a first coefficient of thermal expansion that is approximately equal to a second coefficient of thermal expansion of the detector, the optical element comprises an optical beam-splitting element in a housing, and the three or more flexures attach the PCB to the housing.

10. The scanner of claim 9 , wherein the housing comprises metal.

11. The scanner of claim 1 , wherein the base has a substantially flat surface defining a base plane, the three or more flexures respectively define three or more flexure planes approximately perpendicular to the base plane, the three or more flexure planes respectively defining three or more flexure lines perpendicular to the flexure planes, wherein each of the three or more flexures is flexible along a respective flexure line of the three or more flexure lines and is rigid perpendicular to the respective flexure line, wherein the three or more flexure lines meet at an intersection point, and wherein the intersection point is maintained with the changes in temperature.

12. The scanner of claim 1 , wherein the three or more flexures comprise a first flexure defining a first flexure line, a second flexure defining a second flexure line collinear with the first flexure line, a third flexure defining a third flexure line perpendicular to the first flexure line, and a fourth flexure defining a four flexure line collinear with the third flexure line.

13. The scanner of claim 1 , wherein the three or more flexures comprise beryllium copper.

14. The scanner of claim 1 , wherein the three or more flexures surround, but do not contact, the detector.

15. A method of mounting an optical element, comprising:
attaching three or more flexures to a base having a substantially flat surface defining a base plane, wherein the three or more flexures are mounted to the base such that:
the three or more flexures protrude from the base;
the three or more flexures are to surround a detector attached to the base; and
the three or more flexures are attached to the base such that the three or more flexures respectively define three or more flexure planes approximately perpendicular to the base plane, the three or more flexure planes respectively defining three or more flexure lines perpendicular to the flexure planes, wherein each of the three or more flexures is flexible along a respective flexure line of the three or more flexure lines and is rigid perpendicular to the respective flexure line, wherein the three or more flexure lines meet at an intersection point;

aligning the optical element with the detector such that a center of the optical element aligns with a center of the detector; and
attaching the three or more flexures to the optical element while the optical element is aligned with the detector, wherein the intersection point is maintained with changes in temperature.

16. The method of claim 15 , wherein attaching the three or more flexures to the base comprises welding or soldering the three or more flexures to the base.

17. The method of claim 15 , wherein the optical element is housed within a housing, and wherein attaching the three or more flexures to the optical element comprises gluing the three or more flexures to the housing.

18. The method of claim 17 , wherein the housing comprises three or more substantially flat attachment faces that respectively define three or more face planes, wherein each of the three or more face planes is parallel to one of the three or more flexure planes, and wherein gluing the three or more flexures to the housing comprises applying glue to each of the three or more substantially flat attachment faces.

19. The method of claim 15 , further comprising:
mounting the detector to the base after attaching the three or more flexures to the base, wherein the three or more flexures do not contact the detector.

20. The method of claim 15 , wherein the optical element, the base, the three or more flexures and the detector are components of a scanner.

Assignees

• Align Technology Inc

Inventors

• Boltanski Rami

Classifications

• A61B1/00172 Primary

  with means for scanning · CPC title

• A61B1/00186

  with imaging filters · CPC title

• A61B5/0088

  for oral or dental tissue · CPC title

• G02B7/003

  Alignment of optical elements (G02B7/001, G02B7/002 take precedence; for mirrors G02B7/1822) · CPC title

• H05K2201/10151

  Sensor · CPC title