Bulk acoustic wave resonator with a modified outside stack portion

Patent metadata

Field	Value
Publication number	US-10778180-B2
Application number	US-201615375846-A
Country	US
Kind code	B2
Filing date	Dec 12, 2016
Priority date	Dec 10, 2015
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

Bulk Acoustic Wave (BAW) resonators that include a modified outside stack portion and methods for fabricating such BAW resonators are provided. One BAW resonator includes a reflector, a bottom electrode, a piezoelectric layer, and a top electrode. An active region is formed where the top electrode overlaps the bottom electrode and an outside region surrounds the active region. The piezoelectric layer includes a top surface adjacent to the top electrode and a bottom surface adjacent to the bottom electrode. The piezoelectric layer further includes an outside piezoelectric portion in the outside region with a bottom surface in the outside region that is an extension of the bottom surface of the piezoelectric layer, and the outside piezoelectric portion includes an angled sidewall that resides in the outside region and extends from the top surface of the piezoelectric layer to the bottom surface of the outside piezoelectric portion in the outside region.

First claim

What is claimed is:

1. A Bulk Acoustic Wave (BAW) resonator, comprising:
a reflector;
a bottom electrode over the reflector;
a piezoelectric layer over the bottom electrode; and
a top electrode over the piezoelectric layer, wherein:
an active region is formed where the top electrode overlaps the bottom electrode,
an outside region surrounds the active region,
the piezoelectric layer includes a top surface adjacent to the top electrode and a bottom surface adjacent to the bottom electrode,
the piezoelectric layer comprises an outside piezoelectric portion in the outside region with a bottom surface in the outside region that is a horizontal extension of the bottom surface of the piezoelectric layer in the active region, and
the outside piezoelectric portion comprises an angled sidewall that resides in the outside region and extends from the top surface of the piezoelectric layer to the bottom surface of the outside piezoelectric portion in the outside region.

2. The BAW resonator of claim 1 wherein the angled sidewall forms an acute angle with respect to the bottom surface of the outside piezoelectric portion.

3. The BAW resonator of claim 1 wherein the angled sidewall begins at a point on the top surface of the piezoelectric layer at a boundary between the active region and the outside region.

4. The BAW resonator of claim 3 wherein the angled sidewall forms an acute angle with respect to the bottom surface of the outside piezoelectric portion.

5. The BAW resonator of claim 4 wherein the acute angle is between 45 degrees and 80 degrees.

6. The BAW resonator of claim 5 wherein the acute angle is between 60 degrees and 70 degrees.

7. The BAW resonator of claim 1 wherein:
the bottom electrode comprises an outside bottom electrode (OBE) portion that extends into the outside region;
the outside piezoelectric portion is formed on the OBE portion; and
the OBE portion extends into the outside region.

8. The BAW resonator of claim 7 wherein the OBE portion extends into the outside region past the outside piezoelectric portion.

9. The BAW resonator of claim 1 further comprising an outside (OS) layer in the outside region that is laterally adjacent to the bottom electrode, wherein the outside piezoelectric portion resides on the OS layer.

10. The BAW resonator of claim 9 wherein the OS layer extends into the outside region past the outside piezoelectric portion.

11. The BAW resonator of claim 9 wherein the OS layer and the outside piezoelectric portion extend a same lateral distance into the outside region.

12. The BAW resonator of claim 11 wherein:
a top layer of the reflector comprises an outside top reflector layer (RL) portion that resides in the outside region;
the OS layer resides on the outside top RL portion; and
the outside top RL portion and the OS layer extend the same lateral distance into the outside region.

13. The BAW resonator of claim 12 wherein the outside top RL portion and the OS layer comprise a same material.

14. The BAW resonator of claim 13 wherein:
a RL below the top layer of the reflector comprises an outside RL portion that resides below the outside top RL portion in the outside region; and
the outside RL portion comprises a different material than the outside top RL portion.

15. A method for fabricating a Bulk Acoustic Wave (BAW) resonator, comprising:
providing a reflector;
forming a bottom electrode over the reflector;
forming a piezoelectric layer over the bottom electrode; and
forming a top electrode over the piezoelectric layer, wherein:
an active region is formed where the top electrode and the bottom electrode overlap,
an outside region surrounds the active region,
the piezoelectric layer includes a top surface adjacent to the top electrode and a bottom surface adjacent to the bottom electrode, and
an outside piezoelectric portion of the piezoelectric layer with a bottom surface in the outside region that is a horizontal extension of the bottom surface of the piezoelectric layer is provided in the outside region in the active region; and
a portion of the outside piezoelectric portion is removed such that an angled sidewall resides in the outside region that extends from the top surface of the piezoelectric layer to the bottom surface of the outside piezoelectric portion in the outside region.

16. The method of claim 15 wherein the angled sidewall forms an acute angle with respect to the bottom surface of the outside piezoelectric portion.

17. The method of claim 15 wherein the angled sidewall begins at a point on the top surface of the piezoelectric layer at a boundary between the active region and the outside region.

18. The method of claim 15 wherein the portion of the outside piezoelectric portion is removed such that the angled sidewall forms an acute angle between 45 degrees and 80 degrees with respect to the bottom surface of the outside piezoelectric portion.

19. The method of claim 15 wherein the portion of the outside piezoelectric portion is removed such that the angled sidewall forms an acute angle between 60 degrees and 70 degrees with respect to the bottom surface of the outside piezoelectric portion.

20. The method of claim 15 wherein:
an outside bottom electrode (OBE) portion that is an extension of the bottom electrode is provided in the outside region;
the outside piezoelectric portion is provided on the OBE portion; and
the portion of the outside piezoelectric portion is removed such that the OBE portion extends into the outside region.

21. The method of claim 20 wherein the OBE portion extends into the outside region past the outside piezoelectric portion.

22. The method of claim 15 further comprising forming an outside (OS) layer that is laterally adjacent to the bottom electrode in the outside region.

23. The method of claim 22 wherein the portion of the outside piezoelectric portion is removed such that the OS layer extends into the outside region past the outside piezoelectric portion.

24. The method of claim 22 wherein the portion of the outside piezoelectric portion is removed such that the OS layer extends a same lateral distance into the outside region as the outside piezoelectric portion.

25. The method of claim 24 wherein:
an outside top reflector layer (RL) portion that resides in the outside region under the OS layer is provided; and
a portion of the outside top RL portion is removed such that the outside top RL portion extends the same lateral distance into the outside region as the OS layer.

26. The method of claim 25 wherein the outside top RL portion and the OS layer comprise a same material.

27. The method of claim 26 wherein:
a RL below the top layer of the reflector comprises an outside RL portion that resides below the outside top RL portion in the outside region; and
the outside RL portion comprises a different material than the outside top RL portion.

Assignees

• Qorvo Us Inc

Inventors

• Tajic Alireza
• Stokes Paul
• Rothemund Ralph
• Fattinger Gernot

Classifications

• B06B1/0685

  on the back only of piezoelectric elements · CPC title

• H03H9/02015 Primary

  Characteristics of piezoelectric layers, e.g. cutting angles · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title

• H03H2003/025

  the resonators or networks comprising an acoustic mirror · CPC title

• H03H9/175

  Acoustic mirrors · CPC title