Method for forming a battery element, a battery element and a battery

Patent metadata

Field	Value
Publication number	US-10777839-B2
Application number	US-201414229409-A
Country	US
Kind code	B2
Filing date	Mar 28, 2014
Priority date	Mar 28, 2014
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

A method for forming a battery element includes etching trenches into a substrate and crystal orientation dependent etching of the trenches. Further, the method includes forming solid state battery structures within the trenches.

First claim

What is claimed is:

1. A method for forming a battery element, the method comprising:
etching trenches into a substrate;
performing a crystal orientation dependent etching of the trenches to adapt a geometry of the trenches caused by the previous etching such that the trenches comprise a substantially rectangular lateral shape or a substantially quadratic lateral shape; [[and]] forming solid state battery structures within the trenches defining a plurality of cavities;
and covering the plurality of cavities with a current collector layer.

2. The method of claim 1 , wherein the crystal orientation dependent etching comprises a wet chemical etch process.

3. The method of claim 1 , wherein the crystal orientation dependent etching comprises etching with Potassium hydroxide or ammonium hydroxide.

4. The method of claim 1 , wherein etching the trenches into the substrate comprises performing a dry chemical etch process.

5. The method of claim 1 , wherein the trenches are distributed over the substrate according to a hexagonal pattern or a quadratic pattern.

6. The method of claim 1 , wherein forming the solid state battery structures within the trenches comprises forming a solid state electrolyte layer between a first electrode layer and a second electrode layer.

7. The method of claim 6 , wherein the solid state electrolyte layer comprises lithium phosphorus oxynitride.

8. The method of claim 6 , wherein the first electrode layer comprises an anode layer comprising carbon or silicon.

9. The method of claim 6 , wherein the second electrode layer comprises a cathode layer comprising lithium cobalt oxide and a collector layer comprising titan nitride.

10. The method of claim 1 , wherein the trenches extend into the substrate to a depth greater than 500 μm.

11. The method of claim 1 , wherein the trenches comprise an aspect ratio larger than 10 .

12. The method of claim 1 , wherein the trenches comprise a maximal width of less than 300 μm.

13. The method of claim 1 , wherein adjacent trenches of the plurality of trenches are spaced by a distance between 2 μm and 300 nm.

14. The method of claim 1 , wherein the trenches comprise a maximal depth larger than a maximal lateral dimension.

15. The method of claim 1 , wherein the substrate is a substantially complete wafer.

16. A battery element comprising a substrate with a plurality of trenches having parallel side walls extending from a surface of the substrate into the substrate, wherein at least a part of each trench of the plurality of trenches is filled with a solid state battery structure such that a collector layer disposed within the trenches contacts all of the walls of the trenches and such that a cavity separates a part of an anode layer located at a side wall of a trench from another part of the anode layer located at an opposite side wall of the trench, and wherein the cavity is covered by a current collector layer.

17. The battery element of claim 16 , further comprising a first battery element electrode electrically connected to a first electrode of the solid state battery structures within the plurality of trenches and a second battery element electrode electrically connected to a second electrode of the solid state battery structures within the plurality of trenches.

18. The battery element of claim 16 , wherein the substrate is at least more than half of a wafer.

19. A battery comprising at least three wafers arranged in a stacked manner, wherein each wafer comprises battery structures arranged within a plurality of trenches reaching into each respective wafer such that the plurality of trenches include parallel side walls defining a plurality of cavities and wherein each wafer comprises a current collector layer covering the plurality of cavities.

20. The battery according to claim 19 , wherein the battery structures are solid state battery structures.

21. The battery according to claim 19 , wherein the battery structures are arranged within trenches reaching into the respective wafer.

22. The battery element of claim 16 , wherein each trench of the plurality of trenches comprises a substantially rectangular shape or a substantially quadratic shape at the surface of the substrate.

Assignees

• Infineon Technologies Ag

Inventors

• Weis Rolf
• Lemke Marko

Classifications

• H01M10/058 Primary

  Construction or manufacture · CPC title

• H01M4/0492 Primary

  Chemical attack of the support material · CPC title

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title

• H01M4/1391

  of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx · CPC title

• H01M4/1393

  of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx · CPC title