Spectrometer, and spectrometer production method

Patent metadata

Field	Value
Publication number	US-10775236-B2
Application number	US-201815911714-A
Country	US
Kind code	B2
Filing date	Mar 5, 2018
Priority date	Feb 5, 2014
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

A spectrometer includes a light detection element provided with a light passing part, a first light detection part, and a second light detection part, a support fixed to the light detection element such that a space is formed, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the first light detection part in the space. A plurality of second light detection parts is disposed in a region surrounding the second reflection part.

First claim

The invention claimed is:

1. A spectrometer comprising:
a light detection element provided with a light passing part and a light detection part;
a support fixed to the light detection element such that the support and the light detection element form a hollow structure;
a first reflection part provided in the support and configured to reflect light passing through the light passing part in a space inside the hollow structure;
a dispersive part provided in the light detection element and configured to disperse and reflect the light reflected by the first reflection part in the space; and
a second reflection part provided in the support and configured to reflect the light dispersed and reflected by the dispersive part to the light detection part in the space, wherein
a reflection area is formed by the first and second reflection parts provided in the support,
the reflection area is defined by a range of light entering the first reflection part and exiting the second reflection part, and
a center of the reflection area is offset with respect to a center of the support in a direction along which the light passing part, the dispersive part, the the light detection part are arranged when viewed in an optical axis direction of the light passing through the light passing part.

2. A spectrometer according to claim 1 ,
wherein the first reflection part is a planar mirror.

3. A spectrometer according to claim 1 ,
wherein the second reflection part is a concave mirror.

4. A spectrometer according to claim 1 ,
wherein the first reflection part is provided in the support with a molded layer interposed therebetween.

5. A spectrometer according to claim 1 ,
wherein the second reflection part is provided in the support with a molded layer interposed therebetween.

6. A spectrometer according to claim 1 ,
wherein the first reflection part and the second reflection part are provided in the support with a molded layer interposed therebetween.

7. A spectrometer according to claim 1 ,
wherein the support is provided with a wiring electrically connected to the light detection element.

8. A spectrometer according to claim 1 ,
wherein the light detection element and the support are fixed to each other and electrically connected to each other by a bump.

9. A method for manufacturing a spectrometer, comprising:
a first step of preparing a support provided with a first reflection part and a second reflection part, the first and second reflection parts forming a reflection area;
a second step of preparing a light detection element provided with a light passing part, a dispersive part, and a light detection part; and
a third step of fixing the support and the light detection element such that a hollow structure having a space inside is formed by the light detection element and the support after the first step and the second step, thereby forming, in the space, an optical path on which light passing through the light passing part is reflected by the first reflection part, the light reflected by the first reflection part is dispersed and reflected by the dispersive part, the light dispersed and reflected by the dispersive part is reflected by the second reflection part, and the light reflected by the second reflection part enters the light detection part, wherein
the reflection area is defined by a range of light entering the first reflection part and exiting the second reflection part, and
after the third step, a center of the reflection area is offset with respect to a center of the support in a direction along which the light passing part, the dispersive part, and the light detection part are arranged when viewed in an optical axis direction of the light passing through the light passing part.

10. A spectrometer comprising:
a light detection unit provided with a light detection part;
a support fixed to the light detection unit such that the support and the light detection unit form a hollow structure including a light passing part;
a first reflection part provided in the support and configured to reflect light passing through the light passing part in a space inside the hollow structure;
a dispersive part provided in the light detection unit and configured to disperse and reflect the light reflected by the first reflection part in the space; and
a second reflection part provided in the support and configured to reflect the light dispersed and reflected by the dispersive part to the light detection part in the space, wherein
a reflection area is formed by the first and second reflection parts provided in the support, the reflection area is defined by a range of light entering the first reflection part and exiting the second reflection part, and
a center of the reflection area is offset with respect to a center of the support in a direction along which the light passing part, the dispersive part, and the light detection part are arranged when viewed in an optical axis direction of the light passing through the light passing part.

11. A spectrometer according to claim 10 ,
wherein the first reflection part is a planar mirror.

12. A spectrometer according to claim 10 ,
wherein the second reflection part is a concave mirror.

13. A spectrometer according to claim 10 ,
wherein the first reflection part is provided in the support with a molded layer interposed therebetween.

14. A spectrometer according to claim 10 ,
wherein the second reflection part is provided in the support with a molded layer interposed therebetween.

15. A spectrometer according to claim 10 ,
wherein the first reflection part and the second reflection part are provided in the support with a molded layer interposed therebetween.

16. A spectrometer according to claim 10 ,
wherein the support is provided with a wiring electrically connected to the light detection unit.

17. A spectrometer according to claim 10 ,
wherein the light detection unit and the support are fixed to each other and electrically connected to each other by a bump.

18. A method for manufacturing a spectrometer, comprising:
a first step of preparing a support provided with a first reflection part and a second reflection part, the first and second reflection parts forming a reflection area;
a second step of preparing a light detection unit provided with a dispersive part, and a light detection part; and
a third step of fixing the support and the light detection unit such that a hollow structure including a light passing part is formed by the light detection unit and the support after the first step and the second step, thereby forming, in a space inside the hollow structure, an optical path on which light passing through the light passing part is reflected by the first reflection part, the light reflected by the first reflection part is dispersed and reflected by the dispersive part, the light dispersed and reflected by the dispersive part is reflected by the second reflection part, and the light reflected by the second reflection part enters the light detection part, wherein
the reflection area is defined by a range of light entering the first reflection part and exiting the second reflection part, and
after the third step, a center of the reflection area is offset with respect to a center of the support in a direction along which the light passing part, the dispersive part, and the light detection part are arranged when viewed in an optical axis direction of the light passing through the light passing part.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Yokino Takafumi
• Shibayama Katsumi

Classifications

• G01J3/0291

  Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements · CPC title

• G01J3/0286

  Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum · CPC title

• G01J3/0256 Primary

  Compact construction · CPC title

• G01J3/021 Primary

  using plane or convex mirrors, parallel phase plates, or particular reflectors · CPC title

• G01J3/36

  Investigating two or more bands of a spectrum by separate detectors · CPC title