Device for producing a non-thermal atmospheric-pressure plasma and method for the frequency control of a piezoelectric transformer

Patent metadata

Field	Value
Publication number	US-10772182-B2
Application number	US-201816494271-A
Country	US
Kind code	B2
Filing date	Mar 14, 2018
Priority date	Mar 14, 2017
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

A device for producing a non-thermal atmospheric-pressure plasma are a method for frequency control of a piezoelectric transformer are disclosed. In an embodiment a device includes a piezoelectric transformer, an activating circuit configured to apply an AC voltage at an activating frequency to the piezoelectric transformer as an input voltage and a field probe configured to measure a field strength of an electric field produced by the piezoelectric transformer, wherein the activating circuit is configured to adapt the activating frequency based on the measurement results of the field probe such that a field strength is maximized.

First claim

The invention claimed is:

1. A device for producing a non-thermal atmospheric-pressure plasma, the device comprising:
a piezoelectric transformer;
an activating circuit configured to apply an AC voltage at an activating frequency to the piezoelectric transformer as an input voltage; and
a field probe configured to measure a field strength of an electric field produced by the piezoelectric transformer,
wherein the activating circuit is configured to adapt the activating frequency based on the measurement results of the field probe in such a way that the field strength is maximized when the device is switched on.

2. The device according to claim 1 ,
wherein the piezoelectric transformer has an input region to which the input voltage is applicable, and
wherein the piezoelectric transformer has an output region configured to produce a high voltage when the input voltage is applied to the input region so that a plasma is ignited by the high voltage.

3. The device according to claim 2 , wherein the field probe is closely arranged to the output region.

4. The device according to claim 1 ,
wherein the field probe is connected to a measuring unit, which is configured to determine at least one of a peak value of the electric field strength or a mean value of the electric field strength,
wherein the activating circuit comprises a controller, which is configured to vary at least one of the activating frequency depending on the determined peak value or the determined mean value.

5. The device according to claim 1 , wherein the field probe is integrated in a circuit board.

6. The device according to claim 5 , wherein the circuit board has a metal coating that is arranged on a side of the circuit board that faces away from the piezoelectric transformer.

7. The device according to claim 5 , wherein the circuit board is multi-layered and the field probe is formed by an inner layer of the circuit board.

8. The device according to claim 1 , wherein the AC voltage comprises a rectangular signal or a triangular signal.

9. The device according to claim 1 , wherein the activating circuit is configured to:
adapt the activating frequency such that, based on measurement results of the field probe, the field strength is maximized when the device is switched on, and
perform a correction of the activating frequency such that, based on the measurement results of the field probe at fixed time intervals during ongoing operation of the device, the activating frequency is adapted once again in such a way that the field strength is maximized.

10. The device according to claim 1 , wherein the device is configured to produce excited molecules, ions or radicals.

11. The device according to claim 1 , wherein the device is configured to produce at least one of OH radicals or nitrogen or ozone.

12. A method for frequency control of a piezoelectric transformer, the method comprising:
applying an AC voltage to the piezoelectric transformer at an initial activating frequency f 0 ;
changing an activating frequency in steps from the initial activating frequency until a determined activating frequency is reached;
determining a field strength of an electric field produced by the piezoelectric transformer for each activating frequency by a field probe;
determining the activating frequency at which the maximum field strength is obtained; and
operating the piezoelectric transformer at the determined activating frequency for which the maximum field strength is obtained.

13. The method according to claim 12 , wherein determining the activating frequency at which the maximum field strength is obtained comprises repeatedly determining the activating frequency at which the maximum field strength is obtained at fixed time intervals.

14. The method according to claim 12 , wherein changing the activating frequency comprises:
increasing or reducing the activating frequency in steps from the initial activating frequency f 0 by a first increment Δf 1 until the activating frequency is reached at which the maximum field strength for the first increment Δf 1 obtained, and
subsequently increasing or reducing the activating frequency in steps from this initial activating frequency by a second increment Δf 2 until the activating frequency is reached at which the maximum field strength for the second increment Δf 2 is obtained,
wherein the second increment Δf 2 being is less than the first increment Δf 1 .

15. The method according to claim 12 , further comprising using the piezoelectric transformer for producing a non-thermal atmospheric pressure plasma.

16. The method according to claim 15 , further comprising using the plasma for producing excited molecules, ions or radicals.

17. The method according to claim 15 , further comprising using the plasma for producing at least one of hydroxyl radicals or nitrogen oxide or ozone.

Assignees

• Tdk Electronics Ag
• Relyon Plasma Gmbh

Inventors

• Weilguni Michael
• Nettesheim Stefan

Classifications

• H05H1/2481

  the plasma being activated using piezoelectric actuators · CPC title

• H05H1/2475 Primary

  using acoustic pressure discharges · CPC title

• H05H2001/2481

  Electricity · mapped topic

• H01L41/107

  Electricity · mapped topic

• H01L41/044

  Electricity · mapped topic