Gas detecting sensor

Patent metadata

Field	Value
Publication number	US-10768137-B2
Application number	US-201716346592-A
Country	US
Kind code	B2
Filing date	Nov 2, 2017
Priority date	Nov 2, 2016
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

A gas detecting sensor including a substrate, a gate electrode provided on the substrate, an insulating layer provided on the gate electrode, a source electrode and a drain electrode, provided on the insulating layer, respectively, an n-type channel provided between the source electrode and the drain electrode, and a quantum dot layer provided on the n-type channel and provided so as to have electronic transition energy capable of resonating with vibration energy of a target gas molecule.

First claim

The invention claimed is:

1. A gas detecting sensor comprising:
a substrate;
a gate electrode provided on the substrate;
an insulating layer provided on the gate electrode;
a source electrode and a drain electrode, provided on the insulating layer, respectively;
an n-type channel provided between the source electrode and the drain electrode; and
a quantum dot layer provided on the n-type channel and provided so as to have electronic transition energy capable of resonating with vibration energy of a target gas molecule.

2. The gas detecting sensor according to claim 1 ,
wherein the quantum dot layer comprises colloidal quantum dots.

3. The gas detecting sensor according to claim 1 ,
wherein the quantum dot layer comprises a semiconductor compound of Group II-VI, a semiconductor compound of Group III-V, a semiconductor compound of Group IV-VI, a semiconductor compound of Group IV or a combination thereof.

4. The gas detecting sensor according to claim 3 ,
wherein the quantum dot layer comprises one or more compounds selected from the group consisting of AuS, AuSe, AuTe, AgS, AgSe, AgTe, AgO, CuS, CuSe, CuTe, CuO, CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, ZnO, HgS, HgSe, HgTe, AuSeS, AuSeTe, AuSTe, AgSeS, AgSeTe, AgSTe, CuSeS, CuSeTe, CuSTe, CdSeS, CdSeTe, CdSTe, ZnSeS, ZnSeTe, ZnSTe, HgSeS, HgSeTe, HgSTe, AuAgS, AuAgSe, AuAgTe, AuCuS, AuCuSe, AuCuTe, AuZnS, AuZnSe, AuZnTe, AuCdS, AuCdSe, AuCdTe, AuHgS, AuHgSe, AuHgTe, AgZnS, AgZnSe, AgZnTe, AgCuS, AgCuSe, AgCuTe, AgCdS, AgCdSe, AgCdTe, AgHgS, AgHgSe, AgHgTe, CuZnS, CuZnSe, CuZnTe, CuCdS, CuCdSe, CuCdTe, CuHgS, CuHgSe, CuHgTe, ZnCdS, ZnCdSe, ZnCdTe, ZnHgS, ZnHgSe, ZnHgTe, CdHgS, CdHgSe, CdHgTe, CdHgZnTe, CdZnSeS, CdZnSeTe, CdZnSTe, CdHgSeS, CdHgSeTe, CdHgSTe, HgZnSeS, HgZnSeTe, HgZnSTe; GaN, GaP, GaAs, GaSb, InN, InP, InAs, InSb, GaNP, GaNAs, GaNSb, GaPAs, GaPSb, InNP, InNAs, InNSb, InPAs, InPSb, GaInNP, GaInNAs, GaInNSb, GaInPAs, GaInPSb, SnS, SnSe, SnTe, PbS, PbSe, PbTe, SnSeS, SnSeTe, SnSTe, PbSeS, PbSeTe, PbSTe, SnPbS, SnPbSe, SnPbTe, SnPbSSe, SnPbSeTe, SnPbSTe, Si, Ge, SiC and SiGe.

5. The gas detecting sensor according to claim 1 ,
wherein the quantum dot layer comprises ligand-substituted quantum dots.

6. The gas detecting sensor according to claim 5 ,
wherein the ligand-substituted quantum dots are substituted with at least one of an organic ligand or an inorganic ligand.

7. The gas detecting sensor according to claim 1 ,
wherein the n-type channel is an n-type material selected from the group consisting of IGZO, ZnO, ZTO, IZO, IHZO, AlN, InN, GaN and InGaN.

8. A gas detecting sensor comprising:
a substrate;
a gate electrode provided on the substrate;
an insulating layer provided on the gate electrode;
a source electrode and a drain electrode, provided on the insulating layer, respectively; and
a quantum dot layer provided on the insulating layer, provided so as to electrically connect the source electrode and the drain electrode, and provided so as to have electronic transition energy capable of resonating with vibration energy of a target gas molecule.

Assignees

• Lg Chemical Ltd
• Univ Korea Res & Bus Found

Inventors

• Jeong Kwang Seob
• Shin Hang Beum
• Choi Dong Sun
• Yoon Bit Na
• Jeong Ju Yeon

Classifications

• H10D30/014

  of FETs having zero-dimensional [0D] or one-dimensional [1D] channels, e.g. quantum wire FETs, single-electron transistors [SET] or Coulomb blockade transistors · CPC title

• G01N27/4146

  involving nanosized elements, e.g. nanotubes, nanowires · CPC title

• G01N27/4141 Primary

  specially adapted for gases · CPC title

• G01N33/004

  CO or CO2 · CPC title