High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam

Patent metadata

Field	Value
Publication number	US-10768049-B2
Application number	US-202016800077-A
Country	US
Kind code	B2
Filing date	Feb 25, 2020
Priority date	Nov 1, 2016
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit; a first lens for changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller; a second lens for concentrating the terahertz wave passing through the first lens and toward a detection unit; and a terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens.

First claim

The invention claimed is:

1. A high resolution inspection apparatus using a terahertz Bessel beam, the high resolution inspection apparatus comprising:
a terahertz wave generating unit generating a terahertz wave;
a Bessel beam forming unit forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit;
a first lens changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller;
a second lens concentrating the terahertz wave passing through the first lens and toward a terahertz wave detection unit;
the terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens; and
the Bessel beam forming unit is a first axicon lens having an apical angle at which a diameter of the terahertz Bessel beam is smaller than a wavelength of the terahertz wave generated by the terahertz wave generating unit.

2. The high resolution inspection apparatus of claim 1 , wherein a minimum value of the first axicon lens has an apical angle of the first axicon lens at which total internal reflection, according to the refractive index of the first axicon, does not occur.

3. The high resolution inspection apparatus of claim 1 , wherein the first lens is a second axicon lens arranged to be symmetrical to the first axicon lens with respect to the inspection target object.

4. The high resolution inspection apparatus of claim 2 , wherein the second axicon lens has an apical angle which has a same size as the first axicon lens.

5. The high resolution inspection apparatus of claim 1 , further include angle changing unit for changing an angle of the terahertz wave incident from the terahertz wave generating unit to be smaller and to enter the Bessel beam forming unit.

6. The high resolution inspection apparatus of claim 4 ,
wherein the angle changing unit is a first convex lens for changing the angle of the terahertz wave incident from the terahertz wave generating unit to be smaller; and
the second lens is a second convex lens arranged to be symmetrical to the first convex lens with respect to the inspection target object.

7. The high resolution inspection apparatus of claim 2 ,
wherein the second lens is a third axicon lens having a same shape as the second axicon lens and arranged to be symmetrical to the second axicon lens with respect to an axis perpendicular to an optical axis.

8. The high resolution inspection apparatus of claim 2 ,
wherein the first lens is a third convex lens for changing an angle of the terahertz wave radiated when the terahertz Bessel beam is transmitted through the inspection target object.

9. The high resolution inspection apparatus of claim 7 ,
wherein the second lens is a fourth convex lens arranged to be symmetrical to the third convex lens with respect to the axis perpendicular to the optical axis.

Assignees

• Korea Food Res Inst
• Korea Res Institute

Inventors

• Ok Gyeong-Sik
• Choi Sung-Wook
• Chang Hyun-Joo

Classifications

• G01J3/0208

  using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction · CPC title

• G01J2003/425

  Reflectance · CPC title

• G01V8/18

  using mechanical scanning systems · CPC title

• G02B5/001

  Axicons, waxicons, reflaxicons · CPC title

• G01J3/42 Primary

  Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) · CPC title