Resin and resist composition
US-9051405-B2 · Jun 9, 2015 · US
Resin and resist composition
US10766992B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10766992-B2 |
| Application number | US-201514604444-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 23, 2015 |
| Priority date | Jun 23, 2009 |
| Publication date | Sep 8, 2020 |
| Grant date | Sep 8, 2020 |
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- Title
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- Abstract
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Abstract
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A resin containing a structural unit derived from a compound represented by the formula (aa) wherein T, R 1 and Z 1 are defined in the specification.
First claim
Opening claim text (preview).
What is claimed is: 1. A resist composition comprising a resin comprising structural units derived from compounds represented by the formula (i) and an acid generator;
Assignees
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Classifications
and containing one or more carboxylic moiety in the chain, e.g. acetoacetoxyethyl(meth)acrylate · CPC title
C13or longer chain (meth)acrylate, e.g. stearyl (meth)acrylate · CPC title
C12-(meth)acrylate, e.g. lauryl (meth)acrylate · CPC title
C8-(meth)acrylate, e.g. isooctyl (meth)acrylate or 2-ethylhexyl (meth)acrylate · CPC title
Esters having no free carboxylic acid groups {, e.g. dialkyl maleates or fumarates} · CPC title
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- What does patent US10766992B2 cover?
- A resin containing a structural unit derived from a compound represented by the formula (aa) wherein T, R 1 and Z 1 are defined in the specification.
- Who is the assignee on this patent?
- Sumitomo Chemical Co
- What technology area does this patent fall under?
- Primary CPC classification C08F224/00. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Sep 08 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).