Adjustment plate and apparatus for treating substrate having the same

Patent metadata

Field	Value
Publication number	US-10763138-B2
Application number	US-201313873333-A
Country	US
Kind code	B2
Filing date	Apr 30, 2013
Priority date	Apr 30, 2012
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

Provided is a substrate treating apparatus using a process gas and an adjustment plate used thereof. A substrate treating apparatus including a chamber providing a space in which a process is performed, a support member supporting a substrate in the chamber, a gas supply member supplying a process gas onto the substrate disposed on the support member, and an exhaust assembly coupled to the chamber to exhaust a gas in the chamber, wherein the exhaust assembly includes an exhaust pipe connected to the chamber, an exhaust member connected to the exhaust pipe to provide a vacuum pressure in the exhaust pipe, a valve adjusting an opening rate of the exhaust pipe, and an adjustment plate having a cover plate which is provided in the chamber to interfere with a flow of the process gas in an internal region of the chamber in a direction corresponding to, when the exhaust pipe is partially opened, an opened region of the exhaust pipe. Consequently, the process gas may be uniformly supplied onto the substrate.

First claim

What is claimed is:

1. A substrate treating apparatus comprising:
a chamber providing a space in which a process is performed;
a support member supporting a substrate in the chamber;
a gas supply member supplying a process gas onto the substrate disposed on the support member; and
an exhaust assembly coupled to the chamber to exhaust a gas in the chamber,
wherein the exhaust assembly comprises:
an exhaust pipe connected to the chamber;
an exhaust member connected to the exhaust pipe to provide a vacuum pressure in the exhaust pipe;
a valve adjusting an opening rate of the exhaust pipe; and
an adjustment plate disposed between an inner wall of the chamber and the support member,

wherein the adjustment plate includes an outer ring, an inner ring, and a cover plate which is disposed between and coupled to the outer ring and the inner ring and has an arc shape forming an angle with respect to a center of the adjustment plate,
wherein an opening between the inner ring and the outer ring is open except a portion of the opening covered by the arc shape,
wherein the exhaust pipe is disposed on a bottom center of the chamber,
wherein the valve comprises a control plate moved on a plane perpendicular to a length direction of the exhaust pipe to form an opening in the exhaust pipe,
wherein the space of the chamber is divided into a first region and a second region based on the opening,
wherein a density of the process gas in the second region is higher than a density of the process gas in the first region,
wherein the opening which is not covered by the arc shape, corresponds to the first region, and
wherein the cover plate is disposed in the second region.

2. The substrate treating apparatus according to claim 1 , wherein the cover plate has a plurality of holes, and the holes are respectively inclined in up and down directions.

3. The substrate treating apparatus according to claim 2 , wherein the holes are respectively provided in slits.

4. The substrate treating apparatus according to claim 3 , wherein each of the slits has an arc shape.

5. The substrate treating apparatus according to claim 2 , wherein the holes are upwardly inclined toward a direction away from the support member.

6. The substrate treating apparatus according to claim 5 , wherein some of the holes are inclined so that a lower region of the cover plate is not seen when viewed from an upper side.

7. The substrate treating apparatus according to claim 6 , wherein another some of the holes are inclined so that a lower region of the cover plate is seen when viewed from an upper side.

8. The substrate treating apparatus according to claim 7 , wherein the some of the holes are disposed adjacent to an outer side of the cover plate, and the another some of the holes are disposed adjacent to an inner side of the cover plate.

9. The substrate treating apparatus according to claim 1 , wherein the cover plate has a plurality of holes having different sizes along a direction away from the support member.

10. The substrate treating apparatus according to claim 9 , wherein the holes disposed adjacent to an inner side of the cover plate have a width greater than the holes disposed adjacent to an outer side of the adjustment plate.

11. The substrate treating apparatus according to claim 1 , wherein the exhaust assembly has a circular ring shape surrounding the support member, the exhaust assembly has a plurality of through holes, and the exhaust assembly further comprises a baffle disposed over the adjustment plate.

12. The substrate treating apparatus according to claim 1 , wherein the exhaust pipe is disposed on a bottom center of the chamber.

13. The substrate treating apparatus according to claim 12 , wherein the valve comprises a control plate moved on a plane perpendicular to a length direction of the exhaust pipe.

14. The substrate treating apparatus according to claim 1 , wherein an inner surface of the cover plate is coupled to the inner ring and an outer surface of the cover plate is coupled to the outer ring.

15. The substrate treating apparatus according to claim 1 , wherein the inner ring is in contact with an outer surface of the support member.

16. The substrate treating apparatus according to claim 1 , wherein the outer ring is in contact with an inner wall of the chamber.

Assignees

• Semes Co Ltd

Inventors

• Kim Hyung Joon

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0462 Primary

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• H01J37/32816

  Pressure · CPC title

• F16K3/06

  in the form of closure plates arranged between supply and discharge passages (F16K3/10 takes precedence) · CPC title