Liquid crystal on silicon panel having less diffraction

Patent metadata

Field	Value
Publication number	US-10761385-B2
Application number	US-201715852313-A
Country	US
Kind code	B2
Filing date	Dec 22, 2017
Priority date	Dec 22, 2017
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

A liquid crystal on silicon (LCOS) panel comprises: a silicon substrate having silicon circuit within the silicon substrate; a plurality of metal electrodes disposed on the silicon substrate, where the plurality of metal electrodes are periodically formed on the silicon substrate; a dielectric material disposed in and filling gaps between adjacent metal electrodes; and an oxide layer disposed on the plurality of metal electrodes and the dielectric material in the gaps between adjacent metal electrodes; where the refractive index of the dielectric material is higher than the refractive index of the oxide layer.

First claim

What is claimed is:

1. A liquid crystal on silicon (LCOS) panel comprising:
a silicon substrate having silicon circuit within the silicon substrate;
a plurality of metal electrodes disposed on the silicon substrate, wherein the plurality of metal electrodes are periodically formed on the silicon substrate;
a cover glass comprising a glass substrate and a transparent continuous electrode coated on the glass substrate;
wherein each metal electrode of the plurality of metal electrodes and the transparent continuous electrode form a pixel of the LCOS panel;
a dielectric material disposed in and filling gaps between adjacent metal electrodes; and
an oxide layer disposed on the plurality of metal electrodes and the dielectric material in the gaps between adjacent metal electrodes;
wherein a refractive index of the dielectric material is higher than a refractive index of the oxide layer;
wherein after a planarization process the metal electrodes and the dielectric material in the gaps have the same thickness.

2. The LCOS panel of claim 1 , further comprising:
a first liquid crystal alignment layer disposed on the oxide layer;
a liquid crystal layer disposed on the first liquid crystal alignment layer;
wherein the cover glass is disposed on the liquid crystal layer;
a second liquid crystal alignment layer disposed on the transparent continuous electrode of the cover glass; and
wherein the second liquid crystal alignment layer is immediately adjacent to the liquid crystal layer.

3. The LCOS panel of claim 1 , wherein the dielectric material is silicon oxynitride.

4. The LCOS panel of claim 1 , wherein the oxide layer is made of silicon oxide.

5. The LCOS panel of claim 1 , wherein the dielectric material disposed in and filling the gap between adjacent metal electrodes surrounds a metal pillar in the gap.

6. The LCOS panel of claim 5 , wherein the metal electrodes, the metal pillar, and the dielectric material have the same thickness.

Assignees

• Zhang Ming
• Weng Libo
• Zhao Cheng
• Qian Yin
• Miao Chia Chun
• Lin Zhiqiang
• Tai Dyson H
• Omnivision Tech Inc

Inventors

• Zhang Ming
• Weng Libo
• Zhao Cheng
• Qian Yin
• Miao Chia-Chun
• Lin Zhiqiang
• Tai Dyson H

Classifications

• G02F1/133502 Primary

  Antiglare, refractive index matching layers · CPC title

• G02F1/133302

  Rigid substrates, e.g. inorganic substrates · CPC title

• G02F1/133357

  Planarisation layers · CPC title

• G02F1/133565

  inside the LC elements, i.e. between the cell substrates · CPC title

• G02F1/133331

  Cover glasses · CPC title