Defect inspection method and apparatus
US-2016364851-A1 · Dec 15, 2016 · US
US10761035B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10761035-B2 |
| Application number | US-201716478070-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 6, 2017 |
| Priority date | Feb 27, 2017 |
| Publication date | Sep 1, 2020 |
| Grant date | Sep 1, 2020 |
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This diagnosis support apparatus is a diagnosis support apparatus of a vacuum degassing tank having an immersion tube that extends downward, the diagnosis support apparatus including a camera that is configured to capture an image of an inner circumferential surface of an immersion tube seen from below at an angle in a state of being disposed outside the inner circumferential surface of the immersion tube in a plan view and acquire the image as data and an image processor that is configured to be connected to the camera and carry out image-processing of the data.
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What is claimed is: 1. A diagnosis support apparatus of a vacuum degassing tank having an immersion tube that extends downward, the apparatus comprising: a camera that is configured to capture an image of an inner circumferential surface of the immersion tube seen from below at an angle in a state of being disposed outside the inner circumferential surface of the immersion tube in a plan view and acquire the image as data; and an image processor that is configured to be connected to the camera and carry out image-processing of the data. 2. The diagnosis support apparatus according to claim 1 , further comprising: a table to which the camera is fixed; and a moving mechanism that is configured to move the table between an image capturing position at which the camera is disposed at a position at which the camera is not overlaid by the inner circumferential surface of the immersion tube in the plan view and an evacuation position at which the camera is disposed at a position at which the camera is not overlaid by the vacuum degassing tank in the plan view. 3. The diagnosis support apparatus according to claim 2 , wherein the moving mechanism includes a supporting column that extends in a vertical direction, and an arm that extends from the supporting column in a horizontal direction and is configured to support the table so as to be capable of circling around an axis of the supporting column. 4. The diagnosis support apparatus according to claim 2 , further comprising: a storage case that is fixed to the table and is configured to store the camera, wherein at least a part of an upper surface of the storage case is heat-resistant glass. 5. The diagnosis support apparatus according to claim 4 , wherein the storage case includes a lid that is configured to cover at least a part of the heat-resistant glass, and a lid-opening and closing mechanism that is configured to open and close the lid so that the lid is opened when the table is at the image capturing position and the lid is in a closed state when the table is being moved. 6. The diagnosis support apparatus according to claim 4 , further comprising: a gas supply mechanism that is configured to supply gas to an inside of the storage case. 7. The diagnosis support apparatus according to claim 4 , further comprising: a thermometer that is configured to measure a temperature of an inside of the storage case. 8. The diagnosis support apparatus according to claim 1 , further comprising: a camera control unit that is configured to capture a plurality of the images while changing an exposure time of the camera in a range of 5 ms to 300 ms. 9. The diagnosis support apparatus according to claim 1 , wherein the camera image captures the inner circumferential surface of the immersion tube in a state of being disposed outside an outer circumferential surface of the immersion tube in the plan view. 10. The diagnosis support apparatus according to claim 1 , wherein a plurality of the cameras is disposed around a central axis of the immersion tube in the plan view. 11. The diagnosis support apparatus according to claim 10 , wherein the camera image captures a whole circumference of the inner circumferential surface of the immersion tube. 12. The diagnosis support apparatus according to claim 1 , wherein the camera image captures, in the inner circumferential surface of the immersion tube, a region closest to a central axis of the vacuum degassing tank in the plan view. 13. The diagnosis support apparatus according to claim 1 , wherein the vacuum degassing tank is an RH degassing tank having two immersion tubes. 14. A diagnosis support method of a vacuum degassing tank in which the diagnosis support apparatus according to claim 1 is used, the method comprising: capturing an image of the inner circumferential surface of the immersion tube seen from below at an angle using the camera and acquiring data; and image-processing the data acquired in the image capture using the image processor. 15. A diagnosis method of a vacuum degassing tank in which the diagnosis support apparatus according to claim 1 is used, the method comprising: capturing an image of the inner circumferential surface of the immersion tube seen from below at an angle using the camera and acquiring data; image-processing the data acquired in the image capture using the image processor; specifying presence or absence of cracks and lengths of the cracks in the inner circumferential surface of the immersion tube on the basis of the image-processed data; and determining a necessity of a repair and a repair technique depending on the presence or absence of the cracks and the lengths of the cracks specified in the specifying. 16. A repair method, wherein the inner circumferential surface of the immersion tube is repaired using the repair technique determined in the determining according to claim 15 .
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