Substrate drying method and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10760852-B2
Application number	US-201816047633-A
Country	US
Kind code	B2
Filing date	Jul 27, 2018
Priority date	Aug 31, 2017
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

A substrate drying method for drying a front surface of a substrate having a pattern includes a sublimation-agent-liquid-film placing step of placing a liquid film of a liquid sublimation-agent on the front surface of the substrate, a high vapor-pressure liquid placing step of placing a liquid film of a high vapor-pressure liquid that has vapor pressure higher than the sublimation agent and that does not include water on the liquid film of the sublimation-agent placed on the front surface of the substrate, a vaporizing/cooling step of losing vaporization heat in response to vaporization of the high vapor-pressure liquid, and, cooling the sublimation-agent, and, as a result, solidifying the liquid film of the sublimation-agent, and, forming a sublimation-agent film on the front surface of the substrate, and a sublimating step of sublimating the sublimation-agent film.

First claim

What is claimed is:

1. A substrate drying method for drying a front surface of a substrate having a pattern, the substrate drying method comprising:
a sublimation-agent-liquid-film placing step of placing a liquid film of a sublimation agent in a liquid state thereof on the front surface of the substrate, the sublimation agent contained in the liquid film of the sublimation agent having a temperature higher than a freezing point of the sublimation agent;
a high vapor-pressure liquid placing step of placing a liquid film of a high vapor-pressure liquid that has vapor pressure higher than that of the sublimation agent in the liquid state and that does not include water on the liquid film of the sublimation agent placed on the front surface of the substrate, the high vapor-pressure liquid contained in the liquid film of the high vapor-pressure liquid having a temperature higher than the freezing point of the sublimation agent;
a vaporizing/cooling step of losing vaporization heat in response to vaporization of the high vapor-pressure liquid, and, cooling the sublimation agent in the liquid state thereof from the temperature higher than the freezing point thereof to the freezing point or a temperature lower than the freezing point so as to change the sublimation agent in the liquid state to the sublimation agent in a solid state thereof, thereby solidifying the liquid film of the sublimation agent, and, forming a sublimation-agent film of the sublimation agent in the solid state on the front surface of the substrate; and
a sublimating step of sublimating the sublimation-agent film.

2. The substrate drying method according to claim 1 , wherein the high vapor-pressure liquid included in the liquid film of the high vapor-pressure liquid has specific gravity smaller than that of the sublimation agent, and
the high vapor-pressure liquid placing step includes a continuously-flowing supply step of supplying the high vapor-pressure liquid in a continuously-flowing state from above toward the liquid film of the sublimation agent placed on the front surface of the substrate, and
the liquid film of the high vapor-pressure liquid is formed by a difference in specific gravity with respect to the sublimation agent.

3. The substrate drying method according to claim 1 , wherein the high vapor-pressure liquid placing step includes a high vapor-pressure liquid spray step of spraying liquid droplets of the high vapor-pressure liquid from above toward the liquid film of the sublimation agent placed on the front surface of the substrate.

4. The substrate drying method according to claim 1 , wherein the high vapor-pressure liquid placing step includes a step of supplying the high vapor-pressure liquid from a nozzle that is used also as a nozzle that supplies the sublimation agent in the liquid state in the sublimation-agent-liquid-film placing step.

5. The substrate drying method according to claim 1 , wherein the high vapor-pressure liquid placing step includes a step of supplying the high vapor-pressure liquid from a high vapor-pressure liquid nozzle different from a sublimation-agent nozzle that supplies a sublimation agent in the liquid state in the sublimation-agent-liquid-film placing step,
the substrate drying method further comprising a sublimation-agent-nozzle heating step of heating the sublimation-agent nozzle after the sublimation agent in the liquid state is supplied from the sublimation-agent nozzle.

6. The substrate drying method according to claim 1 , further comprising a step of, prior to the vaporizing/cooling step, supplying a second high vapor-pressure liquid that has vapor pressure higher than that of the sublimation agent to a rear surface that is a surface on a side opposite to the front surface of the substrate, and then stopping supplying the second high vapor-pressure liquid.

7. The substrate drying method according to claim 1 , further comprising:
a substrate rotating step of rotating the substrate around a predetermined rotational axis in parallel in time with at least one of the sublimation-agent-liquid-film placing step and the vaporizing/cooling step; and
a high-speed rotation step of rotating the substrate around the predetermined rotational axis at a speed higher than a substrate rotation speed in the substrate rotating step in parallel in time with the sublimating step.

Assignees

• Screen Holdings Co Ltd

Inventors

• Okutani Manabu
• Kikumoto Noriyuki
• Yoshihara Naohiko
• Abe Hiroshi

Classifications

• H10P72/0408 Primary

  for drying · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title

• H10P70/15

  by wet cleaning only (H10P70/52 takes precedence) · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title