Pressure burst free high capacity cryopump

Patent metadata

Field	Value
Publication number	US-10760562-B2
Application number	US-898508-A
Country	US
Kind code	B2
Filing date	Jan 15, 2008
Priority date	Jan 17, 2007
Publication date	Sep 1, 2020
Grant date	Sep 1, 2020

Abstract

A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

First claim

What is claimed is:

1. A cryopump comprising:
a vacuum vessel;
a refrigerator having at least a first stage and a second stage;
a radiation shield mounted within the vacuum vessel and enclosing second stage cryopumping surfaces, the radiation shield and the second stage cryopumping surfaces configured to be cooled by the refrigerator of the cryopump, the radiation shield comprising:
a housing including a primary opening, an end opposite the primary opening, and a lateral side wall connected to the end, a frontal array being across the primary opening and the housing having an inner surface facing the second stage cryopumping surfaces and having an interior volume sufficient to hold the second stage cryopumping surfaces, the second stage cryopumping surfaces including primary second stage condensing surfaces and non-primary second stage condensing surfaces;
a drain hole located in a center region of the end of the housing to permit cryogenic liquid and gas to traverse therethrough during a regeneration operation, the drain hole providing for fluid communication between the interior volume of the housing and an annular space between the vacuum vessel and the radiation shield; and
a baffle: (a) directly connected to the inner surface of the end of the radiation shield housing to extend across the drain hole and to cover the drain hole, wherein the baffle and the inner surface of the end of the radiation shield housing define a channel having two ends, the drain hole being in fluid communication with the channel at a location between the two ends and (b) configured to direct gases traversing through the drain hole away from the non-primary second stage condensing surfaces.

2. The cryopump of claim 1 , wherein the baffle is substantially “U” shaped.

3. The cryopump of claim 1 , wherein the baffle includes a first arm connected to the radiation shield housing, and a second arm connected to the radiation shield housing, and an intermediate section connected to the first arm and the second arm.

4. The cryopump of claim 1 , wherein the baffle is curved to permit cryogenic liquid to traverse through the drain hole during regeneration of the cryopump.

5. The cryopump of claim 1 , wherein the baffle is connected by a bonding.

6. The cryopump of claim 1 , wherein the inner surface of the housing of the radiation shield is a cylindrical surface, the cylindrical surface facing the primary second stage condensing surfaces, and wherein the cylindrical surface is impermeable to gas flow.

7. The cryopump of claim 1 , wherein the baffle includes a first arm connected to the radiation shield housing, and a second arm connected to the radiation shield housing, and an intermediate section connected to the first arm and the second arm and suspended above the drain hole.

8. A method of directing flow from between a vacuum vessel and a radiation shield to control the location of condensate film growth, the method comprising:
providing the cryopump of claim 1 ;
with the baffle recited in claim 1 , redirecting gases traversing through the drain hole recited in claim 1 away from the non-primary second stage condensing surfaces; and
condensing the gases directed at the primary second stage condensing surfaces to form frost.

9. The cryopump of claim 1 , the second stage cryopumping surfaces further comprising:
protected surfaces having adsorbent.

Assignees

• Bartlett Allen J
• Driscoll Michael A
• Eacobacci Jr Michael J
• Johnson William L
• Sullivan Robert P
• Syssoev Sergei
• Stira Mark A
• Casello John J
• Edwards Vacuum Llc

Inventors

• Bartlett Allen J
• Driscoll Michael A
• Eacobacci Jr Michael J
• Johnson William L
• Sullivan Robert P
• Syssoev Sergei
• Stira Mark A
• Casello John J

Classifications

• F04B37/02

  for evacuating by absorption or adsorption · CPC title

• Y10S417/901

  Cryogenic pumps · CPC title

• F05B2260/602

  Drainage · CPC title

• F04B37/08 Primary

  by condensing or freezing, e.g. cryogenic pumps · CPC title

• F04B39/121

  Casings · CPC title