Microlithographic projection exposure apparatus and method of correcting optical wavefront deformations in such an apparatus
US-2016179018-A1 · Jun 23, 2016 · US
US10759094B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10759094-B2 |
| Application number | US-201615368270-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 2, 2016 |
| Priority date | Jun 6, 2014 |
| Publication date | Sep 1, 2020 |
| Grant date | Sep 1, 2020 |
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A binder material activating device to activate a binder material on a fibrous substrate, the binder material activating device including a heat exposing device to expose the fibrous substrate with the binder material to heat. The heat exposing device includes a non-focused light source to provide a non-focused light beam and an optics device to be arranged in between the fibrous substrate to be exposed to heat and the light source to focus the non-focused light beam onto the fibrous substrate. Further, a preforming device includes the binder material activating device.
Opening claim text (preview).
The invention claimed is: 1. A binder material activating device for activating a binder material on a fibrous substrate, the binder material activating device comprising: a heat exposing device for exposing the fibrous substrate with the binder material to heat, the heat exposing device comprising: a light source comprising a light emitting diode (LED) for providing a divergent light beam; and an optics device positioned between the fibrous substrate and the light source, wherein the optics device is configured to produce a focused light beam by focusing the divergent light beam onto the fibrous substrate and/or to homogeneously expose the fibrous substrate; and a controller for controlling an emission power and emission wavelength of the light source, for controlling a position and an orientation of the heat exposing device about a first axis, and for controlling an orientation of the optics device about a second axis. 2. The binder material activating device according to claim 1 , wherein the light source is non-focused. 3. The binder material activating device according to claim 1 , wherein the light source comprises an emitting wavelength, in a non-visible spectrum, corresponding to an activation energy needed to activate the binder material and/or corresponding to a heating energy needed to heat at least one fiber in the fibrous substrate to a melting/activating temperature of the binder material. 4. The binder material activating device according to claim 1 , wherein: the heat exposing device is movable in at least one spatial direction and/or is pivotable about at least one axis perpendicular to the light beam; the optics device is movable in at least one spatial direction and/or is pivotable about at least one axis perpendicular to the light beam; and/or a unit comprising the heat exposing device and the optics device is movable in at least one spatial direction and/or is pivotable about at least one axis perpendicular to the light beam. 5. The binder material activating device according to claim 1 , wherein the optics device comprises: a collimating lens configured to collimate the light beam to provide a collimated light beam; and a focusing lens configured to focus the collimated light beam onto the fibrous substrate. 6. The binder material activating device according to claim 1 , wherein the optics device comprises at least one lens selected from a group of lenses consisting of spherical lenses, aspherical lenses, holographic lenses, and Fresnel lenses. 7. The binder material activating device according to claim 1 , comprising: a plurality of juxtaposed heat exposing devices; and/or at least one heat exposing device with a plurality of light sources, wherein one collimating lens extends over the plurality of light sources. 8. The binder material activating device according to claim 7 , wherein the light sources of the plurality of light sources or the plurality of juxtaposed heat exposing devices emit light beams with differing wavelengths and/or differing power. 9. A preforming device to attach a fibrous substrate to a preforming substrate, the preforming device comprising a binder material activating device according to claim 1 , wherein the fibrous substrate is configured to be laid onto the preforming substrate by a laying device. 10. The preforming device according to claim 9 , wherein the preforming device is configured such that the binder material is deposited onto the fibrous substrate before the binder material is activated by the binder material activating device. 11. The preforming device according to claim 9 , comprising a laying head configured to transfer the fibrous substrate from a first position, which is outside the preforming substrate, to a second position, which is on the surface of the preforming substrate, wherein the binder material activating device is arranged at the first position. 12. The preforming device according to claim 9 , wherein: the laying device comprises a roller configured to continuously press a sheet of the fibrous substrate onto the preforming substrate, and the binder material activating device is arranged to impinge the fibrous substrate and/or the preforming substrate with the focused light beam at a contact point of the fibrous substrate and the preforming substrate. 13. The preforming device according to claim 9 , wherein: the preforming substrate is a mandrel, and the binder material activating device is arranged to tangentially impinge the focused light beam onto the fibrous substrate as the fibrous substrate is wound onto the mandrel. 14. A method of activating, using a binder material activating device, a binder material on a fibrous substrate, the method comprising: providing a binder material activating device comprising: a heat exposing device for exposing the fibrous substrate with the binder material to heat, the heat exposing device comprising: a light source comprising a light emitting diode (LED) for providing a divergent light beam; and an optics device positioned between the fibrous substrate and the light source; laying, using a laying device, the fibrous substrate onto a preforming substrate and the binder material activating device; controlling an emission power and emission wavelength of the light source, a position and an orientation of the heat exposing device about a first axis, and an orientation of the optics device about a second axis; focusing, using the optics device, the divergent light beam onto the fibrous substrate and/or homogenously exposing, using the optics device, the fibrous substrate; and attaching, using the binder material activation device, the fibrous substrate to a preforming substrate. 15. A binder material activating device for activating a binder material on a fibrous substrate, the binder material activating device comprising: at least one heat exposing device for exposing the fibrous substrate with the binder material to heat, the heat exposing device comprising: at least one light source comprising a light emitting diode (LED) for providing a divergent light beam; and an optics device positioned between the fibrous substrate and the at least one light source, wherein the optics device is configured to produce a focused light beam by focusing the divergent light beam onto the fibrous substrate and/or to homogeneously expose the fibrous substrate; and a controller for controlling an emission wavelength of the at least one light source. 16. The binder material activating device according to claim 15 , wherein the at least one heat exposing device is a plurality of juxtaposed heat exposing devices. 17. The binder material activating device according to claim 16 , wherein the at least one light source of each of the plurality of juxtaposed heat exposing devices is configured to emit light beams of differing wavelengths. 18. The binder material activating device according to claim 15 , wherein the at least one light source of the at least one heat exposing device is a plurality of light sources. 19. The binder material activating device according to claim 18 , wherein the plurality of light sources are configured to emit light beams of differing wavelengths. 20. The binder material activating device according to claim 15 , wherein the light source comprises an emitting wavelength, in a non-visible spectrum, corresponding to an activation energy needed to activate the binder material and/or corresponding to a heating energy needed to heat at least one fiber in the fibrous sub
at least one surface having optical power · CPC title
Dividing and/or superposing multiple light beams · CPC title
Lenses (lenses per se G02B3/00) · CPC title
using electromagnetic radiation · CPC title
Automated lay-up, e.g. using robots, laying filaments according to predetermined patterns {(application heads for tyres B29D30/28)} · CPC title
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