Substrate holder, a lithographic apparatus and method of manufacturing devices
US-2018190534-A1 · Jul 5, 2018 · US
Substrate holding device and method of manufacturing the same
US10755959B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10755959-B2 |
| Application number | US-201715600897-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 22, 2017 |
| Priority date | May 26, 2016 |
| Publication date | Aug 25, 2020 |
| Grant date | Aug 25, 2020 |
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- Title
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Abstract
Official abstract text for this publication.
A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70° or more and 85° or less.
First claim
Opening claim text (preview).
What is claimed is: 1. A device for holding a substrate comprising: a base body having a flat plate-like shape and including an upper surface and a plurality of protrusions including a first protrusion and a second protrusion, the plurality of protrusions protruding from the upper surface, the base body defining a gas passage that opens in the upper surface; wherein at least an upper part of the first protrusion has a conical frustum shape with a base angle between 70° and 85°; wherein the second protrusion is located around the gas passage; wherein the base angle of the second protrusion is smaller than the base angle of the first protrusion; and wherein a cross-sectional area of a base end portion of the second protrusion is larger than a cross-sectional area of a base end portion of the first protrusion. 2. The device according to claim 1 , each of the plurality of protrusions including a top surface for contacting the substrate, wherein a ratio of a height of each of the protrusions to a maximum width of the top surface is 1 or more, a ratio of a total contact area between the substrate and the plurality of protrusions to an area of the substrate is 0.30% or less, and center-to-center distances between adjacent protrusions are 3.0 mm or less. 3. A device for holding a substrate comprising: a base body having a flat plate-like shape and including an upper surface and a plurality of protrusions including a first protrusion and a second protrusion, the plurality of protrusions protruding from the upper surface, the base body defining a gas passage that opens in the upper surface; wherein at least an upper part of the first protrusion has a conical frustum shape with a base angle between 70° and 85°; wherein the second protrusion is located around the gas passage; wherein the base angle of the second protrusion is smaller than the base angle of the first protrusion; wherein a cross-sectional area of a base end portion of the second protrusion is larger than a cross-sectional area of a base end portion of the first protrusion; and wherein the first protrusion is formed by laser processing.
Assignees
Inventors
Classifications
characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title
- H10P72/78Primary
using vacuum or suction, e.g. Bernoulli chucks · CPC title
Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title
- H10P72/74Primary
using temporarily an auxiliary support · CPC title
with vacuum · CPC title
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Frequently asked questions
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- What does patent US10755959B2 cover?
- A substrate holding device includes a base body that has a flat plate-like shape and that includes gas passages that open in an upper surface of the base body, and a plurality of protrusions that protrude from the upper surface of the base body. At least an upper part of each of the protrusions has a conical frustum shape having a base angle of 70° or more and 85° or less.
- Who is the assignee on this patent?
- Ngk Spark Plug Co
- What technology area does this patent fall under?
- Primary CPC classification H10P72/78. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 25 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).