Advanced optical sensor, system, and methodologies for etch processing monitoring
US-2018286643-A1 · Oct 4, 2018 · US
US10753864B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10753864-B2 |
| Application number | US-201816215269-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 10, 2018 |
| Priority date | Dec 10, 2018 |
| Publication date | Aug 25, 2020 |
| Grant date | Aug 25, 2020 |
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A gas analysis system includes a spectroscopy assembly coupled to a vehicle. The spectroscopy assembly includes a multiplexer configured to combine a plurality of light beams into a multiplexed light beam, wherein the multiplexer is configured to direct the multiplexed light beam toward a target surface. Additionally, the spectroscopy assembly includes a collection optic configured to receive a reflected multiplexed light beam from the target surface. Further, the spectroscopy assembly includes a controller configured to de-multiplex the multiplexed light beam into a plurality of reflected light beams and determine a spectral intensity of the plurality of reflected light beams.
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The invention claimed is: 1. A gas analysis system, comprising: a spectroscopy assembly coupled to a scanning platform, wherein the spectroscopy assembly comprises: a multiplexer configured to combine a plurality of light beams into a multiplexed light beam, wherein the multiplexer is configured to direct the multiplexed light beam toward a target surface, wherein each light beam of the plurality of light beams comprises a respective predetermined wavelength range, wherein a first predetermined wavelength range is different from a second predetermined wavelength range, and wherein the first predetermined wavelength range corresponds to a first absorption frequency of a first target fluid and the second predetermined wavelength range corresponds to a second absorption frequency of a second target fluid; a collection optic configured to receive a reflected multiplexed light beam from the target surface; and a controller configured to de-multiplex the multiplexed light beam into a plurality of reflected light beams and determine a spectral intensity of each reflected light beam of the plurality of reflected light beams. 2. The gas analysis system of claim 1 , wherein the controller is configured to detect a gas based at least in part on the spectral intensity of a reflected light beam of the plurality of reflected light beams. 3. The gas analysis system of claim 1 , wherein the controller is configured to detect the first target fluid based at least in part on a first spectral intensity of a first reflected light beam of the plurality of reflected light beams and the second target fluid based at least in part on a second spectral intensity of a second reflected light beam of the plurality of reflected light beams. 4. The gas analysis system of claim 1 , wherein the spectroscopy assembly is configured to emit a plurality of multiplexed light beams, wherein each multiplexed light beam of the plurality of multiplexed light beams is emitted toward a respective target surface of a plurality of target surfaces. 5. The gas analysis system of claim 4 , wherein the spectroscopy assembly comprises a plurality of multiplexers, wherein each multiplexer of the plurality of multiplexers is configured to emit a respective multiplexed light beam of the plurality of multiplexed light beams. 6. The gas analysis system of claim 1 , wherein the spectroscopy assembly comprises a plurality of emitters, wherein each emitter of the plurality of emitters are oriented to direct the plurality of light beams toward the multiplexer. 7. The gas analysis system of claim 1 , wherein the controller comprises a de-multiplexer configured to de-multiplex the multiplexed light beam into the plurality of reflected light beams. 8. The gas analysis system of claim 1 , comprising a user interface, wherein the user interface is configured to send a signal to the controller indicative of a user-selected predetermined wavelength range for a light beam of the plurality of light beams. 9. A gas analysis system, comprising: an unmanned aerial vehicle; and a spectroscopy assembly coupled to the unmanned aerial vehicle, wherein the spectroscopy assembly comprises: a multiplexer configured to combine a plurality of light beams into a multiplexed light beam, wherein each light beam of the plurality of light beams comprises a respective predetermined wavelength range, wherein a first predetermined wavelength range is different from a second predetermined wavelength range, and wherein the first predetermined wavelength range corresponds to a first absorption frequency of a first target fluid and the second predetermined wavelength range corresponds to a second absorption frequency of a second target fluid; a scanning mirror configured to direct the multiplexed light beam toward a target surface; and a collection optic configured to receive a reflected multiplexed light beam from the target surface; and a controller configured to de-multiplex the reflected multiplexed light beam into a plurality of reflected light beams, and wherein the controller is configured to determine a spectral intensity of each reflected light beam of the plurality of reflected light beams. 10. The gas analysis system of claim 9 , wherein the scanning mirror is configured to rotate to adjust a position of the multiplexed light beam with respect to a ground surface. 11. The gas analysis system of claim 10 , wherein the scanning mirror is configured to rotate between a first angle and a second angle to move the multiplexed light beam from the target surface to an additional target surface. 12. The gas analysis system of claim 9 , wherein the spectroscopy assembly comprises an emitter configured to emit the plurality of light beams toward the multiplexer. 13. The gas detection system of claim 9 , wherein the spectroscopy assembly comprises a collimator configured to collimate the multiplexed light beam such that the plurality of light beams of the multiplexed light beam are aligned substantially parallel to one another. 14. The gas analysis system of claim 9 , wherein the controller is configured to detect a respective target fluid based at least on the spectral intensity of a light beam of the plurality of light beams. 15. The gas analysis system of claim 9 , comprising a spectroscopy assembly housing configured to couple to the unmanned aerial vehicle, wherein the spectroscopy assembly housing is configured to house the collection optic and at least one detector. 16. The gas analysis system of claim 9 , wherein the controller is configured to execute the flight path for the unmanned aerial vehicle. 17. A method comprising: combining a plurality of light beams into a single multiplexed light beam, wherein each light beam of the plurality of light beams comprises a respective predetermined wavelength range, wherein a first predetermined wavelength range is different from a second predetermined wavelength range, and wherein the first predetermined wavelength range corresponds to a first absorption frequency of a first target fluid and the second predetermined wavelength range corresponds to a second absorption frequency of a second target fluid; emitting the single multiplexed light beam toward a target surface; receiving a reflected multiplexed light beam from the target surface; de-multiplexing the reflected multiplexed light beam into a plurality of reflected light beams; and determining a spectral intensity of each reflected light beam of the plurality of reflected light beams. 18. The method of claim 17 , comprising detecting a gas plume based at least in part on the spectral intensity of a reflected light beam of the plurality of reflected light beams. 19. The method of claim 17 , comprising emitting each light beam of the plurality of light beams at a wavelength range corresponding to an absorption frequency of a respective target fluid.
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