Cold head, superconducting magnet, examination apparatus, and cryopump

Patent metadata

Field	Value
Publication number	US-10753652-B2
Application number	US-201514688475-A
Country	US
Kind code	B2
Filing date	Apr 16, 2015
Priority date	Oct 22, 2012
Publication date	Aug 25, 2020
Grant date	Aug 25, 2020

Abstract

A reduction in a permeability of refrigerant gas is suppressed while increasing a filling factor of regenerator material particles with respect to a stage of a cold head. A cold head includes a stage including regenerator material particle groups, and a metal mesh material partitioning the regenerator material particle groups. The metal mesh material has quadrangular mesh holes each having a length of a long side of 1/10 or more and ½ or less of each of average particle sizes of the regenerator material particle groups.

First claim

What is claimed is:

1. A cold head comprising a stage,
the stage comprising:
regenerator material particle groups each having an average particle size in a range from 200 μm to 380 μm; and
a plurality of metal mesh materials partitioning the regenerator material particle groups,

wherein each of the metal mesh materials has quadrangular mesh holes each having a length of a long side in a range from 1/10 to ½ of each of the average particle sizes of the regenerator material particle groups,
wherein the metal mesh materials has metal wires woven in a mesh form, and each of the metal wires has a wire diameter in a range from 20 μm to 90 μm,
wherein the plurality of the metal mesh materials are stacked such that positions of the mesh holes in the plurality of the metal mesh materials do not match,
wherein a length of one side of each of mesh holes in one of the plurality of the metal mesh materials is different from a length of one side of each of the mesh holes in another one of the plurality of the metal mesh materials, and
wherein the cold head is configured to achieve a temperature of 10 K or less.

2. The cold head according to claim 1 ,
wherein one of the metal mesh materials comprises a copper mesh material.

3. The cold head according to claim 1 ,
wherein the stage includes a plurality of regenerator material-filled layers partitioned by the plurality of the metal mesh materials and having the regenerator material particle groups with different types of materials respectively filled therein.

4. The cold head according to claim 1 ,
wherein the regenerator material particle groups are at least one selected from the group consisting of a lead regenerator material particle group, a holmium-copper regenerator material particle group, an erbium-nickel regenerator material particle group, an erbium-cobalt regenerator material particle group, a gadolinium oxysulfide regenerator material particle group, and a gadolinium-aluminum oxide regenerator material particle group.

5. The cold head according to claim 1 ,
wherein the stage includes three or more of regions partitioned the plurality of by the metal mesh materials.

6. The cold head according to claim 1 , comprising:
a first stage provided with a regenerator material; and
a second stage formed of the stage.

7. The cold head according to claim 1 ,
wherein a proportion of particle in which a form factor R represented by L2/4πA exceeds 1.5 is 5% or less in each of the regenerator material particle groups, where L is a circumferential length of a projected image of the regenerator material particle, and A is an actual area of the projected image.

8. The cold head according to claim 1 ,
wherein each of the average particle sizes of the regenerator material particle groups is in a range from 200 μm to 300 μm; and
wherein a number proportion of particles having a particle size which falls within a range from 150 μm to 350 μm is 95% or more in each of the regenerator material particle groups.

9. A superconducting magnet comprising the cold head according to claim 1 .

10. An examination apparatus comprising the cold head according to claim 1 .

11. A cryopump comprising the cold head according to claim 1 .

12. The cold head according to claim 1 ,
wherein the cold head is configured to achieve a temperature of 5 K or less.

Assignees

• Toshiba Kk
• Toshiba Materials Co Ltd

Inventors

• Yamada Katsuhiko
• Fuse Keiichi

Classifications

• F25B9/14 Primary

  characterised by the cycle used, e.g. Stirling cycle · CPC title

• F25D25/00

  Charging, supporting, and discharging the articles to be cooled · CPC title

• F25B2309/1416

  Pulse-tube cycles characterised by regenerator stack details · CPC title

• F25B2309/1415

  Pulse-tube cycles characterised by regenerator details · CPC title

• F28D17/02

  using rigid bodies, e.g. of porous material · CPC title